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    • 2. 发明申请
    • METHODS FOR DETERMINING WAFER TEMPERATURE
    • 测定温度的方法
    • WO2008003080A2
    • 2008-01-03
    • PCT/US2007072488
    • 2007-06-29
    • MATTSON TECH INCTIMANS PAUL JANIS
    • TIMANS PAUL JANIS
    • G01K19/00
    • G01K15/00G01J5/0007G01J5/0806G01J5/0831G01J5/0846G01K11/125
    • Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.
    • 用于晶片温度测量和温度测量装置的校准的方法和装置可以基于确定半导体晶片中的层的吸收。 可以通过将光引向晶片并且从入射光入射的表面下方测量从晶片反射的光来确定吸收。 校准晶片和测量系统可以被布置和配置,以便测量以预定角度反射到晶片表面的光,而不是其他光。 测量也可以基于评估晶片中或晶片上的图案的图像中的对比度。 其他测量可以利用基于反射或透射光的温度确定旁边的晶片内的光程长度的确定。
    • 3. 发明申请
    • MOBILE TESTING METHOD AND DEVICE FOR CHECKING A DISTRICT HEATING METER
    • 用于检查区域加热计的移动测试方法和装置
    • WO2004092698A1
    • 2004-10-28
    • PCT/FI2004/000235
    • 2004-04-16
    • TUUNANEN, Pertti
    • TUUNANEN, Pertti
    • G01K19/00
    • G01F25/003G01K19/00
    • The present invention relates to a mobile testing method for checking a district heating meter, in which method a checking channel (1) is connected to a checking connection (12) of an energy measuring device (10, 11) in a district heating system, the checking channel (1) is connected to a sewer (7) and the district heating water is conducted to the checking channel (1), the district heating water coming through the checking channel (1) is conducted to a measure (5) for one or more measuring intervals of the energy measuring device (10, 11), the quantity of district heating water in the measure (5) is compared with the quantity of water indicated by the energy measuring device (10, 11). The present invention also relates to a mobile testing device, which mobile testing device comprises a checking channel (1) to be connected to a checking connection (12) of an energy measuring device (10, 11) of the district heating system and a measure (5) for measuring the quantity of the water to be conducted to the checking channel. Characteristic to the mobile testing method in accordance with the invention is the fact that the district heating water coming through a checking channel (1) is guided to a measure (5) or to a sewer (7) by a controlling device for the water flow (2) to be controlled in accordance with the measuring results from the energy measuring device connected to the checking channel (1). Characteristic to the mobile testing device in accordance with the invention is the fact that the mobile testing device comprises a controlling device of water flow (2) connected to the checking channel (1) and controlled in accordance with measuring results from the energy measuring device (10, 11), for guiding the district heating water either to a measure (5) or to a sewer (7).
    • 本发明涉及一种用于检查区域供热计的移动测试方法,其中检查通道(1)连接到区域供热系统中的能量测量装置(10,11)的检查连接(12) 检查通道(1)连接到下水道(7),并且区域供热水被传导到检查通道(1),通过检查通道(1)的区域供热水进行到(5) 能量测量装置(10,11)的一个或多个测量间隔,将测量(5)中的区域供热水的量与由能量测量装置(10,11)指示的水量进行比较。 本发明还涉及一种移动测试装置,其中移动测试装置包括与区域供热系统的能量测量装置(10,11)的检查连接(12)连接的检查通道(1) (5),用于测量要传导到检查通道的水量。 根据本发明的移动测试方法的特征是,通过检查通道(1)的区域供热水通过用于水流的控制装置被引导到测量(5)或下水道(7) (2)根据连接到检查通道(1)的能量测量装置的测量结果进行控制。 根据本发明的移动测试装置的特征在于,移动测试装置包括连接到检查通道(1)的水流控制装置(2),并根据来自能量测量装置的测量结果 10,11),用于将区域供热水引导到措施(5)或下水道(7)。
    • 9. 发明申请
    • CALIBRATION OF A CHIP-BASED MICROFLUIDIC CALORIMETER
    • 基于芯片的微流控量热仪的校准
    • WO2017179981A1
    • 2017-10-19
    • PCT/NL2017/050231
    • 2017-04-13
    • TECHNISCHE UNIVERSITEIT DELFT
    • HONARMAND EBRAHIMI, KouroshVAN SCHIE, MortenHAGEDOORN, Peter LeonHAGEN, Wilfred Raymond
    • G01K19/00
    • The invention provides a calibration method for calibrating a chip-based microfluidic calorimeter (100), wherein the chip-based microfluidic calorimeter (100) comprises one or more thermopiles (110), wherein the calibration method uses the deprotonating reaction of a phosphate group, the method comprising: providing calibration liquids (120) comprising (i) a buffer with a pH range of at least 7-9 and (ii) a first compound with a phosphate group which is protonated in a pH range of at least 3-6, and mixing these calibration liquids (120) in the chip-based microfluidic calorimeter (100) to provide a calibration liquid mixture (123) whereby heat is generated, measuring the heat by the thermopiles (110) and thereby providing a corresponding thermopile signal, and calibrating the chip-based microfluidic calorimeter (100) by relating the thermopile signal to reference data of the deprotonating reaction.
    • 本发明提供了一种用于校准基于芯片的微流体量热计(100)的校准方法,其中基于芯片的微流体量热计(100)包括一个或多个热电堆(110),其中校准方法使用 所述方法包括:提供校准液体(120),所述校准液体(120)包含(i)pH范围至少为7-9的缓冲液和(ii)具有磷酸基团的第一化合物,所述磷酸基团在 pH范围至少为3-6,并且将这些校准液体(120)混合在基于芯片的微流体量热计(100)中以提供校准液体混合物(123),由此产生热量,通过热电堆(110)测量热量, 并由此提供相应的热电堆信号,并且通过将热电堆信号与去质子化反应的参考数据相关来校准基于芯片的微流体量热计(100)。