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    • 1. 发明申请
    • APPARATUS AND METHOD FOR MEASUREMENT OF FILM THICKNESS USING IMPROVED FAST FOURIER TRANSFORMATION
    • 使用改进的快速傅里叶变换测量薄膜厚度的装置和方法
    • WO2004063661A1
    • 2004-07-29
    • PCT/KR2003/001203
    • 2003-06-18
    • ELLIPSO TECHNOLOGY CO., LTD.KIM, Sang-YoulKIM, Sang-Jun
    • KIM, Sang-YoulKIM, Sang-Jun
    • G01B7/02
    • G01B11/0625
    • The present invention relates to an apparatus and method for a measurement of a film thickness using an improved fast Fourier transformation. The apparatus includes a light source, a light receiving unit for converging a light from the light source, a detection unit for splitting a reflection light reflected by the surface of the sample and inputted into the optical fabric through the lens, and outputted to the other side of the optical fabric based on a light intensity of each wavelength and providing a certain amount of wavelength, a conversion unit for converting a wavelength based spectrum data detected by the detection unit into an analog signal and then converting into a digital signal through a converter, a computation unit for computing the number of vibrations based on a high speed Fourier transformation, and an analyzing unit for measuring a film thickness.
    • 本发明涉及使用改进的快速傅里叶变换来测量膜厚度的装置和方法。 该装置包括光源,用于会聚来自光源的光的光接收单元,用于将由样品表面反射的反射光分离并通过透镜输入到光学织物中的检测单元,并输出到另一个 基于每个波长的光强度并提供一定量的波长的转换单元,用于将由检测单元检测到的基于波长的频谱数据转换为模拟信号,然后通过转换器转换成数字信号的转换单元 ,用于计算基于高速傅里叶变换的振动次数的计算单元和用于测量膜厚度的分析单元。