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    • 3. 发明申请
    • METHOD FOR PRODUCING AN ADDRESSABLE FIELD-EMISSION CATHODE AND AN ASSOCIATED DISPLAY STRUCTURE
    • 用于生产可寻址场致发射阴极的方法和相关的显示结构
    • WO0163637A2
    • 2001-08-30
    • PCT/RU0100073
    • 2001-02-22
    • OOO VYSOKIE TBLYABLIN ALEXANDR ALEXANDROVICRAKHIMOV ALEXANDR TURSUNOVICHSAMORODOV VLADIMIR ANATOLIEVICSUETIN NIKOLAI VLADISLAVOVICH
    • BLYABLIN ALEXANDR ALEXANDROVICRAKHIMOV ALEXANDR TURSUNOVICHSAMORODOV VLADIMIR ANATOLIEVICSUETIN NIKOLAI VLADISLAVOVICH
    • C23C16/26H01J1/30H01J9/02H01J17/06H01J
    • H01J9/025
    • The inventive method relates to microelectronic and consists in the application of an emission layer to elements of an addressable field-emission electrode with the aid of a gas-phase synthesis method in a hydrogen flow accompanied by a supply of a carbonaceous gas. A dielectric backing is made of a high-temperature resistant material and discrete elements of the addressable field-emission electrode are made of a high-temperature resistant metal. the growth rate of the emission layer on the dielectric backing is smaller than the growth rate of the emission layer on the metallic discrete elements as a result of a selected process of depositing the carbonaceous emission layer, namely the backing temperature, the temperature of the reactor threads, the pumping speed of a gas mixture through the reactor, a selected distance between the reactor threads and the backing and a settling time. The cathode metallic discrete elements can be made of two metallic layers. The upper metallic layer is removed before the formation of required configurations from the remaining layer. The layer materials are selected in such a way that the emission characteristics thereof can ensure a required current from the upper metallic layer. For producing a display structure, a control grid is obtained from the metal layer having an emission threshold higher than a field density at which the cathode emits the required current. The inventive method enables to avoid operations of removing the emission layer making it possible to produce flat displays having high characteristics in addition to high performance and low cost.
    • 本发明的方法涉及微电子,并且在于借助于伴随着碳质气体供应的氢气流中的气相合成方法将发射层应用于可寻址场致发射电极的元件。 电介质背衬由耐高温材料制成,可寻址场致发射电极的分立元件由耐高温金属制成。 电介质背衬上的发射层的生长速率小于金属离散元件上的发射层的生长速率,这是由于选择的沉积碳质发射层的过程的结果,即背衬温度,反应器的温度 螺纹,通过反应器的气体混合物的泵送速度,反应器螺纹和背衬之间的选定距离和沉降时间。 阴极金属分立元件可以由两个金属层制成。 在从剩余的层形成所需的构造之前去除上部金属层。 以这样的方式选择层材料,即其发射特性可确保来自上金属层的所需电流。 为了制造显示结构,从具有高于阴极发射所需电流的场密度的发光阈值的金属层获得控制栅。 本发明的方法能够避免除去发射层的操作,使得除了高性能和低成本之外,还可以生产具有高特性的平板显示器。