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1. 发明申请

WO2004006281A2 METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM 审中-公开
标题翻译：离轴电子束磁场聚焦的方法与装置
公开(公告)号：WO2004006281A2
公开(公告)日：2004-01-15
申请号：PCT/US2003/021659
申请日：2003-07-09
申请人： COMMUNICATIONS AND POWER INDUSTRIES, INC.
发明人： CATTELINO,, Mark J., , FRIEDLANDER, Fred, I.
IPC分类号： H01J29/00
CPC分类号： H01J23/0876 , H01J3/20 , H01J23/087
摘要： Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device (MBEBD). A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a (MBEBD). The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the (MBEBD). The flux plate includes apertures for each beam of the (MBEBD). A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps (MBEBD) have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the (MBEBD) as linear beams.
摘要翻译：围绕多光束电子束装置（MBEBD）的每个光束的纵向轴线提供轴向对称的磁场。在阴极和阳极之间并且靠近（MBEBD）的阴极处设置通量均衡器组件。组件包括完全包含在（MBEBD）的磁聚焦电路内的铁磁磁通板。磁通板包括用于（MBEBD）的每个光束的孔。磁通平衡间隙或间隙设置在磁通板中，以在磁通板中的磁场中产生扰动，其反映由波束的离轴位置引起的不对称性。间隙（MBEBD）具有产生局部连续变化的磁阻的作用，其局部地反映磁场不对称性。通量均衡器组件防止或基本上减少光束扭曲并将（MBEBD）的所有电子束保持为线性光束。

2. 发明申请

WO2004006281A3 METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM 审中-公开
标题翻译：用于离轴电子束的磁聚焦的方法和设备
公开(公告)号：WO2004006281A3
公开(公告)日：2004-07-22
申请号：PCT/US0321659
申请日：2003-07-09
申请人： COMM AND POWER IND INC
发明人： CATTELINO MARK J , FRIEDLANDER FRED I
IPC分类号： H01J23/087 , G01K1/08 , H01J3/14 , H01J3/20 , H01J25/10 , H01J29/00 , H01J29/46 , H01J29/70
CPC分类号： H01J23/0876 , H01J3/20 , H01J23/087
摘要： Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device (MBEBD). A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a (MBEBD). The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the (MBEBD). The flux plate includes apertures for each beam of the (MBEBD). A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps (MBEBD) have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the (MBEBD) as linear beams.
摘要翻译：轴向对称的磁场围绕多束电子束装置（MBEBD）的每个束的纵向轴线提供。（MBEBD）的阴极和阳极之间以及阴极附近设置有通量均衡器组件。该组件包括完全包含在（MBEBD）的磁聚焦电路内的铁磁通量板。磁通板包括用于（MBEBD）的每个光束的孔。在磁通板中设置一个或多个磁通均衡间隙，以在磁通板中的磁场中提供扰动，该磁场抵消由离轴位置引起的不对称性。间隙（MBEBD）具有产生局部连续变化的磁阻的作用，局部对抗磁场不对称性。通量均衡器组件防止或基本上减少束扭曲并将（MBEBD）的所有电子束维持为线性束。

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