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1. 发明申请

WO2011083989A3 DEFECT INSPECTION DEVICE 审中-公开
标题翻译：缺陷检测装置
公开(公告)号：WO2011083989A3
公开(公告)日：2011-11-10
申请号：PCT/KR2011000086
申请日：2011-01-06
申请人： 3B SYSTEM INC , LEE JE SUN , CHANG KI SOO , CHOI BAEK YOUNG
发明人： LEE JE SUN , CHANG KI SOO , CHOI BAEK YOUNG
IPC分类号： G01N21/88 , G01B11/30
CPC分类号： G01N21/95 , G01N2021/9513
摘要： The defect inspection device of the present example comprises: a first light source for shining a first light onto an inspection object; a retroreflective plate which retroreflects the first light reflected from the inspection object such that the first light again falls incident on the inspection object; a second light source which shines a second light onto the inspection object; and a camera which captures an image of the inspection object from the first light, which has been retroreflected and made to again fall incident on the inspection object by means of the retroreflective plate, and the second light emitted from the second light source.
摘要翻译：本实例的缺陷检查装置包括：用于将第一光照射到检查对象上的第一光源; 回射板，其使从所述检查对象反射的所述第一光回射，以使所述第一光再次入射到所述检查对象上; 将第二光照射到检查对象上的第二光源; 以及照相机，该照相机从已经被回射并且通过逆反射板再次落在检查对象上的第一光和从第二光源发射的第二光捕获检查对象的图像。

2. 发明申请

WO2012020932A3 DEFECT INSPECTING DEVICE AND DEFECT INSPECTING METHOD USING SAME 审中-公开
标题翻译：缺陷检查设备和使用相同的缺陷检查方法
公开(公告)号：WO2012020932A3
公开(公告)日：2012-05-31
申请号：PCT/KR2011005427
申请日：2011-07-22
申请人： 3B SYSTEM INC , LEE JE SUN , KIM GYEONG DEOK , KIM JONG WOO , CHANG KI SOO , LEE JONG SIK
发明人： LEE JE SUN , KIM GYEONG DEOK , KIM JONG WOO , CHANG KI SOO , LEE JONG SIK
IPC分类号： G01N21/88 , G01B11/30 , G02B5/12
CPC分类号： G01N21/8806 , G01B11/303 , G02B21/22
摘要： The present invention pertains to a defect inspecting device, which comprises: a first optical unit for collimating each pair of rays so as to irradiate the same to an inspection position of an object to be inspected, wherein the pair of rays overlap each other at the edges thereof so that the overlapped areas is irradiated to the inspection position, a second optical unit for collimating each pair of rays so as to irradiate the same to the inspection position, wherein the pair of rays overlap each other at the edges thereof so that the overlapped area is irradiated to the inspection position; a control section for controlling the first optical unit and the second optical unit to be lighted alternately; and a camera for photographing the image of the inspection position using the incident light which is irradiated from the first optical unit or the second optical unit and then reflected from the inspection position.
摘要翻译：本发明涉及一种缺陷检查装置，其包括：第一光学单元，用于准直每对光线，以将其照射到被检查物体的检查位置，其中所述一对光线在边缘，使得重叠区域照射到检查位置，第二光学单元，用于准直每对光线，以便将其照射到检查位置，其中该对光线在其边缘处彼此重叠，使得重叠区域照射到检查位置; 控制部分，用于交替地控制所述第一光学单元和所述第二光学单元被点亮; 以及用于使用从第一光学单元或第二光学单元照射并然后从检查位置反射的入射光来拍摄检查位置的图像的照相机。

3. 发明申请

WO2010104265A2 INSPECTION DEVICE FOR DEFECT INSPECTION 审中-公开
标题翻译：检查装置缺陷检查
公开(公告)号：WO2010104265A2
公开(公告)日：2010-09-16
申请号：PCT/KR2009007560
申请日：2009-12-17
申请人： 3B SYSTEM INC , LEE JE SUN , CHANG KI SOO
发明人： LEE JE SUN , CHANG KI SOO
IPC分类号： G01B11/16 , G02B5/00 , G02B13/00
CPC分类号： G02B5/12 , G01N21/8901 , G02B27/50
摘要： The present invention comprises an inspection method for transparent or reflective inspection objects, by using a retroreflective plate as a convex lens or concave mirror in such a way that defects can be detected in a stable fashion even if the inspection object is curved or if vibration occurs during movement of the inspection object; in which displacement of parallel light passing through or reflected in a measurement field is captured by using changes which occur in an inspection field, namely changes in the density gradient in the case of transmission inspection or in the reflection angle in the case of reflection inspection. The present invention also comprises an inspection device for defect inspection, in which a knife edge is provided, horizontally to the optical axis, on the front surface of a camera lens for collecting the transmitted light or reflected light, in such a way that three-dimensional defect images can be obtained since any light which diverges from the parallel light is blocked with consequent changes in the contrast of the light due to the density gradient in the inspection field at the camera.
摘要翻译：本发明包括用于透明或反射检查对象的检查方法，通过使用回射板作为凸透镜或凹面镜，即使检查对象是弯曲的或者如果发生振动，也可以以稳定的方式检测到缺陷在检查对象移动期间; 其中通过使用在检查场中发生的变化，即传输检查的情况下的密度梯度的变化或反射检查的情况下的反射角，来捕获穿过测量场或反射到测量场的平行光的位移。本发明还包括一种用于缺陷检查的检查装置，其中在用于收集透射光或反射光的照相机镜头的前表面上提供相对于光轴水平的刀刃，因为从平行光中发散的任何光都被阻挡，从而由于照相机的检查场中的密度梯度引起的光的对比度的变化而获得三维缺陷图像。

4. 发明申请

WO2010067963A3 IMAGE SENSOR COMPRISING A MICROLENS ARRAY, AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：包含微阵列的图像传感器及其制造方法
公开(公告)号：WO2010067963A3
公开(公告)日：2010-08-12
申请号：PCT/KR2009006442
申请日：2009-11-04
申请人： KOREA BASIC SCIENCE INST , CHANG KI SOO , KIM GEON HEE , YANG SUN CHEOL , KIM HYO SIK
发明人： CHANG KI SOO , KIM GEON HEE , YANG SUN CHEOL , KIM HYO SIK
IPC分类号： H01L27/146
CPC分类号： H01L31/0232 , B29D11/00365 , B29D11/00807 , H01L27/14627 , H01L27/14685 , H01L31/02327 , H01L31/18
摘要： The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention gradually increases the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and makes the oxidation speed of the region adjacent to the substrate slower and the oxidation speed of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.
摘要翻译：本发明涉及一种包括微透镜阵列的图像传感器及其制造方法。本发明的方法逐渐增加化合物半导体的铝组成比，随着后者从衬底逐渐变得越来越远，使得微透镜形成层能够生长，并且使邻近衬底的区域的氧化速度变慢，氧化速度更快，使得氧化区域和未氧化区域之间的界面在氧化完成后变成透镜形状。这样制成的镜头被集成到图像传感器中。本发明降低了其中集成微透镜的图像传感器的制造成本，增加了图像传感器的信噪比和分辨率，并且实现了改进的灵敏度。

5. 发明申请

WO2012086942A3 DEVICE FOR MEASURING TEMPERATURE DISTRIBUTION 审中-公开
标题翻译：测量温度分布的装置
公开(公告)号：WO2012086942A3
公开(公告)日：2012-09-07
申请号：PCT/KR2011009268
申请日：2011-12-01
申请人： KOREA BASIC SCIENCE INST , RYU SEON YOUNG , CHOI HAE YOUNG , CHANG KI SOO , KIM GEON HEE , YANG SUN CHEOL
发明人： RYU SEON YOUNG , CHOI HAE YOUNG , CHANG KI SOO , KIM GEON HEE , YANG SUN CHEOL
IPC分类号： G01N21/17 , G01J5/08 , G01K11/00
CPC分类号： G01K3/06 , G01J5/0003 , G01J5/047 , G01J5/0803 , G01J5/0806 , G01J5/0809 , G01J5/0846 , G01J2005/0077 , G01J2005/0081 , G01K11/125
摘要： The present invention pertains to a device for measuring a temperature distribution, which can measure a temperature distribution without contacting a sample having a three-dimensional structure. More specifically, the device for measuring the temperature distribution can measure a three-dimensional temperature distribution for the sample, wherein the temperature distribution in the depth direction (direction z) of the sample is measured by a heat reflection method using a chromatic dispersion lens, a diffraction spectrometer and an optical detection array; and the temperature distribution in the parallel directions (direction x-y axes) of the sample is measured by the heat reflection method using a two-axes scanning mirror.
摘要翻译：本发明涉及一种用于测量温度分布的装置，其能够在不接触具有三维结构的样品的情况下测量温度分布。更具体地，用于测量温度分布的设备可以测量样品的三维温度分布，其中通过使用色散透镜的热反射方法来测量样品的深度方向（方向z）上的温度分布，衍射光谱仪和光学检测阵列; 并且通过使用双轴扫描镜的热反射方法来测量样品的平行方向（方向x-y轴）上的温度分布。

6. 发明申请

WO2012091285A3 JIG FOR WINSTON CONE BAFFLE MACHINING 审中-公开
公开(公告)号：WO2012091285A3
公开(公告)日：2012-08-23
申请号：PCT/KR2011008650
申请日：2011-11-14
申请人： KOREA BASIC SCIENCE INST , YANG SUN CHOEL , CHANG KI SOO , KIM GEON HEE , KIM MYENG SANG , LEE SANG YONG
发明人： YANG SUN CHOEL , CHANG KI SOO , KIM GEON HEE , KIM MYENG SANG , LEE SANG YONG
IPC分类号： B25B11/00 , B23Q3/06 , B26D7/01
CPC分类号： B23Q3/065 , B23B31/021 , B23B2215/64 , B23B2240/21 , B23Q3/062 , B26D7/01 , Y10T83/7487
摘要： The present invention relates to a jig for processing the inner surface of an aluminum alloy Winston cone baffle having the thickness of a sheet through an ultra-precision machining, the jig having a shape identically corresponding to the outer shape of a Winston cone baffle having a can body shape made up of compound parabolic, and divided into an upper plate jig and a lower plate jig in formation, wherein the upper plate jig is divided in two, a left side jig and a right side jig, which are formed to correspond in shape and size so as to enable isolation or coupling to/from each other, and the inner surface of the Winston cone baffle attached inside the upper plate jig is made to enable ultra-precision machining at the cutting speed of 220m/min - 300m/min, which enables the inner surface of the Winston cone baffle to process a slickenside having approximately 4nm of surface roughness, and in particular, ultra-precision machining at surface roughness of Ra=2.32nm in a processing condition of cutting speed at 260m/min, cutting depth at 4 micrometer, and feeding speed at 1mm/min, thereby enabling formation of a Winston cone baffle through low-cost ultra-precision machining.
摘要翻译：本发明涉及一种用于通过超精密加工来加工具有片材厚度的铝合金温斯顿锥形挡板的内表面的夹具，该夹具的形状与温斯顿锥形挡板的外形相同罐体形状由复合抛物面构成，并且被分成上板夹具和下板夹具，其中上板夹具被分成两部分，即左侧夹具和右侧夹具，形状和尺寸，以实现彼此之间的隔离或耦合，并且安装在上板夹具内的Winston锥形挡板的内表面能够以220m / min至300m / min的切割速度进行超精密加工， min，这使得Winston锥形挡板的内表面能够处理具有大约4nm表面粗糙度的光滑剂，并且特别是在加工条件下Ra = 2.32nm的表面粗糙度的超精密加工切削速度为260m / min，切削深度为4μm，进给速度为1mm / min，从而可以通过低成本的超精密加工形成Winston锥形挡板。

7. 发明申请

WO2012074312A3 PAIRED-OPTICAL FIBER PROBE WITH A SINGLE BODY LENS AND METHOD FOR MANUFACTURING SAME 审中-公开
标题翻译：带单体镜片的成对光纤探针及其制造方法
公开(公告)号：WO2012074312A3
公开(公告)日：2012-07-26
申请号：PCT/KR2011009269
申请日：2011-12-01
申请人： KOREA BASIC SCIENCE INST , CHOI HAE YOUNG , RYU SEON YOUNG , CHANG KI SOO , KIM GEON HEE
发明人： CHOI HAE YOUNG , RYU SEON YOUNG , CHANG KI SOO , KIM GEON HEE
IPC分类号： G02B6/255 , G02B6/32
CPC分类号： G02B6/32 , G02B6/262 , G02B6/2835 , G11B7/1384
摘要： The present invention relates to a paired-optical fiber probe with a single body lens and a method for manufacturing the same. The probe comprises a first optical fiber, a second optical fiber arranged in parallel with the first optical fiber, and an optical fiber lens which is formed by heating a predetermined region including one end of the first optical fiber and one end of the second optical fiber using heating means such that ends of the first and second optical fibers are integrally connected to each other and the optical lens has a lens surface with a predetermined radius of curvature. Thus, optical coupling efficiency may be effectively improved through a simple manufacturing process, and the probe of the present invention may be utilized in a fluorospectrometer or an imaging system adopting a reflectometry.
摘要翻译：具有单体透镜的成对光纤探针及其制造方法技术领域本发明涉及一种具有单体透镜的成对光纤探针及其制造方法。探头包括第一光纤，与第一光纤平行布置的第二光纤以及通过加热包括第一光纤的一端和第二光纤的一端的预定区域而形成的光纤透镜使用加热装置，使得第一和第二光纤的端部彼此整体连接，并且光学透镜具有具有预定曲率半径的透镜表面。因此，通过简单的制造工艺可以有效地改善光耦合效率，并且本发明的探针可以用于采用反射测量法的荧光计或成像系统。

8. 发明申请

WO2012091284A2 LONG SHAFT BIT HAVING VIBRATION PREVENTING STRUCTURE 审中-公开
标题翻译：具有预防结构振动的长轴位
公开(公告)号：WO2012091284A2
公开(公告)日：2012-07-05
申请号：PCT/KR2011008649
申请日：2011-11-14
申请人： KOREA BASIC SCIENCE INST , YANG SUN CHOEL , CHANG KI SOO , KIM GEON HEE , KIM MYEONG SANG
发明人： YANG SUN CHOEL , CHANG KI SOO , KIM GEON HEE , KIM MYEONG SANG
IPC分类号： B23C5/20 , B23B27/16 , B23C5/22 , B23Q11/00
CPC分类号： B23B27/002 , B23B27/007 , B23B27/10 , B23B2250/12 , B23B2250/16 , B23Q11/0032 , Y10S82/904 , Y10T82/2595 , Y10T407/14 , Y10T407/22 , Y10T408/76
摘要： The present invention relates to a bit for processing the inside diameter of a work material, the bit having on the outer surface of a shank a vibration preventing structure comprising a vibration absorption body made of a silicone material, and a hollow wire rod, thereby absorbing the vibration generated from a machine tool, preventing resonance generated between the work material and a tool, and thus, enabling the implementation of a slickenside from ultra-precision machining.
摘要翻译：本发明涉及一种用于加工工件材料的内径的钻头，该钻头在柄的外表面上具有包括由硅树脂材料制成的振动吸收体的防振结构和中空线材，从而吸收从机床产生的振动，防止在工件和工具之间产生的共振，从而能够实现超精密加工的光滑体。

9. 发明申请

WO2009084852A3 METHOD FOR FABRICATING MICRO-LENS 审中-公开
标题翻译：微镜制作方法
公开(公告)号：WO2009084852A3
公开(公告)日：2009-08-20
申请号：PCT/KR2008007638
申请日：2008-12-24
申请人： KWANGJU INST SCI & TECH , SONG YOUNG MIN , CHANG KI SOO , JEONG BONG KYU , LEE YONG TAK
发明人： SONG YOUNG MIN , CHANG KI SOO , JEONG BONG KYU , LEE YONG TAK
IPC分类号： G02B1/12
CPC分类号： G02B3/00 , B29D11/00365
摘要： Provided is a method of fabricating a micro-lens, including preparing a substrate having a step on top, forming a protection layer on the entire top surface of the substrate having the step, etching the entire surface of the protection layer to form a micro-lens having a radius of curvature on a top surface of the step, and etching the entire surface of the substrate having the micro-lens for the top surface of the step to be formed in a lens shape. Thus, the micro-lens can be integrated with a photoelectronic device in a self-aligned structure, and an additional process for forming the micro-lens is not necessary, so that the photoelectronic device in which the micro-lens is integrated can be fabricated more economically.
摘要翻译：提供一种制造微透镜的方法，包括制备具有台阶的衬底，在具有该步骤的衬底的整个顶表面上形成保护层，蚀刻保护层的整个表面以形成微透镜，在台阶的上表面具有曲率半径的透镜，并且蚀刻具有用于形成为透镜形状的台阶的顶表面的具有微透镜的基板的整个表面。因此，微透镜可以以自对准结构与光电子器件集成，并且不需要用于形成微透镜的附加工艺，从而可以制造其中集成微透镜的光电子器件更经济

10. 发明申请

WO2011059232A3 OPTICAL SYSTEM FOR THERMAL IMAGE MICROSCOPE 审中-公开
标题翻译：光学图像微光学系统
公开(公告)号：WO2011059232A3
公开(公告)日：2011-11-03
申请号：PCT/KR2010007923
申请日：2010-11-10
申请人： KOREA BASIC SCIENCE INST , KIM GEON HEE , YANG SUN CHOEL , CHANG KI SOO , KIM HYO SIK , KIM SANG HYEOK , LEE SANG YONG
发明人： KIM GEON HEE , YANG SUN CHOEL , CHANG KI SOO , KIM HYO SIK , KIM SANG HYEOK , LEE SANG YONG
IPC分类号： G02B27/00 , G02B11/34 , G02B13/18 , G02B21/00
CPC分类号： G02B13/14 , G02B21/0008 , G02B21/0016 , G02B21/02 , G02B23/12
摘要： The present invention relates to an optical system for a thermal image microscope. The optical system for the thermal image microscope comprises: an image forming unit in which a focus is formed; and a relay unit which elongates an optical path, wherein the image forming unit includes various lenses, the relay unit includes two lenses, and all the aspheric surfaces of the lenses are formed as convex surfaces. Thus, according to the present invention, optical performance is improved.
摘要翻译：本发明涉及一种用于热成像显微镜的光学系统。用于热像显微镜的光学系统包括：形成焦点的图像形成单元; 以及延长光路的中继单元，其中所述图像形成单元包括各种透镜，所述中继单元包括两个透镜，并且所述透镜的所有非球面形成为凸面。因此，根据本发明，提高了光学性能。

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