基本信息:
- 专利标题： 用于制造铁电器件的方法
- 申请号：CN201180016715.0 申请日：2011-03-30
- 公开(公告)号：CN102859737B 公开(公告)日：2014-10-29
- 发明人： 松岛朝明 , 山内规裕 , 小川纯矢 , 相泽浩一
- 申请人： 松下电器产业株式会社
- 申请人地址： 日本大阪府
- 专利权人： 松下电器产业株式会社
- 当前专利权人： 松下电器产业株式会社
- 当前专利权人地址： 日本大阪府
- 代理机构： 永新专利商标代理有限公司
- 代理人： 舒雄文; 王英
- 优先权： 2010-083864 2010.03.31 JP
- 国际申请： PCT/JP2011/058048 2011.03.30
- 国际公布： WO2011/125754 JA 2011.10.13
- 进入国家日期： 2012-09-28
- 主分类号： H01L41/293
- IPC分类号： H01L41/293 ; B81C3/00 ; G01J1/02 ; H01L21/8246 ; H01L27/105 ; H01L41/08 ; H01L41/113 ; H01L41/18
A seed layer having a predetermined pattern is formed on a side of one surface of a second substrate, and a ferroelectric layer is formed on the side of said one surface of the second substrate. A lower electrode is formed on the ferroelectric layer, and the lower electrode and a first substrate are bonded via a bonding layer. A laser beam with a predetermined wavelength is irradiated from a side of other surface of the second substrate to transfer a ferroelectric film, which overlaps with the seed layer, of the ferroelectric layer and the seed layer onto the side of said one surface of the first substrate. The laser beam is a beam with a wavelength, herein the beam passes through the second substrate, and is reflected by the seed layer, and moreover is absorbed by a second portion of the ferroelectric layer. The second portion does not overlap with the seed layer.
公开/授权文献:
- CN102859737A 用于制造铁电器件的方法 公开/授权日：2013-01-02
IPC结构图谱:
| H | 电学 |
| --H04 | 电通信技术 |
| ----H04R | 扬声器、送话器、唱机拾音器或类似的传感器 |
| ------H01L41/16 | .材料的选择 |
| --------H01L41/253 | ..对器件或其部件进行处理以改变压电或电致伸缩特性，例如极化特性、振动特性或模式调整 |
| ----------H01L41/293 | ...多层压电或电致伸缩部件的连接电极 |