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    • 10. 发明申请
    • INTERFEROMETRIC APPARATUS AND SAMPLE CHARACTERISTIC DETERMINING APPARATUS USING SUCH APPARATUS
    • 使用这种装置的干涉仪和样品特征测定装置
    • WO2014091237A2
    • 2014-06-19
    • PCT/GB2013/053280
    • 2013-12-12
    • XIANG, JiangHAYDN, MartinUNIVERSITY OF HUDDERSFIELD
    • XIANG, JiangHAYDN, Martin
    • G01B9/02
    • G01B9/02028G01B9/02G01B9/02078G01B9/0209G01B2290/20
    • An interferometer apparatus comprising: a short coherence length or broadband light source; a light director to direct light from the light source along a measurement path to a surface of a sample and also along a reference path to a reference surface; a wavelength disperser to cause wavelength dispersion of light along one of the measurement and the reference paths; a combiner to cause light from the sample surface and light from the reference surface to produce an interference pattern or interferogram; a detector to detect intensity values of the interference pattern as a function of wavelength; and a determiner to determine from the detected intensity values the wavelength at which the measurement and reference paths are balanced, wherein the wavelength disperser is at least one of: a grating wavelength disperser, a prism wavelength disperser, and an optical dispersive medium.
    • 一种干涉仪装置,包括:短相干长度或宽带光源; 光导向器,用于将来自光源的光沿测量路径引导到样品的表面,并且还沿着到参考表面的参考路径; 波长分散器,其使得沿着测量和参考路径之一的光的波长色散; 使来自样品表面的光和来自参考表面的光产生干涉​​图案或干涉图的组合器; 检测器,用于检测作为波长的函数的干涉图案的强度值; 以及确定器,用于根据检测的强度值确定测量和参考路径平衡的波长,其中所述波长分散器是光栅波长分散器,棱镜波长分散器和光学色散介质中的至少一个。