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基本信息:
- 专利标题: 一种157nm深紫外激光微加工制备场致发射阴极的方法
- 专利标题(英):Method with micromachining of 157nm deep ultraviolet laser for preparing field emission cathode
- 申请号:CN200910063190.0 申请日:2009-07-17
- 公开(公告)号:CN101604604A 公开(公告)日:2009-12-16
- 发明人: 童杏林 , 姜德生 , 林凯
- 申请人: 武汉理工大学
- 申请人地址: 湖北省武汉市武昌区珞狮路122号
- 专利权人: 武汉理工大学
- 当前专利权人: 宜昌市森德电工设备制造有限公司
- 当前专利权人地址: 湖北省武汉市武昌区珞狮路122号
- 代理机构: 湖北武汉永嘉专利代理有限公司
- 代理人: 王玉华
- 主分类号: H01J9/02
- IPC分类号: H01J9/02
The invention relates to a method adopting 157nm deep ultraviolet laser as a light source for preparing a field emission cathode. The method can ideally control the state of distribution of cathodes of a field emission display and the shape and the sharpness of a pointed cone of each cathode, thereby increasing the density and the emission uniformity of cathode emission current. The technical scheme is as follows: under vacuum environment, silicon materials are irradiated by the 157nm deep ultraviolet laser matched with corresponding masking techniques so as to form a corresponding inverted-cone structure, and organic polymer materials are injected inside; and after consolidation and formation, the silicon materials are removed, thereby obtaining a folding and soft tip cone-array substrate. The method can accurately control technological processes, has low power consumption and high brightness, the prepared cathode is ultra-thin, and the state of distribution of the cathodes of the field emission display and the shape and the sharpness of the pointed cone of each cathode can be ideally controlled.
公开/授权文献:
- CN101604604B 一种157nm深紫外激光微加工制备场致发射阴极的方法 公开/授权日:2011-05-11
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01J | 放电管或放电灯 |
------H01J9/00 | 专用于制造放电管、放电灯及其部件的设备和方法;从放电管或灯回收材料 |
--------H01J9/02 | .电极或电极系统的制造 |