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1. 发明申请

WO2011106227A2 CELL FOR LIGHT SOURCE 审中-公开
标题翻译：光源的细胞
公开(公告)号：WO2011106227A2
公开(公告)日：2011-09-01
申请号：PCT/US2011/025198
申请日：2011-02-17
申请人： KLA-TENCOR CORPORATION , GROSS, Kenneth, P. , CHUANG, Yung-ho , FIELDEN, John
发明人： GROSS, Kenneth, P. , CHUANG, Yung-ho , FIELDEN, John
IPC分类号： H01J65/00 , H01J61/30 , H01J61/16
CPC分类号： H01J61/302 , H01J61/025 , H01J61/16 , H01J61/54 , H01J61/86 , H01J65/04 , H01J65/042 , H01J65/06
摘要： A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.
摘要翻译：一种用于真空紫外线等离子体光源的电池，该电池具有包含至少一种惰性气体的封闭蓝宝石管。除了电极（在一些实施例中），这种电池不具有金属外壳，金属对金属密封件或任何其它金属法兰或部件。以这种方式，电池被保持为相对小的尺寸，并且表现出比使用杂化金属/窗口电池设计容易实现的气体和电池的更均匀的加热。这些设计通常导致更高的等离子体温度（较亮的光源），更短的波长输出和更低的光学噪声，这是由于较热的等离子体区域和周围较冷的气体之间产生的较小的气体对流电流。这些电池在真空紫外线范围内提供比石英或熔融石英电池更大的输出量。这些电池还可以在红外范围内产生连续的光谱发射，使其成为宽带光源。

2. 发明申请

WO2013052878A1 HYDROGEN PASSIVATION OF NONLINEAR OPTICAL CRYSTALS 审中-公开
标题翻译：氢化非线性光学晶体的钝化
公开(公告)号：WO2013052878A1
公开(公告)日：2013-04-11
申请号：PCT/US2012/059072
申请日：2012-10-05
申请人： KLA-TENCOR CORPORATION
发明人： CHUANG, Yung-ho , DRIBINSKI, Vladimir
IPC分类号： G02F1/35
CPC分类号： H01L21/3003 , C30B29/10 , C30B33/00 , C30B33/02 , G01N21/3563 , G01N21/59 , G01N21/8806 , G01N21/9501 , G01N2021/3568 , G01N2021/3595 , G01N2021/8477 , G01N2021/8822 , G01N2201/06113 , H01L21/322 , H01S3/027 , H01S3/094 , H01S3/109 , H01S3/1666
摘要： The present invention includes an expcssure chamber configured to contain a passivating gas having a selected hydrogen concentration, the exposure chamber further configured to contain at least one NLO crystal for exposure to the passivating gas within the chamber, a passivating gas source fluldicaUy connected to the exposure chamber, the passivating gas source configured to supply passivating gas to an interior portion of the exposure chamber, and a substrate configured to hold the NLO crystal within the chamber,, the substrate further configured to maintain a temperature of the NLO crystal at or near a selected temperature, the selected temperature being below a melting temperature of the NLO crystal.
摘要翻译：本发明包括配置成容纳具有选定的氢浓度的钝化气体的曝气室，所述曝光室进一步配置为容纳至少一个用于暴露于所述室内的钝化气体的NLO晶体，连接到曝光的钝化气体源fluldica 所述钝化气体源构造成向所述曝光室的内部供应钝化气体;以及衬底，其被配置为将所述NLO晶体保持在所述室内，所述衬底还被配置为将所述NLO晶体的温度保持在或接近所选择的温度，所选择的温度低于NLO晶体的熔融温度。

3. 发明申请

WO2009117103A3 SPLIT FIELD INSPECTION SYSTEM USING SMALL CATADIOPTRIC OBJECTIVES 审中-公开
公开(公告)号：WO2009117103A3
公开(公告)日：2009-09-24
申请号：PCT/US2009/001702
申请日：2009-03-17
申请人： KLA- TENCOR CORPORATION , ARMSTRONG, Joseph, J. , CHUANG, Yung-ho
发明人： ARMSTRONG, Joseph, J. , CHUANG, Yung-ho
IPC分类号： G02B17/00 , G01B11/00 , G01N21/00 , G02B21/00 , G03F7/20 , G02B6/00
摘要： A system for inspecting a specimen is provided. The system includes an illumination subsystem configured to produce a plurality of channels of light energy, each channel of light energy produced having differing characteristics (type, wavelength, etc.) from at least one other channel of light energy. Optics are configured to receive the plurality of channels of light energy and combine them into a spatially separated combined light energy beam and direct it toward the specimen. A data acquisition subsystem comprising at least one detector is provided, configured to separate reflected light energy into a plurality of received channels corresponding to the plurality of channels of light energy and detect the received channels.

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