基本信息:
- 专利标题： 具有微构造的外延结构体的制备方法
- 专利标题（英）：Preparation method of extensional structural body with micro-structure
- 申请号：CN201210122531.9 申请日：2012-04-25
- 公开(公告)号：CN103374751A 公开(公告)日：2013-10-30
- 发明人： 魏洋 , 范守善
- 申请人： 清华大学 , 鸿富锦精密工业(深圳)有限公司
- 申请人地址： 北京市海淀区清华大学清华-富士康纳米科技研究中心401室
- 专利权人： 清华大学,鸿富锦精密工业(深圳)有限公司
- 当前专利权人： 清华大学,鸿富锦精密工业(深圳)有限公司
- 当前专利权人地址： 北京市海淀区清华大学清华-富士康纳米科技研究中心401室
- 主分类号： C30B25/02
- IPC分类号： C30B25/02 ; C30B25/18
The invention relates to a preparation method of an extensional structural body with a micro-structure, which comprises the following steps: providing a base, wherein the base is provided with an epitaxial growth surface; growing a buffer layer on the epitaxial growth surface of the base; arranging a graphene layer on the surface of the buffer layer, away from the base; growing an epitaxial layer on the buffer layer provided with the graphene layer; removing the base so as to obtain the extensional structural body with the micro-structure. The extensional structural body with the micro-structure, obtained by using the preparation method disclosed by the invention, has few dislocation defects; the stress between the epitaxial layer and the base is small, and therefore, the quality of the extensional structural body is high.
公开/授权文献:
- CN103374751B 具有微构造的外延结构体的制备方法 公开/授权日：2016-06-15