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    • 2. 发明申请
    • SEMICONDUCTOR TYPE PRESSURE SENSOR
    • 半导体型压力传感器
    • WO1994014042A1
    • 1994-06-23
    • PCT/JP1993001771
    • 1993-12-06
    • NIPPONDENSO CO., LTD.YAMASHITA, Yasuhiro
    • NIPPONDENSO CO., LTD.
    • G01L09/04
    • G01L19/0038G01L19/0084G01L19/0645G01L19/143G01L19/147
    • The output value of this sensor does not vary with temperature and so the nonlinearity of the output due to temperature change can be improved. The sensor comprises a housing (8) provided with a pressure detection chamber (3); a pressure receiving diaphragm (2) in contact with liquid sealed in the pressure detection chamber (3); and a pressure detecting element (4) arranged in the chamber (3) and receiving the pressure of the liquid. The diaphragm (2) has a corrugate (2c) near the fixed end, which comprises a pair of a ridge (2a) and a groove (2b), and a flat part (2d). The ratio of the distance between the ridge (2a) and the groove (2b) to the radius (R) of the diaphragm (2), and the ratio of the radius of the annular flat part (2d) to the radius (R) of the diaphragm (2) are set within given ranges.
    • 该传感器的输出值不随温度变化,因此可以提高由于温度变化引起的输出的非线性。 传感器包括设置有压力检测室(3)的壳体(8)。 与所述压力检测室(3)中密封的液体接触的受压隔膜(2); 以及设置在所述室(3)中并接收所述液体的压力的压力检测元件(4)。 隔膜(2)在固定端附近具有波纹(2c),其包括一对脊(2a)和凹槽(2b)以及平坦部分(2d)。 脊(2a)和槽(2b)之间的距离与隔膜(2)的半径(R)的比率以及环形平坦部分(2d)的半径与半径(R)的比率 的隔膜(2)设定在规定范围内。
    • 4. 发明申请
    • PRESSURE SENSOR
    • 压力传感器
    • WO1995008756A1
    • 1995-03-30
    • PCT/JP1993001344
    • 1993-09-20
    • KABUSHIKI KAISHA KOMATSU SEISAKUSHOTABATA, AkiSUZUKI, NatsushiSUZUKI, NoritakeHATA, Yasuhiko
    • KABUSHIKI KAISHA KOMATSU SEISAKUSHO
    • G01L09/04
    • G01L19/0084G01L9/0055G01L19/148
    • A pressure sensor in which drift is not generated, which can be fabricated easily from a small number of components, and whose diaphragm, sensor unit, and supporting member having a threaded edge are integrated in one module. The sensor includes a sensor module M which is provided with a diaphragm (1) in which stress is generated when a pressure p is exerted on the pressure receiving surface (1a); a sensor unit (2) having a bridge pattern made up of patterns (R1 to R4) each having two resistors arranged in the tensioning portion T and compressing portion, respectively, on the back side (1b) of the pressure receiving surface (1a); and a supporting member (3) one end (3a) of which supports the circumference of the diaphragm (1) integrally, which has a threaded portion (31) on the intermediate circumference, and has a pressure introducing hole (33) leading to the pressure receiving surface (1a) and a circumferential thread (32) at the other end. The two resistors of each resistor pattern (R1 to R4) are paired, and connected to each other in series. The resistor patterns (R1 to R4) have the same pattern, and shifted from each other by an angle of approximately 90 DEG around the diaphragm.
    • 其中不会产生漂移的压力传感器,其可以容易地从少量部件制造,并且其膜片,传感器单元和具有螺纹边缘的支撑部件集成在一个模块中。 该传感器包括传感器模块M,其具有隔膜(1),当在压力接收表面(1a)上施加压力p时,产生应力; 传感器单元(2),其具有由分别在压力接收表面(1a)的后侧(1b)上布置在张紧部分T和压缩部分中的两个电阻器的图案(R1至R4)构成的桥状图案, ; 和支撑构件(3),其一端(3a)一体地支撑所述隔膜(1)的周边,所述支撑构件在中间圆周上具有螺纹部(31),并且具有通向所述隔膜 压力接收表面(1a)和另一端的圆周螺纹(32)。 每个电阻器图案(R1至R4)的两个电阻器成对配合,并串联连接。 电阻图案(R1至R4)具有相同的图案,并且围绕隔膜相互偏移大约90度的角度。
    • 6. 发明申请
    • PRESSURE SENSOR
    • 压力传感器
    • WO1987005998A1
    • 1987-10-08
    • PCT/DE1987000096
    • 1987-03-05
    • ROBERT BOSCH GMBHBAUER, Hans-PeterWESSEL, Wolf
    • ROBERT BOSCH GMBH
    • G01L09/04
    • G01L9/0052G01L9/006G01L9/008
    • In a pressure sensor (11), a blind hole (15) is provided in the housing (10), the base of said hole serving as a pressure diaphragm (16). Located in the blind hole (15) is a measurement element (17) with a spherical cap (35) for uniform transmission of the pressure to the resistor (33) of the measurement element (17). The measurement element (17) is applied virtually at only one single point on the pressure diaphragm (16). The diameter of the measurement element (17) and consequently of the blind hole (15) can be considerably reduced so that the mechanical strength of the pressure sensor (11) is increased.
    • 在压力传感器(11)中,在壳体(10)中设置有盲孔(15),所述孔的基部用作压力隔膜(16)。 位于盲孔(15)中的是具有用于将压力均匀地传递到测量元件(17)的电阻器(33)的球形盖(35)的测量元件(17)。 测量元件(17)实际上仅应用在压力膜片(16)上的一个点上。 可以显着地减小测量元件(17)的直径和盲孔(15)的直径,从而增加压力传感器(11)的机械强度。