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1. 发明申请

WO2016004919A2 DEVICE FOR ESTABLISHING A BONDING CONNECTION AND TRANSDUCER THEREFOR 审中-公开
标题翻译：器具，用于产生键，且设备换能器THEREOF
公开(公告)号：WO2016004919A2
公开(公告)日：2016-01-14
申请号：PCT/DE2015100277
申请日：2015-07-02
申请人： HESSE GMBH
发明人： HUNSTIG MATTHIAS , BRÖKELMANN MICHAEL
IPC分类号： B23K20/00
CPC分类号： B23K20/004 , B23K20/002 , B23K20/106 , B23K2201/42 , H01L24/78 , H01L24/85 , H01L41/0993 , H01L2224/78347 , H01L2224/78621 , H01L2924/00014 , H01L2224/45015 , H01L2924/207 , H01L2224/45099
摘要： The invention relates to a device for establishing a bonding connection, comprising a bonding head mounted so as to rotate about an axis of rotation, and a transducer mounted on the bonding head and having a piezo actuator for generating ultrasonic vibration, in particular a natural ultrasonic vibration, a fastening section for attaching the transducer to the bonding head and a tool holder for a bonding tool, a longitudinal extension of the transducer and/or an extension of the same in the direction of an axis of a minimum inertial moment runs parallel to the axis of rotation of the bonding head, electrodes being provided on the piezo actuator in such a way that the piezo actuator can be excited by an electric field in a field direction transverse to a polarisation direction of the piezo actuator, and as a result of the excitation and of the connection of the piezo actuator to the fastening section and to the tool holder, the piezo actuator carries out a shearing motion in a shearing plane formed by the polarisation direction and by the field direction.
摘要翻译：本发明涉及一种用于制造包括键合连接的可转动地支承绕旋转轴线接合头和一个换能器，其被保持在接合头，其中，所述换能器以用于激励超声波振动的压电致动器，特别是超声波的自激振荡，换能器固定到所述固定部包括键合头和用于键合工具，其特征在于，所述换能器的纵向方向和/或在与接合头部延伸的旋转轴线平行的惯性最小力矩的轴的方向上的延伸方向，所述以这样的方式在压电致动器设置有电极的工具保持器，该压电致动器横向于其在一个场方向通过电场的手段的偏振方向可以被激发，并且，所述压电致动器作为以及它们到安装部分连接和工具保持器的的激发的结果在由偏振方向和剪切平面的磁场方向形成的平面进行剪切运动。

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