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    • 7. 发明申请
    • MIRROR ELEMENTS FOR EUV LITHOGRAPHY AND PRODUCTION METHODS THEREFOR
    • 镜像的镜像元素及其生产方法
    • WO2011076527A1
    • 2011-06-30
    • PCT/EP2010/068476
    • 2010-11-30
    • CARL ZEISS SMT GMBHCLAUSS, Wilfried
    • CLAUSS, Wilfried
    • G02B1/12G02B7/18G02B5/08C03B19/06C04B35/645C03B32/00
    • C03C23/0005C03B32/005C03B2201/42C03C17/00C03C17/40C03C2218/31G02B1/12G02B5/0891G02B7/181G03F7/70316G03F7/7095G21K1/062
    • The invention relates to a method for the production of a mirror element (10) that has a reflective coating (10a) for the EUV wavelength range and a substrate (10b), the method comprising: pre-compacting the substrate (10b) by hot isostatic pressing, and applying the reflective coating (10a) to the pre-compacted substrate (10b). In the method, either the pre-compacting of the substrate (10b) is performed until a saturation value of the compaction of the substrate (10b) by long-term EUV irradiation is reached, or, for further compaction, the pre-compacted substrate (10b) is irradiated, especially homogeneously, with ions (16) and/or with electrons in a surface region (15) in which the coating (10a) has been or will be applied. The invention also relates to a mirror element (10) for the EUV wavelength range having a substrate (10b) pre-compacted by hot isostatic pressing, and to an EUV projection exposure system having at least one such mirror element (10).
    • 本发明涉及一种用于生产具有用于EUV波长范围的反射涂层(10a)的反射镜元件(10)和基底(10b)的方法,所述方法包括:通过热预加压基底(10b) 等离子体压制,并将反射涂层(10a)施加到预压实的基板(10b)上。 在该方法中,进行基板(10b)的预压实,直到达到通过长期EUV照射的基板(10b)的压实的饱和值,或者为了进一步压缩,预压实基板 (10b)在涂覆(10a)已经或将被施加的表面区域(15)中与离子(16)和/或电子特别均匀地照射。 本发明还涉及一种用于EUV波长范围的反射镜元件(10),其具有通过热等静压压制而预压实的基底(10b),以及具有至少一个这样的镜元件(10)的EUV投影曝光系统。