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基本信息:
- 专利标题: 硅片测试前加热装置制作方法
- 专利标题(英):Manufacturing method of device for heating before testing silicon wafer
- 申请号:CN201310234796.2 申请日:2013-06-13
- 公开(公告)号:CN103338535A 公开(公告)日:2013-10-02
- 发明人: 费跃伟
- 申请人: 浙江光普太阳能科技有限公司
- 申请人地址: 浙江省湖州市长兴县经济开发区经四路588号
- 专利权人: 浙江光普太阳能科技有限公司
- 当前专利权人: 浙江光普太阳能科技有限公司
- 当前专利权人地址: 浙江省湖州市长兴县经济开发区经四路588号
- 代理机构: 杭州华鼎知识产权代理事务所
- 代理人: 秦晓刚
- 主分类号: H05B3/00
- IPC分类号: H05B3/00
The invention discloses a manufacturing method of a device for heating before testing a silicon wafer. The manufacturing method comprises the following steps: at first, a portal heating frame made of glass is set up above a traveling arm in front of a tested black box, wherein an electric wire hole is drilled in the top of the heating frame, a thermal radiation film is laid on the outer side of the top of the heating frame; then, an infrared heating lamp is mounted at the top of the heating frame, and an infrared heating lamp power cord penetrates from the electric wire hole in the top of the heating frame and is connected with the infrared heating lamp; at last, a heating switch is mounted on the outer side of the heating frame. When a to-be-tested silicon wafer is conveyed, the infrared heating lamp is turned on, and the surface temperature of the to-be-tested silicon wafer is increased through infrared light radiation and heat transfer, so that the to-be-tested silicon wafer meets the temperature requirement in testing, which avoids the condition that the temperature is adjusted through turning-on of an air conditioner, the energy consumption is reduced, and the heating device is convenient to refit, and is low in cost.
IPC结构图谱:
H | 电学 |
--H05 | 其他类目不包含的电技术 |
----H05B | 电热;其他类目不包含的电照明 |
------H05B3/00 | 欧姆电阻加热的 |