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    • 4. 发明申请
    • SEMICONDUCTOR DEVICE HAVING A FIN STRUCTURE AND FABRICATION METHOD THEREOF
    • 具有精细结构和制造方法的半导体器件
    • WO2008137627A1
    • 2008-11-13
    • PCT/US2008/062338
    • 2008-05-02
    • DSM SOLUTIONS, INC.KAPOOR, Ashok, K.
    • KAPOOR, Ashok, K.
    • H01L29/808H01L21/337
    • H01L29/8086H01L29/66901H01L29/785
    • A semiconductor device includes a silicon on insulator (SOI) substrate, comprising an insulation layer formed on semiconductor material, and a fin structure. The fin structure is formed of semiconductor material and extends from the SOI substrate. Additionally, the fin structure includes a source region, a drain region, a channel region, and a gate region. The source region, drain region, and the channel region are doped with a first type of impurities, and the gate region is doped with a second type of impurities. The gate region abuts the channel region along at least one boundary, and the channel region is operable to conduct current between the drain region and the source region when the semiconductor device is operating in an on state.
    • 半导体器件包括绝缘体上硅(SOI)衬底,其包括形成在半导体材料上的绝缘层和鳍结构。 翅片结构由半导体材料形成并从SOI衬底延伸。 另外,鳍结构包括源极区,漏极区,沟道区和栅极区。 源极区域,漏极区域和沟道区域掺杂有第一类型的杂质,并且栅极区域掺杂有第二类型的杂质。 栅极区域沿着至少一个边界邻接沟道区域,并且当半导体器件工作在导通状态时,沟道区域可操作地在漏极区域和源极区域之间传导电流。