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    • 2. 发明申请
    • DIELECTRIC CAPACITOR
    • 电介质电容器
    • WO2013164576A1
    • 2013-11-07
    • PCT/GB2013/051048
    • 2013-04-25
    • DYSON TECHNOLOGY LIMITED
    • AMARATUNGA, GehanCHOI, YoungjinSHIVAREDDY, SaiBROWN, NathanCOLLIS, Charles
    • H01G4/008H01G4/10H01G4/12H01L49/02
    • H01G4/008B82Y10/00B82Y40/00H01G4/10H01G4/1227H01L28/91H01L29/0673
    • Disclosed is a dielectric capacitor comprising a first electrode having a structured surface, a dielectric layer coated onto the first electrode, and a second electrode coated onto the dielectric layer. The structured surface may be provided by an array or a random array of tubes, wires or rods which extend from the substrate surface. The array may be an array of carbon nanotubes. The structured surface may have a spacing to length ratio with a maximum of 1:30. The dielectric layer may comprise one or more of hafnium oxide, titanium dioxide, barium titanate. The second electrode may be aluminium, titanium nitride, platinum, ruffinium or galinstan. The dielectric coating may be provided by EPD which may be a two layer coating. The EPD may be followed by another deposition method such as ALD. Also disclosed is a method of making a dielectric capacitor comprising the steps of providing a structured electrode, coating the structured electrode with a dielectric material, and coating the dielectric material with a second electrode material.
    • 公开了一种介电电容器,其包括具有结构化表面的第一电极,涂覆在第一电极上的电介质层和涂覆在电介质层上的第二电极。 结构化表面可以由从衬底表面延伸的管,线或棒的阵列或随机阵列提供。 阵列可以是碳纳米管阵列。 结构化表面可以具有最大长度比为1:30的间隔长度比。 电介质层可以包括一种或多种氧化铪,二氧化钛,钛酸钡。 第二电极可以是铝,氮化钛,铂,铑或者加兰兰。 电介质涂层可以由EPD提供,EPD可以是双层涂层。 EPD之后可以采用另一种沉积方法,例如ALD。 还公开了一种制造介电电容器的方法,包括以下步骤:提供结构化电极,用电介质材料涂覆结构化电极,并用第二电极材料涂覆电介质材料。