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    • 3. 发明授权
    • Alignment assembly
    • 对准组件
    • US08267388B2
    • 2012-09-18
    • US11853901
    • 2007-09-12
    • Ying Xu
    • Ying Xu
    • B23Q3/18B25B1/10B25B5/10B25B5/00B27B5/18B27B27/06B27B3/28B27B27/04B26D1/18H01L21/68
    • H01L21/68Y10T83/7697Y10T83/773
    • Alignment assembly is used to center a sample on a moving stage system. The alignment assembly includes a pair of slides stacked on a stage with linear perpendicular movement relative to each other, and at least one actuator that is preferably physically separate from the linear slides and stage. The actuator(s) repeatedly extend an actuator arm to move the linear slides, and retract the arm for subsequent movement of the stage during and after the process of centering the sample in two dimensions on the stage. Either the stage system rotates, or multiple actuators are placed to move the alignment system in perpendicular directions relative to the stage, by repeatedly contacting only the top linear slide.
    • 对准组件用于将样品居中在移动平台系统上。 该对准组件包括一对叠片在一个平台上的滑块,该平台具有相对于彼此的线性垂直运动,以及至少一个致动器,其优选地与线性滑块和平台物理分离。 致动器重复地延伸致动器臂以移动线性滑块,并且在将样品在平台上二维定心的过程期间和之后使臂缩回以用于阶段的后续移动。 舞台系统旋转,或者多个致动器被放置成相对于舞台在垂直方向上移动对准系统,通过仅反复接触顶部线性滑块。
    • 6. 发明申请
    • Alignment Assembly
    • 对齐装配
    • US20090067976A1
    • 2009-03-12
    • US11853901
    • 2007-09-12
    • Ying Xu
    • Ying Xu
    • H01L21/68B65G47/22
    • H01L21/68Y10T83/7697Y10T83/773
    • Alignment assembly is used to center a sample on a moving stage system. The alignment assembly includes a pair of slides stacked on a stage with linear perpendicular movement relative to each other, and at least one actuator that is preferably physically separate from the linear slides and stage. The actuator(s) repeatedly extend an actuator arm to move the linear slides, and retract the arm for subsequent movement of the stage during and after the process of centering the sample in two dimensions on the stage. Either the stage system rotates, or multiple actuators are placed to move the alignment system in perpendicular directions relative to the stage, by repeatedly contacting only the top linear slide.
    • 对准组件用于将样品居中在移动平台系统上。 该对准组件包括一对叠片在一个平台上的滑块,该平台具有相对于彼此的线性垂直运动,以及至少一个致动器,其优选地与线性滑块和平台物理分离。 致动器重复地延伸致动器臂以移动线性滑块,并且在将样品在平台上二维定心的过程期间和之后使臂缩回以用于阶段的后续移动。 舞台系统旋转,或者多个致动器被放置成相对于舞台在垂直方向上移动对准系统,通过仅反复接触顶部线性滑块。