![n沟道非易失性存储元件及其编译方法](/CN/2014/1/85/images/201410427477.jpg)
基本信息:
- 专利标题: n沟道非易失性存储元件及其编译方法
- 专利标题(英):N-channel nonvolatile storage element and compiling method thereof
- 申请号:CN201410427477.8 申请日:2014-08-27
- 公开(公告)号:CN104332469A 公开(公告)日:2015-02-04
- 发明人: 顾经纶
- 申请人: 上海华力微电子有限公司
- 申请人地址: 上海市浦东新区张江高科技园区高斯路568号
- 专利权人: 上海华力微电子有限公司
- 当前专利权人: 上海华力微电子有限公司
- 当前专利权人地址: 上海市浦东新区张江高科技园区高斯路568号
- 代理机构: 上海天辰知识产权代理事务所
- 代理人: 吴世华; 林彦之
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/8247
The utility model discloses an n-channel nonvolatile storage element which includes a p-type semiconductor substrate which includes n-type doped source and drain regions and a p-type doped halo injection region between the source and drain regions; and a grid electrode structure which is between the n-type doped source and drain regions on the p-type semiconductor substrate. The grid electrode structure includes a gate oxide layer, a polycrystalline silicon floating gate, an intermediate insulating layer and a control grid electrode. During compiling of the n-channel nonvolatile storage element, through application of a positive grid electrode voltage to the control grid electrode, application of a 0V source electrode voltage to the source region, application of a drain electrode voltage larger than the source electrode voltage to the drain region and application of a positive substrate voltage to the substrate, under the action of the voltage difference of the grid electrode voltage and the source electrode voltage, belt-belt tunneling electrons are generated in areas of the halo injection area, close to the source region and the gate oxide layer. The belt-belt tunneling electrons accelerate under the action of the voltage difference of the substrate voltage and the source electrode voltage and enter the gate oxide layer under the action of the grid electrode voltage. The n-channel nonvolatile storage element is capable of solving a problem of erasure saturation of a p-channel storage device.
公开/授权文献:
- CN104332469B n沟道非易失性存储元件及其编译方法 公开/授权日:2021-01-29
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/02 | .包括有专门适用于整流、振荡、放大或切换的半导体组件并且至少有一个电位跃变势垒或者表面势垒的;包括至少有一个跃变势垒或者表面势垒的无源集成电路单元的 |
----------H01L27/04 | ..其衬底为半导体的 |
------------H01L27/06 | ...在非重复结构中包括有多个单个组件的 |
--------------H01L27/105 | ....包含场效应组件的 |
----------------H01L27/112 | .....只读存储器结构的 |
------------------H01L27/115 | ......电动编程只读存储器 |