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    • 3. 发明申请
    • DIAMOND-LIKE CARBON COATED SEMICONDUCTOR EQUIPMENT
    • 类金刚石碳涂层半导体设备
    • WO2017204978A1
    • 2017-11-30
    • PCT/US2017/029649
    • 2017-04-26
    • INTEL CORPORATION
    • CULIC-VISKOTA, JelenaABAZARNIA, Nader N.
    • H01L21/66H01L21/324
    • G01R31/2601C23C14/0605C23C14/16C23C16/06C23C16/26C23C28/32C23C28/322C23C28/343G01R1/04G01R1/44H01L21/67092H01L21/67103H01L21/68757
    • Embodiments of the present disclosure describe semiconductor equipment devices having a metal workpiece and a diamond-like carbon (DLC) coating disposed on a surface of the metal workpiece, thermal semiconductor test pedestals having a metal plate and a DLC coating disposed on a surface of the metal plate, techniques for fabricating thermal semiconductor test pedestals with DLC coatings, and associated configurations. A thermal semiconductor test pedestal may include a metal plate and a DLC coating disposed on a surface of the metal plate. The metal plate may include a metal block formed of a first metal and a metal coating layer formed of a second metal between the metal block and the DLC coating. An adhesion strength promoter layer may be disposed between the metal coating layer and the DLC coating. Other embodiments may be described and/or claimed.
    • 本公开的实施例描述了具有金属工件和设置在金属工件的表面上的类金刚石碳(DLC)涂层的半导体设备装置,具有金属板和热敏半导体测试基座​​的热半导体测试基座 设置在金属板表面上的DLC涂层,用于制造具有DLC涂层的热半导体测试基座​​的技术以及相关配置。 热半导体测试基座​​可以包括金属板和设置在金属板的表面上的DLC涂层。 金属板可以包括由第一金属形成的金属块和在金属块和DLC涂层之间由第二金属形成的金属涂层。 粘合强度促进剂层可以设置在金属涂层和DLC涂层之间。 其他实施例可以被描述和/或要求保护。