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    • 10. 发明申请
    • HERMETIC MEMS PACKAGE WITH INTERLOCKING LAYERS
    • 具有互连层的HERMETIC MEMS封装
    • WO02055430A1
    • 2002-07-18
    • PCT/US2001/014764
    • 2001-05-08
    • B81B7/00H01L23/20H01L23/26
    • B81B7/007H01L23/20H01L23/26H01L2224/48091H01L2224/73265H01L2924/00014
    • A method of fabricating a package for a micro-electromechanical systems (MEMS) device. A flex circuit interconnect subassembly for the package is made by placing a flex circuit on a pad insert, attaching a carrier insert to the pad insert to deflect the lead portions of the flex circuit, and applying a cover insert to the pad insert, after the attachment of the carrier insert, to re-deflect the lead portions of the flex circuit toward the device bond sites. The flex circuit interconnect subassembly and the die/carrier subassembly are joined using mechanical interlocking layers. The MEMS components on the MEMS die are hermetically sealed, such as by bonding a cover to the upper package body or the lower package body. The cover may have features such as ports which allow the MEMS components to interact with the external environment.
    • 一种制造用于微机电系统(MEMS)装置的封装的方法。 用于封装的柔性电路互连子组件通过将柔性电路放置在焊盘插入件上,将载体插入件附接到焊盘插入件以使柔性电路的引线部分偏转,并在盖板插入件之后施加盖板插件 承载插入件的附接,以使柔性电路的引导部分朝向装置粘结位置重新偏转。 柔性电路互连子组件和模具/载体子组件使用机械互锁层连接。 MEMS模具上的MEMS部件是密封的,例如通过将盖子粘合到上部封装体或下部封装体上。 盖可以具有诸如允许MEMS部件与外部环境相互作用的端口的特征。