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    • 9. 发明授权
    • System and method for non-contact metrology of surfaces
    • 表面非接触式测量系统和方法
    • US09068904B2
    • 2015-06-30
    • US13353110
    • 2012-01-18
    • Robert E. ParksRobert A. SmythePeng SuJames H. BurgeRoger Angel
    • Robert E. ParksRobert A. SmythePeng SuJames H. BurgeRoger Angel
    • G01B11/24G01M11/00G01M11/02G01B11/25
    • G01M11/005G01B11/2513G01M11/0264
    • A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.
    • 非接触计量系统利用可以用多个目标编程的显示器。 显示目标在镜面上发光,并且由成像装置检测反射的目标。 基于反射图案的显示图案和预期位置,可以表征反射表面。 显示的图案可以是目标的规则阵列,并且由成像装置检测的反射图案是其位置基于特定显示图案,显示系统和成像装置的位置以及表面的性质的目标的不规则显示 。 目标的实际位置与目标的预期位置的偏差表示表面的意外变化。 或者,显示器具有不规则的目标图案,使得反射信号导致由成像装置检测到的规则间隔的阵列。
    • 10. 发明申请
    • SYSTEM AND METHOD FOR NON-CONTACT METROLOGY OF SURFACES
    • 表面非接触式计量系统与方法
    • US20120293808A1
    • 2012-11-22
    • US13353110
    • 2012-01-18
    • Robert E. ParksRobert A. SmythePeng SuJames H. BurgeRoger Angel
    • Robert E. ParksRobert A. SmythePeng SuJames H. BurgeRoger Angel
    • G01B11/24G01N21/88
    • G01M11/005G01B11/2513G01M11/0264
    • A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.
    • 非接触计量系统利用可以用多个目标编程的显示器。 显示目标在镜面上发光,并且由成像装置检测反射的目标。 基于反射图案的显示图案和预期位置,可以表征反射表面。 显示的图案可以是目标的规则阵列,并且由成像装置检测的反射图案是其位置基于特定显示图案,显示系统和成像装置的位置以及表面的性质的目标的不规则显示 。 目标的实际位置与目标的预期位置的偏差表示表面的意外变化。 或者,显示器具有不规则的目标图案,使得反射信号导致由成像装置检测到的规则间隔的阵列。