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    • 7. 发明申请
    • FILTER MEDIUM FOR AIR FILTER AND PROCESS FOR PRODUCING THE SAME
    • 用于空气过滤器的过滤介质及其生产方法
    • WO00037160A1
    • 2000-06-29
    • PCT/JP1998/005807
    • 1998-12-22
    • B01D39/16D21H27/08B01D39/14D21H17/37
    • D04H1/4218B01D39/163D04H1/587D21H27/08Y10S55/05
    • An air filter for collecting suspended particulate substances in air, which is prevented from generating organic or inorganic substances problematic in semiconductor device production. A binder comprising as the main component an aqueous dispersion of a copolymer of a hydrophilic monomer with a hydrophobic monomer is used for bonding fibers together to produce an air filter. An organic peroxide is used as a polymerization initiator in producing the copolymer. When this air filter (8) is disposed on the downstream side of a chemical filter (7), the space (4) on the downstream side of the air filter (8) becomes substantially free from organic or inorganic substances problematic in semiconductor device production.
    • 用于在空气中收集悬浮颗粒物质的空气过滤器,其防止在半导体器件生产中产生有问题的有机或无机物质。 使用包含亲水性单体与疏水性单体的共聚物的水性分散体作为主要成分的粘合剂,将纤维粘合在一起,制成空气过滤器。 在制造共聚物中使用有机过氧化物作为聚合引发剂。 当空气过滤器(8)设置在化学过滤器(7)的下游侧时,空气过滤器(8)的下游侧的空间(4)基本上没有在半导体器件生产中存在问题的有机或无机物质 。