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    • 5. 发明申请
    • PRODUCING A MONO-CRYSTALLINE SHEET
    • 生产单晶片
    • WO2011151757A1
    • 2011-12-08
    • PCT/IB2011/052237
    • 2011-05-23
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONBJOERK, Mikael T.RIEL, Heike E.SCHMID, Heinz
    • BJOERK, Mikael T.RIEL, Heike E.SCHMID, Heinz
    • C30B11/10C30B11/12C30B13/18C30B15/08H01L31/18
    • C30B15/08C30B11/003C30B11/02C30B11/10C30B11/12C30B13/18C30B15/002C30B21/06C30B29/06C30B29/64H01L31/0312H01L31/036H01L31/1804Y02E10/547Y02P70/521Y10T117/1032
    • A method for producing a mono-crystalline sheet (11), in particular a silicon sheet (11), comprises: providing at least two aperture elements (1, 2) forming a gap (3) in-between; providing a molten alloy (4) comprising silicon in the gap (3) between said at least two aperture elements (1, 2); providing a gaseous precursor medium (5) comprising silicon in the vicinity of the molten alloy (4); providing a silicon nucleation crystal (6) in the vicinity of the molten alloy (4); and bringing in contact said silicon nucleation crystal (6) and the molten alloy (4). A device (10, 20) for producing a mono-crystalline sheet (11), in particular a silicon sheet (11), comprises at least two aperture elements (1, 2) at a predetermined distance (D) from each other thereby forming a gap (3), and being adapted to be heated for holding a molten alloy (4) comprising silicon by surface tension in the gap (3) between the aperture elements (1,2 ); a means (15) for supplying a gaseous precursor medium (5) comprising silicon in the vicinity of the molten alloy (4); and a positioning means (16) for holding and moving a nucleation crystal (6) in the vicinity of the molten alloy (2).
    • 单晶片(11),特别是硅片(11)的制造方法包括:在其间形成间隙(3)的至少两个孔元件(1,2) 提供在所述至少两个孔元件(1,2)之间的间隙(3)中包含硅的熔融合金(4); 在所述熔融合金(4)附近提供包含硅的气态前体介质(5); 在熔融合金(4)附近提供硅成核晶体(6); 并与所述硅成核晶体(6)和熔融合金(4)接触。 用于制造单晶片(11),特别是硅片(11)的装置(10,20)包括彼此间隔预定距离(D)的至少两个孔元件(1,2),从而形成 间隙(3),并且适于被加热以保持在所述孔元件(1,2)之间的所述间隙(3)中通过表面张力保持包含硅的熔融合金(4); 用于在熔融合金(4)附近供应包含硅的气态前体介质(5)的装置(15); 以及用于保持和移动熔融合金(2)附近的成核晶体(6)的定位装置(16)。
    • 6. 发明申请
    • APPARATUS AND METHOD FOR MANUFACTURING MONOCRYSTALS, AND MONOCRYSTAL
    • 用于制造单晶和单晶的装置和方法
    • WO99063132A1
    • 1999-12-09
    • PCT/JP1999/002848
    • 1999-05-28
    • C30B15/00C30B15/02C30B15/08C30B15/14C30B29/30
    • C30B15/14C30B15/00C30B15/02C30B15/08C30B29/30Y10S117/91
    • An apparatus for manufacturing monocrystals, using a pull-down method, wherein a raw powder material (5p) is supplied onto a premelting plate (3) in an electric furnace (10) by a raw powder material supply unit (20) to melt the material (5p) thereon and form a material melted-liquid (5m), which is introduced into a crucible (2) continuously by dropping, to grow crystals (18), dry air being introduced into the raw powder material (5p) in a tank (6) therefor to prevent the material (5p) from being moisturized, a pipe (9) for transferring the raw powder material (5p) being cooled to prevent the material (5p) from being melted to clog the transfer pipe (9) with a melted material, whereby monocrystals having a stable chemical composition, a large diameter and a large length can be manufactured at a low cost.
    • 一种用于制造单晶的装置,使用下拉方法,其中原料粉末材料(5p)通过原料粉供料单元(20)供应到电炉(10)中的预熔板(3)上,以熔化 在其上形成材料(5p),并通过滴加连续引入坩埚(2)中的熔融液体(5m),以生长晶体(18),将干燥空气引入到原料粉末材料(5p)中 用于防止材料(5p)被保湿的罐(6),用于转移原料粉末材料(5p)的管道(9)被冷却以防止材料(5p)熔化以堵塞输送管道(9) 具有熔融材料,由此可以以低成本制造具有稳定化学组成,大直径和大长度的单晶。
    • 7. 发明申请
    • PROCESS AND DEVICE FOR MANUFACTURING MONOCRYSTALLINE SEMICONDUCTOR PLATES
    • 用于制造单晶半导体板的工艺和装置
    • WO8903902A3
    • 1989-06-15
    • PCT/EP8800929
    • 1988-10-17
    • WISOTZKI JUERGEN
    • WISOTZKI JUERGEN
    • C30B15/08C30B15/34
    • C30B15/34C30B15/08
    • In a process for manufacturing monocrystalline semiconductor plates, e.g. wafers, the melt (12) to be crystallized is introduced into a moulding shaft (14) connected to the bottom of the melting crucible (10). The moulding shaft has a smooth-walled inner surface machined to a high-quality optical finish and an inner width equal to the thickness of the semiconductor plates to be manufactured. As the monocrystal grows in the moulding shaft (14), it is pushed downward. When it reaches a sufficient length, the monocrystal can be severed perpendicular to the direction of feed at a distance from the length of an outer edge of the semiconductor plates to be manufactured.
    • 在制造单晶半导体板的过程中,例如, 晶片,待结晶的熔体(12)被引入连接到熔化坩埚(10)底部的模制轴(14)。 成型轴具有加工成高质量光学表面的光滑壁内表面和等于待制造的半导体板的厚度的内部宽度。 随着单晶在成型轴(14)中生长,其被向下推。 当达到足够的长度时,单晶可以在与要制造的半导体板的外边缘的长度相距一定距离的垂直于进给方向的方向上被切断。