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1. 发明申请

WO2014150397A1 COMPREHENSIVE PUMP SYSTEM AND METHOD HAVING A QUICK CHANGE MOTOR DRIVE, AUTOMATED GAS REMOVAL AND FLUID RECOVERY SYSTEM AND REMOTE MONITORING, VIEWING AND CONTROL THEREOF 审中-公开
标题翻译：综合泵系统及方法具有快速更换电机驱动，自动气体去除和流体回收系统及远程监控，查看和控制
公开(公告)号：WO2014150397A1
公开(公告)日：2014-09-25
申请号：PCT/US2014/023143
申请日：2014-03-11
申请人： INTEGRATED DESIGNS, L.P.
发明人： VINES, John, C. , LAESSLE, John , MANZAREK, Donovan, K.
IPC分类号： G05D7/06 , F04D15/00 , G05B19/02
CPC分类号： F04B49/22 , F04B13/00 , F04B17/03 , F04B35/00 , F04B43/04 , F04B43/06 , F04B43/067 , F04B43/073 , F04B43/107 , F04B43/113 , F04B49/10 , F04B53/06 , F04B53/22 , G05B19/048 , Y10T29/49236
摘要： A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.
摘要翻译：一种精密泵系统，其具有用于使用泵送流体精确和重复地输送过程流体（例如，照相化学品）的马达驱动器，其制造过程具有最小的过程流体损失，并且由此可以容易且快速地更换马达驱动器而不中断流体流路。这是通过使用与泵相关联的过程流体储存器和泵送流体储存器来实现的，该泵与泵集成或紧密相邻。此外，该精密泵系统可以通过互联网远程监控，查看和控制。此外，当除去过滤器中的捕获气体时，下游过滤块内的被捕获的工艺流体可以再循环到过程流体储存器。此外，在需要插入气体的情况下，氮气源通过阀连接到过程流体储存器。

2. 发明申请

WO2016032890A1 PUMP HAVING AN AUTOMATED GAS REMOVAL AND FLUID RECOVERY SYSTEM AND METHOD USING A GAS REMOVAL RESERVOIR HAVING AN INTERNAL PARTITION 审中-公开
标题翻译：具有自动气体去除和流体回收系统的泵以及使用具有内部分配气体移除储存器的方法
公开(公告)号：WO2016032890A1
公开(公告)日：2016-03-03
申请号：PCT/US2015/046285
申请日：2015-08-21
申请人： INTEGRATED DESIGNS, L.P.
发明人： VINES, John, C. , LAESSLE, John
IPC分类号： H01L21/027 , H01L21/02
CPC分类号： F04B13/00 , F04B51/00 , F04B53/06 , F04B53/20
摘要： A precision pump system having a motor driver for accurately and repeatedly delivering process fluid using a pumping fluid with minimal process fluid loss, and with no unwanted gas therein, to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished by a gas removal reservoir (GRR) having an inlet/outlet at the reservoir bottom and causing the unwanted gas to migrate upward and a pumping fluid reservoir both associated with the pump, either integrated with the pump or closely adjacent. Furthermore, this precision pump system can be remotely monitored, viewed and controlled over the Internet. Trapped process fluid within a downstream filter can be recirculated to the GRR when trapped gas in the filter is removed. Alternative system embodiments include recirculating process fluid back upstream. Another alternative system has the pumping chamber coupled to the GRR input.
摘要翻译：一种精密泵系统，其具有马达驱动器，用于使用泵送流体精确地和重复地输送过程流体，具有最小的工艺流体损失，并且在其中没有不需要的气体到制造过程中，并且由此可以容易且快速地更换马达驱动器而不中断流体流路。这通过在储存器底部具有入口/出口并使不需要的气体向上迁移的气体去除储存器（GRR）和与泵相关联的泵或与泵紧密相邻的泵送流体储存器来实现。此外，该精密泵系统可以通过互联网远程监控，查看和控制。当过滤器中的捕获气体被去除时，下游过滤器内的被捕获的过程流体可以再循环到GRR中。替代的系统实施例包括将过程流体再循环回上游。另一种替代系统具有耦合到GRR输入的泵送室。

3. 发明申请

WO2011088232A1 PRECISION PUMP WITH MULTIPLE HEADS 审中-公开
标题翻译：精密泵与多头
公开(公告)号：WO2011088232A1
公开(公告)日：2011-07-21
申请号：PCT/US2011/021171
申请日：2011-01-13
申请人： INTEGRATED DESIGNS, L.P. , LAESSLE, John , VINES, John , KIDD, Brian
发明人： LAESSLE, John , VINES, John , KIDD, Brian
IPC分类号： F04B13/02 , F04B15/04 , F04B43/06 , F04B43/067 , F04B43/073
CPC分类号： F04B43/02 , F04B13/02 , F04B15/04 , F04B43/06 , F04B43/067 , F04B43/0736 , F04B45/04 , F04B49/065 , F04B53/10 , F04B53/16 , F04B53/20
摘要： A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping
摘要翻译：提供了一种用于一种或多种不同工艺流体的泵，包括泵送室，其具有连接到每个泵送室上的过程流体阀的过程流体入口和出口，用于选择性地防止和允许工艺流体流过泵送室。提供用于将致动流体泵送到致动流体室的致动机构，其与致动流体室连通以允许流入不可压缩的致动流体的每个致动流体室。隔膜将每个泵送室与相关联的致动流体室分离，用于将过程流体与致动流体分离。致动机构可以通过快速断开来移除，该快速断开提供活动机构的断开而不影响过程流体。致动机构的操作以移动致动流体导致致动流体仅流动到具有打开的过程流体阀的每个致动流体室中，导致泵送

4. 发明申请

WO2011008874A1 SYSTEM AND METHOD FOR DETERMINING PUMP PRESSURE BASED ON MOTOR CURRENT 审中-公开
标题翻译：基于电机电流确定泵压力的系统和方法
公开(公告)号：WO2011008874A1
公开(公告)日：2011-01-20
申请号：PCT/US2010/042000
申请日：2010-07-14
申请人： INTEGRATED DESIGNS, L.P. , MANZAREK, Donovan Keith , LAESSLE, John , VINES, John Charles
发明人： MANZAREK, Donovan Keith , LAESSLE, John , VINES, John Charles
IPC分类号： H02P29/00 , F04B51/00
CPC分类号： F04B51/00
摘要： A system for measuring current in an H-Bridge motor drive circuit and using that current to determine the output of a device powered by the motor. A particular embodiment is disclosed for a motor-driven fluid pump. Motor current is measured at predetermined pump pressures and flow rates to create calibration tables relating motor current to pump pressure. Once calibrated, the system determines pump pressure based on motor current by referring to the calibration tables. In an embodiment, the pump is driven to achieve a predetermined fluid dispense profile. The system monitors pump pressure by measuring motor current and determines if the dispense profile is being achieved and sets alarms if predetermined thresholds are not maintained. The system also detects pump wear based on the current measurements and issues warnings to the user in such conditions.
摘要翻译：用于测量H桥电机驱动电路中的电流并使用该电流来确定由电动机供电的装置的输出的系统。公开了一种用于电动机驱动的流体泵的特定实施例。在预定的泵压力和流速下测量电动机电流，以产生将电动机电流与泵压力相关联的校准表。一旦校准，系统通过参考校准表来确定基于电动机电流的泵压力。在一个实施例中，泵被驱动以实现预定的流体分配轮廓。系统通过测量电机电流来监测泵压力，并确定是否正在实现分配配置文件，并且如果不保持预定阈值，则设置报警。该系统还根据当前测量值检测泵磨损，并在这种情况下向用户发出警告。

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