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1. 发明申请

WO2007108364A1 薄膜形成装置及び薄膜形成方法审中-公开
标题翻译：薄膜形成装置和薄膜形成方法
公开(公告)号：WO2007108364A1
公开(公告)日：2007-09-27
申请号：PCT/JP2007/054930
申请日：2007-03-13
申请人：ランテクニカルサービス株式会社 , 松本好家
发明人：松本好家
IPC分类号： B05C5/00 , B05C9/08 , B05C13/02 , B05C15/00 , B05D1/02 , B41J2/045 , B41J2/055 , G02F1/13 , G02F1/1337 , H01L51/50 , H05B33/10
CPC分类号： B41J3/28 , G02F1/1337 , H01L51/0005
摘要： When a thin film is formed on a substrate using an inkjet method, variations in film thickness is prevented, a material use efficiency and a production tact are improved, and due attention is paid to environment. A thin film forming device is used which comprises a head support mechanism (5) mounting a plurality of nozzles (9) and provided with a single or a plurality of inkjet heads (2), and a substrate carrying mechanism (50) permitting relative movement in a plane direction. A substrate carrying table (8) and a portion carrying out spray coating on a substrate (1) are closed by a vacuum tank (14) as a spray coating/film forming chamber, and a film is formed by an inkjet method under a depressurized environment by a vacuum pump, thereby obtaining a thin film having small film thickness variations. As required, a pressure regulating preliminary chamber is provided to create a depressurized environment, and further a volatile organic solvent recovery device may be provided in an exhaust system. The device is especially suitable for forming an oriented film.
摘要翻译：当使用喷墨法在基板上形成薄膜时，可以防止薄膜厚度的变化，提高材料利用效率和生产节奏，并且适当注意环境。使用薄膜形成装置，其包括安装多个喷嘴（9）并设置有单个或多个喷墨头（2）的头部支撑机构（5），以及允许相对移动的基板承载机构（50）在平面方向。基板承载台（8）和在基板（1）上进行喷涂的部分由作为喷涂/成膜室的真空槽（14）封闭，并通过喷墨方法在减压下形成环境，由此获得薄膜厚度变化小的薄膜。根据需要，提供压力调节预备室以产生减压环境，并且还可以在排气系统中设置挥发性有机溶剂回收装置。该装置特别适用于形成取向膜。

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