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    • 7. 发明申请
    • MICROMACHINE SWITCH AND METHOD OF MANUFACTURE THEREOF
    • MICROMACHINE开关及其制造方法
    • WO00065626A1
    • 2000-11-02
    • PCT/JP2000/002725
    • 2000-04-26
    • H01H11/04B62D57/00B81B3/00B81B5/00H01H1/20H01H59/00H01P1/12
    • H01P1/12H01G5/40H01H1/20H01H59/00H01H59/0009Y10T29/49155Y10T307/826
    • A micromachine switch for use in millimeter wave and microwave circuits, which has a simplified structure compared with the conventional one. The micromachine switch comprises first and second high-frequency signal lines (1b, 1a); a cantilever (11) fixed to one end of the first high-frequency signal line (1b) and extending above the second high-frequency signal line (1a); a first insulating means (15) formed on the second high-frequency signal line (1a); a second insulating means (14) formed between the cantilever (11) and the second high-frequency signal line (1a) that are opposed; and a first control signal line (2) connected between the end of the second high-frequency signal line (1a) and the first insulating means (15) to supply a control signal. When the control signal is applied to the second high-frequency signal line (1a), the cantilever (11) is attracted to the second high-frequency signal line (1a) and connected in terms of high frequency with the second high-frequency signal line (1a) through the second insulation means (14).
    • 一种用于毫米波和微波电路的微机械开关,与常规电机相比具有简化的结构。 微机械开关包括第一和第二高频信号线(1b,1a); 固定在第一高频信号线(1b)的一端并在第二高频信号线(1a)上方延伸的悬臂(11); 形成在第二高频信号线(1a)上的第一绝缘装置(15); 形成在所述悬臂(11)和所述第二高频信号线(1a)之间的相对的第二绝缘装置(14) 以及连接在第二高频信号线(1a)的端部和第一绝缘装置(15)之间的第一控制信号线(2),以提供控制信号。 当控制信号被施加到第二高频信号线(1a)时,悬臂(11)被吸引到第二高频信号线(1a),并且以高频与第二高频信号 (1a)通过第二绝缘装置(14)。