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    • 3. 发明申请
    • 용액을 위한 정전기 부양 결정 성장 장치 및 그 성장 방법
    • 用于解决方案及其生长方法的静电诱导晶体生长装置
    • WO2015130025A1
    • 2015-09-03
    • PCT/KR2015/001122
    • 2015-02-04
    • 한국표준과학연구원
    • 이근우이수형
    • C30B7/02C30B30/04
    • C30B7/02B01D1/0029B01D1/0082B23K26/70C30B30/02C30B30/08
    • 본 발명은 정전기 부양 결정 성장 장치 및 정전기 부양 결정 성장 방법을 제공한다. 이 정전기 부양 결정 성장 장치는 상부 전극; 상기 상부 전극과 수직으로 이격되어 배치된 하부 전극; 상기 상부 전극과 상기 하부 전극 사이에 수직 정전기장을 인가하는 전원부; 및 상기 상부 전극과 상기 하부 전극 사이에 용액을 방출하여 용액 방울(solution droplet)을 형성하는 방울 디스펜서(droplet dispenser)를 포함한다. 상기 용액 방울은 하전 상태(cahrged state)로 유지되고 중력에 반하여 상기 수직 정전기장에 의하여 정전기 부양된다. 상기 용액 방울은 상기 정전기 부양된 상태에서 증발하고, 상기 용액에 용해된 용질은 결정으로 성장한다.
    • 本发明提供静电悬浮晶体生长装置和静电悬浮晶体生长方法。 静电悬浮晶体生长装置包括:上电极; 设置成与上电极垂直间隔开的下电极; 用于在上电极和下电极之间施加垂直静电场的电源部分; 以及用于在上电极和下电极之间分配溶液以形成溶液液滴的液滴分配器。 溶液液滴保持在带电状态,并通过垂直静电场抵抗重力悬浮。 溶液在静电场下以悬浮状态蒸发,溶解在溶液中的溶质以晶体形式生长。
    • 4. 发明申请
    • SINGLE CRYSTAL PROCESSING BY IN-SITU SEED INJECTION
    • 单一种子注射的单晶加工
    • WO0034552A9
    • 2001-12-13
    • PCT/US9924375
    • 1999-10-19
    • BALL SEMICONDUCTOR INC
    • VEKRIS EVANGELLOSPATEL NAINESH JHANABE MURALI
    • C30B11/00C30B29/06C30B30/08C30B29/60
    • C30B30/08C30B11/00C30B29/60Y10S117/90Y10T117/10Y10T117/1016
    • A system and method for processing crystals is disclosed. The system includes a receiver tube for receiving semiconductor granules. The granules are then directed to a chamber defined within an enclosure. The chamber maintains a heated, inert atmosphere with which to melt the semiconductor granules into a molten mass. A nozzle, located at one end of the chamber, creates droplets from the molten mass, which then drop through a long drop tube. As the droplets move through the drop tube, they form spherical shaped semiconductor crystals. The drop tube is heated and the spherical shaped semiconductor crystals may be single crystals. An inductively coupled plasma torch positioned between the nozzle and the drop tube melts the droplets, but leaving a seed in-situ, or the droplets may be melted and a seed injected in-situ. The seed can thereby facilitate crystallization.
    • 公开了一种用于处理晶体的系统和方法。 该系统包括用于接收半导体颗粒的接收管。 然后将颗粒引导到限定在外壳内的室。 该室保持加热的惰性气氛,以将半导体颗粒熔化成熔融物质。 位于腔室一端的喷嘴产生熔融物质的液滴,然后通过一个长液滴管滴下。 当液滴移动通过液滴管时,它们形成球形半导体晶体。 滴管被加热,球形半导体晶体可以是单晶。 位于喷嘴和滴管之间的电感耦合等离子体焰炬熔化液滴,但是原位留下种子,或者液滴可能被熔化,并且原位注入种子。 因此种子可以促进结晶。
    • 6. 发明申请
    • METHOD OF MANUFACTURING SINGLE CRYSTAL AND APPARATUS FOR MANUFACTURING SINGLE CRYSTAL
    • 制造单晶的方法和制造单晶的装置
    • WO1999022048A1
    • 1999-05-06
    • PCT/JP1997003844
    • 1997-10-23
    • NAKATA, Josuke
    • C30B30/08
    • C30B30/08C30B11/00C30B29/06C30B29/08C30B29/40C30B29/60Y10S117/903Y10T117/1016Y10T117/1024
    • A molten raw material is supercooled and is floated at a very weak gravity to lower the free energy of a part of the surface of the molten material, thus growing a single crystal. A single crystal manufacturing apparatus (31) has a gold image furnace (35), a chamber (33), a raw material supplying and retaining mechanism (38), fall tubes (36, 37), a rotary plate (39) and a recovery bath (40). A semiconductor raw material (32a) is melted and then fallen freely in a vacuum in the fall tubes (36, 37). In the course of the fall of the melt, a part of the surface of each spherical supercooled melt droplet (32b) is brought into contact with the solid surface of the rotary plate (39) to form a crystal nucleus, from which a single-crystal grows into a spherical single crystal (32c), which then enters the recovery bath (40).
    • 熔融的原料被过冷却并且以非常弱的重力漂浮以降低熔融材料表面的一部分的自由能,从而生长单晶。 单晶制造装置(31)具有金成像炉(35),室(33),原料供给保持机构(38),落管(36,37),旋转板(39)和 回收浴(40)。 半导体原料(32a)在倒入管(36,37)的真空中熔化然后自由落下。 在熔体的下降过程中,使每个球形过冷熔体液滴(32b)的表面的一部分与旋转板(39)的固体表面接触以形成晶核, 晶体生长成球形单晶(32c),然后进入回收槽(40)。
    • 7. 发明申请
    • APPARATUS AND METHOD FOR CONTAINERLESS DIRECTIONAL THERMAL PROCESSING OF MATERIALS IN LOW-GRAVITY ENVIRONMENTS
    • 低重力环境中材料的无方向性热处理装置和方法
    • WO1991002833A1
    • 1991-03-07
    • PCT/US1990004540
    • 1990-08-16
    • UNITED STATES DEPARTMENT OF ENERGY
    • UNITED STATES DEPARTMENT OF ENERGYPETTIT, Donald, RoyCALAWAY, James, Derrick
    • C30B13/00
    • C30B29/22C30B13/00C30B29/02C30B30/08
    • Apparatus and method for thermally processing thin, self-supporting samples (12) of material in low-gravity environments. In its simplest form, the apparatus of the present invention includes a holder (14) for the material, movable heaters (10a, 10b) on each side of the sample, and means (25) for measuring the temperature of the surface of the sample. Preferably, an auxiliary heater (20, 22) is utilized in order to maintain the sample at a temperature just below the desired processing temperature until low-gravity conditions are obtained, at which time the movable heaters rapidly bring the sample temperature up to the processing temperature. An example of the advantages of the low-gravity environment is the observed homogeneous mixing of metallic silver with a superconducting material after a sintered composite thereof is brought to melting temperature. Such uniform mixing has not been available through processing in the presence of normal terrestrial gravitational forces. Clearly, other multiphase composite materials may be processed using the present apparatus and method.
    • 用于在低重力环境中热处理薄的,自支撑的材料样品(12)的装置和方法。 在其最简单的形式中,本发明的装置包括用于材料的保持器(14),在样品的每一侧上的活动加热器(10a,10b)和用于测量样品表面的温度的装置(25) 。 优选地,使用辅助加热器(20,22)以便将样品保持在刚好低于所需加工温度的温度,直到获得低重力条件为止,此时可移动加热器将样品温度快速地带到加工 温度。 低重力环境的优点的一个例子是金属银与超导材料在其烧结复合体达到熔融温度后的均匀混合。 在正常的陆地重力存在的情况下,这种均匀混合是不可用的。 显然,可以使用本发明的装置和方法来处理其它多相复合材料。
    • 8. 发明申请
    • 球状半導体の製造装置
    • 制造球形半导体的装置
    • WO2010073413A1
    • 2010-07-01
    • PCT/JP2008/073948
    • 2008-12-25
    • 学校法人芝浦工業大学永山勝久作田裕介
    • 永山勝久作田裕介
    • H01L21/02C01B33/02H01L29/06H01L31/04
    • H01L31/1804C01B32/05C30B11/003C30B29/06C30B29/60C30B30/08H01L31/035281Y02E10/547Y02P70/521
    • 【課題】従来の球状半導体の製造装置および製造方法は、半導体材料を浮遊状態で溶融し、それをドロップチューブ中を落下させることで、球状の半導体を得ていた。この方法では、半導体材料を一つ一つ浮遊させ、溶融させてから落下させるため、大量の球状半導体を製造するには不向きであった。【解決手段】そこで本件発明では、電磁誘導加熱溶融された半導体材料を少量ずつ滴下可能なロートを有するホッパーと、前記電磁力を印加するためにホッパーの半導体装填領域を取り囲むように配置された誘導加熱コイルと、ホッパーから滴下される溶融状態の半導体材料を冷却し球状化するためのドロップチューブと、ドロップチューブ内を落下し冷却されて固体状態となった球状半導体を受けるための受容部と、を有する球状半導体の製造装置を提供する。これにより、大量の球状半導体を容易に製造することが可能となる。
    • 利用现有技术的制造球形半导体的装置和方法,通过将浮动状态的半导体材料熔化并且将熔融的半导体材料滴落在滴管中来获得球形半导体。 由于半导体材料在漂浮后逐一滴加然后熔融,所以该方法不适合制造大量的球形半导体。 球形半导体制造装置包括具有漏斗的料斗,该漏斗用于滴加被电磁感应加热和熔融的半导体材料,一排一排地设置成包围料斗的半导体带电区域的感应加热线圈 为了将电磁力施加到用于将从熔料状态滴落的半导体材料冷却成球形的下落管,以及用于接收已经冷却的球状半导体的接收单元,同时滴落在滴管中, 进入固态。 因此,可以容易地制造大量的球状半导体。