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    • 2. 发明申请
    • MOTOR CONTROLLER
    • 电机控制器
    • WO01082462A1
    • 2001-11-01
    • PCT/JP2001/003354
    • 2001-04-19
    • H02P23/14H02P29/00H02P5/00
    • H02P23/14G05B2219/34048G05B2219/37434G05B2219/41122H02P29/50
    • An electric motor control device is provided that controls an electric motor for driving a movable part of a machine through a transfer mechanism. When receiving a torque command as an operation command signal (9), a servo device (3) supplies an electric motor (5) with an input torque signal (12) corresponding to the operation command signal (9) to drive an electric motor (5). Consequently a movable part (7) operates to produce vibrations. The servo device (3) produces an input torque signal (12) equivalent to an input torque signal (11), and stores it together with a rotational speed signal (10) in a memory (2). An analyzer (1) carries out frequency analysis of the input torque signal (11) and the rotational speed signal (10) using FFT, and outputs the results of analysis (14).
    • 提供一种电动机控制装置,其通过传送机构来控制用于驱动机器的可动部的电动机。 当接收到作为操作指令信号(9)的转矩指令时,伺服装置(3)向电动机(5)提供与操作指令信号(9)相对应的输入转矩信号(12),以驱动电动机 5)。 因此,可移动部件(7)操作以产生振动。 伺服装置(3)产生与输入转矩信号(11)相当的输入转矩信号(12),并将其与转速信号(10)一起存储在存储器(2)中。 分析器(1)使用FFT对输入转矩信号(11)和转速信号(10)进行频率分析,并输出分析结果(14)。
    • 3. 发明申请
    • POSITIONING CONTROL METHOD
    • 定位控制方法
    • WO00052543A1
    • 2000-09-08
    • PCT/JP2000/001246
    • 2000-03-02
    • G05B5/01G05D3/12B23Q5/22G05B11/36
    • G05B5/01G05B2219/41122G05B2219/49176
    • A positioning control method for suppressing vibration of a base by feeding back a compensation value of a pre-compensator having a motor transfer function (1) for causing a motor displacement (12) by the input of the sum of an input torque (13) and the product of a table propulsive power (10) multiplied by a reducing gear and orthogonal/polar coordinate transformation constant (14), a table transfer function (4) for causing the table propulsive power (10) by the product of the difference (11) between the output of the product of the motor displacement multiplied by a reducing gear and orthogonal/polar coordinate transformation constant (2) and a table displacement (8) multiplied by a table displacement/force transducing spring constant (3) and for outputting a table displacement (7) by the table propulsive power (10), and a base drive transfer function (5) for inputting the table propulsive power (10) and the power of the product of a base displacement (9) multiplied by a base displacement/power converting spring constant (6) so as to cause a base displacement (9), the pre-compensator being adapted to define a base vibration model for causing a table displacement (8) of the table on the base by the difference between the table displacement (7) and the base displacement (9).
    • 一种定位控制方法,用于通过输入具有马达传递函数(1)的预补偿器的补偿值来反馈基座的振动,所述马达传递函数用于通过输入输入转矩(13)的和来引起马达位移(12) 以及由减速齿轮和正交/极坐标变换常数(14)乘以的表推进力(10)的乘积,用于通过差的乘积(10)产生表推进力(10)的表传递函数(4) 11)在电动机位移乘以减速齿轮和正交/极坐标变换常数(2)的乘积的输出和乘以表位移/力传感弹簧常数(3)的表位移(8)之间,并输出 通过台式推进动力(10)的台位移(7)和用于输入表推进力(10)的基座驱动传递函数(5)和基座位移(9)乘以基座的乘积的幂 displac 输出/功率转换弹簧常数(6)以便引起基座位移(9),所述预补偿器适于限定基础振动模型,以使所述基座上的所述工作台的工作台位移(8)除以 台位移(7)和基座位移(9)。