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    • 5. 发明申请
    • DEVICE AND METHOD FOR REMOVING LIQUID FROM A SURFACE OF A DISC-LIKE ARTICLE
    • 从类似物品的表面去除液体的装置和方法
    • WO2008041211A3
    • 2008-08-21
    • PCT/IB2007055357
    • 2007-10-16
    • SEZ AGKRAUS HARALDWITTERSHAGEN AXEL
    • KRAUS HARALDWITTERSHAGEN AXEL
    • H01L21/00
    • H01L21/67034H01L21/67028H01L21/67051
    • Herein disclosed is a method for removing liquid from a surface of a disc-like article comprising, rotating the disc-like article about an axis perpendicular to the disc-like article's main surface, supplying liquid onto the disc-like article when rotated, wherein the liquid is supplied from a supply port, which is moved across the substrate towards the edge of the disc-like article, supplying a first gas flow through a first gas supply port onto the disc-like article to an area, wherein the area has a centre having a distance to the centre of the rotational movement of not more than 20 mm, wherein the area, to which the first gas is supplied, is covered with a liquid layer when the first gas is supplied, and thereby opening the liquid layer at a discrete area, and supplying a second gas flow through a second gas supply port onto the disc-like article when rotated, wherein the second gas flow is supplied from a second gas supply port, which is moved across the substrate towards the edge of the substrate, wherein the distance of the second gas supply port to the centre is lower than the distance of the liquid supply port to the centre while the second gas flow and the liquid are supplied. Furthermore a device for carrying out the method is disclosed.
    • 本文公开了一种从圆盘状物品的表面除去液体的方法,其特征在于,使所述圆盘状物品围绕与所述盘状物的主面垂直的轴线旋转,在旋转时将液体供给到所述盘状物品上, 液体从供给口供给,该供给口朝向盘状物品的边缘移动,供给通过第一气体供给口的第一气体流入盘状物品到该区域, 具有距离旋转中心的距离不大于20mm的中心,其中当供应第一气体时,供应第一气体的区域被液体层覆盖,从而打开液体层 并且在旋转时将第二气体流通过第二气体供给口供应到盘状制品上,其中第二气体流从第二气体供应口供应,第二气体供应口通过基板朝向边缘移动 e,其中第二气体供给口到中心的距离低于液体供应口到中心的距离,而第二气体流和液体被供应。 此外,公开了一种用于执行该方法的装置。