![一种半导体器件及其制造方法和电子装置](/CN/2014/1/5/images/201410025292.jpg)
基本信息:
- 专利标题: 一种半导体器件及其制造方法和电子装置
- 专利标题(英):Semiconductor device, semiconductor device manufacturing method and electronic device
- 申请号:CN201410025292.4 申请日:2014-01-20
- 公开(公告)号:CN104795441A 公开(公告)日:2015-07-22
- 发明人: 赵猛
- 申请人: 中芯国际集成电路制造(上海)有限公司
- 申请人地址: 上海市浦东新区张江路18号
- 专利权人: 中芯国际集成电路制造(上海)有限公司
- 当前专利权人: 中芯国际集成电路制造(上海)有限公司
- 当前专利权人地址: 上海市浦东新区张江路18号
- 代理机构: 北京市磐华律师事务所
- 代理人: 高伟; 赵礼杰
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/06 ; H01L21/336
The invention provides a semiconductor device, a semiconductor device manufacturing method and an electronic device, and relates to the technical field of semiconductors. The semiconductor device comprises a semiconductor substrate, a grid electrode, a source electrode and a drain electrode, wherein the grid electrode, the source electrode and the drain electrode are located on the semiconductor substrate. The semiconductor device further comprises a trench which is located in the semiconductor substrate and below the grid electrode, a stress adjusting layer located at the lower part of the inner side of the trench and a channel area located at the upper part of the inner side of the trench, wherein the upper part of the cross section of the trench is wide, and the lower part of the cross section of the trench is narrow. According to the semiconductor device, the stress adjusting layer is located below the channel area and in such a shape that the upper part is wide and the lower part is narrow, so that the surface stress of the channel area can be enhanced, and a short-channel effect is suppressed; and trench bottom high in-situ doping diffusion suppression and surface low doping are adopted so as to be able to effectively reduce channel impurity scattering, thereby improving the channel mobility of the semiconductor device and other operating characteristics. Devices manufactured according to the semiconductor device manufacturing method also have the above advantages. The electronic device provided by the invention comprises the semiconductor device, thereby also having the above advantages.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/762 | ....电荷转移器件 |
----------------H01L29/78 | .....由绝缘栅产生场效应的 |