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基本信息:
- 专利标题: 振荡器装置、光偏转器以及使用光偏转器的光学器械
- 专利标题(英):Oscillator device, optical deflector and optical instrument using the same
- 申请号:CN200710109624.7 申请日:2007-06-07
- 公开(公告)号:CN101086555B 公开(公告)日:2010-08-04
- 发明人: 加藤贵久 , 古川幸生 , 秋山贵弘
- 申请人: 佳能株式会社
- 申请人地址: 日本东京
- 专利权人: 佳能株式会社
- 当前专利权人: 佳能株式会社
- 当前专利权人地址: 日本东京
- 代理机构: 中国国际贸易促进委员会专利商标事务所
- 代理人: 朱德强
- 优先权: 2006-158004 2006.06.07 JP; 2007-065950 2007.03.15 JP; 2007-130619 2007.05.16 JP
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G03G15/00 ; B41J2/47
摘要:
一种振荡器装置及其制造方法,能够大范围且高速度地进行振荡部件的转动惯量或者重心位置的调节。其中,该振荡部件绕振荡轴线(17)振荡,并且该振荡部件包含可动元件(11)和质量调节部件(19),在可动元件(11)和质量调节部件(19)之间限定有空腔(30),从而,通过对质量调节部件(19)进行激光束照射,该质量调节部件的与空腔相邻近的一部分被部分地去除,该要被去除的部分包含所述质量调节部件中未被激光束照射的部分。
摘要(英):
An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.
公开/授权文献:
- CN101086555A 振荡器装置、光偏转器以及使用光偏转器的光学器械 公开/授权日:2007-12-12