基本信息:
- 专利标题: 太阳能吸热膜用的镀膜装置
- 专利标题(英):Film coating device for solar heat absorption films
- 申请号:CN201510856909.1 申请日:2015-12-01
- 公开(公告)号:CN105296953A 公开(公告)日:2016-02-03
- 发明人: 朱建明 , 李金清
- 申请人: 肇庆市科润真空设备有限公司
- 申请人地址: 广东省肇庆市端州大道
- 专利权人: 肇庆市科润真空设备有限公司
- 当前专利权人: 肇庆市科润真空设备有限公司
- 当前专利权人地址: 广东省肇庆市端州大道
- 代理机构: 广州市华学知识产权代理有限公司
- 代理人: 谢静娜; 裘晖
- 主分类号: C23C14/56
- IPC分类号: C23C14/56 ; C23C14/35 ; C23C14/02
The invention discloses a film coating device for solar heat absorption films. The film coating device comprises a plurality of vacuum chambers sequentially connected, wherein the vacuum chambers comprise the feed chamber, the ion treatment chamber, the film coating chambers and the discharge chamber, gas isolation space is reserved in the joint of every two adjacent vacuum chambers, and gas isolation mechanisms are arranged in the gas isolation space respectively. Each gas isolation mechanism comprises a top plate, a transmission roller, a compression roller and a spring, wherein the transmission roller is arranged under the compression roller, a strip base material passes through the joint of the transmission roller and the compression roller, a locating block is arranged on the top surface of the top plate, and the upper part of the compression roller is connected with the locating block through the spring. According to the device, gas isolation chambers in traditional film coating devices are eliminated, and therefore the device structure is simplified, the device manufacture cost is lowered, and air seepage is avoided; a multi-acnode arc target is used in the ion treatment chamber, and the utilization rate of the multi-acnode arc target is higher than that of a traditional single-acnode arc target by more than 10 times; gas guide plates are arranged in the film coating chambers and can change the gas flow direction, the chance for reactant gas to react with ions sputtered by the target is improved, and the film coating effect is effectively improved.
公开/授权文献:
- CN105296953B 太阳能吸热膜用的镀膜装置 公开/授权日:2018-02-16
