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基本信息:
- 专利标题: 半导体器件及其制造方法
- 专利标题(英):Semiconductor device and method of manufacturing the same
- 申请号:CN201310127417.X 申请日:2013-04-12
- 公开(公告)号:CN103456621A 公开(公告)日:2013-12-18
- 发明人: 大和田保 , 大平光 , 落水洋聪
- 申请人: 富士通半导体股份有限公司
- 申请人地址: 日本神奈川县横滨市
- 专利权人: 富士通半导体股份有限公司
- 当前专利权人: 富士通半导体股份有限公司
- 当前专利权人地址: 日本神奈川县横滨市
- 代理机构: 隆天国际知识产权代理有限公司
- 代理人: 张浴月; 李玉锁
- 优先权: 2012-122047 2012.05.29 JP
- 主分类号: H01L21/31
- IPC分类号: H01L21/31 ; H01L21/3105 ; H01L29/06
The present invention provides a semiconductor device and a method of manufacturing the same. A method of manufacturing a semiconductor device includes: forming a first electrode on a first semiconductor substrate; coating the semiconductor substrate with an insulating material having a first viscosity at a first temperature, having a second viscosity lower than the first viscosity at a second temperature higher than the first temperature, and having a third viscosity higher than the second viscosity at a third temperature higher than the second temperature; and forming a first insulating film by curing the insulating material. In this method, the forming the first insulating film includes: bringing the insulating material to the second viscosity by heating the insulating material under a first condition; and bringing the insulating material to the third viscosity by heating the insulating material under a second condition. The first condition and the second condition are different in their temperature rising rate. According to the semiconductor device, the bottom of each projected part is provided with a thick passive film for reducing damage.
公开/授权文献:
- CN103456621B 半导体器件及其制造方法 公开/授权日:2016-03-23
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/18 | ...器件有由周期表第Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料 |
--------------H01L21/26 | ....用波或粒子辐射轰击的 |
----------------H01L21/31 | .....在半导体材料上形成绝缘层的,例如用于掩膜的或应用光刻技术的;以及这些层的后处理;这些层的材料的选择 |