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    • 5. 发明申请
    • FLOW CONTROL SYSTEM AND METHOD THEREOF
    • 流量控制系统及其方法
    • WO2013143116A1
    • 2013-10-03
    • PCT/CN2012/073302
    • 2012-03-30
    • ACM RESEARCH (SHANGHAI) INC.WANG, JianZHAO, YuXIE, LiangzhiZHANG, XiaoyanJIA, ShenaWANG, Hui
    • WANG, JianZHAO, YuXIE, LiangzhiZHANG, XiaoyanJIA, ShenaWANG, Hui
    • G05D7/06
    • G05D7/0664
    • A flow control system and method thereof are disclosed. The flow control system includes a control valve for liquid flowing through, a pressure sensor measuring a pressure of the liquid flowing through the control valve and outputting a measuring signal, a controller receiving the measuring signal from the pressure sensor and outputting a corresponding electric current signal, an I/P converter receiving the electric current signal from the controller and outputting compressed air with corresponding pressure to the control valve to regulate the pressure of the liquid in the control valve, a flow switch measuring a flow rate of the liquid flowing into a chamber, and a needle valve regulating the flow rate to a target flow rate. The control valve, the pressure sensor, the I/P converter and the controller constitute a PID closed loop control system to provide a precise and stable liquid supply.
    • 公开了一种流量控制系统及其方法。 流量控制系统包括用于液体流过的控制阀,测量流过控制阀的液体的压力并输出测量信号的压力传感器,控制器从压力传感器接收测量信号并输出​​相应的电流信号 ,I / P转换器,其接收来自控制器的电流信号,并将相应压力的压缩空气输出到控制阀,以调节控制阀中的液体的压力;流量开关,其测量流入 以及将流量调节到目标流量的针阀。 控制阀,压力传感器,I / P转换器和控制器构成PID闭环控制系统,提供精确稳定的液体供应。