![可实时测量的同步相移斐索干涉装置](/CN/2012/1/7/images/201210039555.jpg)
基本信息:
- 专利标题: 可实时测量的同步相移斐索干涉装置
- 专利标题(英):Synchronous phase-shifting Fizeau interference device capable of measuring in real time
- 申请号:CN201210039555.8 申请日:2012-02-21
- 公开(公告)号:CN102589414A 公开(公告)日:2012-07-18
- 发明人: 姚保利 , 郜鹏 , 闵俊伟 , 雷铭 , 严绍辉 , 杨延龙 , 叶彤
- 申请人: 中国科学院西安光学精密机械研究所
- 申请人地址: 陕西省西安市高新区新型工业园信息大道17号
- 专利权人: 中国科学院西安光学精密机械研究所
- 当前专利权人: 中国科学院西安光学精密机械研究所
- 当前专利权人地址: 陕西省西安市高新区新型工业园信息大道17号
- 代理机构: 西安智邦专利商标代理有限公司
- 代理人: 徐平
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/24
The invention aims to provide a synchronous phase-shifting Fizeau interference device capable of performing real-time high-accuracy measurement on the surface appearance of an object. A synchronous phase-shifting technology is combined with a Fizeau interference method, and the technical problems that the traditional interferometer has low stability and low measurement accuracy and cannot measure objects in real time and the like are solved. The synchronous phase-shifting Fizeau interference device capable of measuring in real time comprises an illumination unit, an interference unit and a synchronous phase-shifting unit. Due to the adoption of a coaxial interference light path, a space-bandwidth product of a charge coupled device (CCD) is fully utilized; and compared with an off-axis light path, the coaxial interference light path has a higher spatial resolution; a flat glass plate in the traditional Fizeau interferometer is replaced by a 1/4 wave plate, so that object light and reference light have orthogonal polarization directions, and the compactness of the structure of the device is kept under the synchronous phase-shifting; and moreover, four phase-shifting interference patterns can be obtained through single exposure, and the real-time property of measurement is realized on the premise of guaranteeing a high spatial resolution.
公开/授权文献:
- CN102589414B 可实时测量的同步相移斐索干涉装置 公开/授权日:2014-08-06
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
--------G01B9/02 | .干涉仪 |