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    • 2. 发明申请
    • ネガ型青紫色レーザー感光性組成物、画像形成材料、画像形成材、及び画像形成方法
    • 负性蓝紫激光光敏组合物,图像形成材料,图像形成和图像形成方法
    • WO2005031463A1
    • 2005-04-07
    • PCT/JP2004/014299
    • 2004-09-22
    • 三菱化学株式会社水上 潤二亀山 泰弘利光 恵理子瑞穂 右二
    • 水上 潤二亀山 泰弘利光 恵理子瑞穂 右二
    • G03F7/031
    • G03F7/031
    • A negative blue-violet laser photosensitive composition that is highly sensitive to laser beams of blue-violet region, excelling in not only safe light properties under a yellow light but also the resolution and rectangularity of obtained image, which negative blue-violet laser photosensitive composition especially can appropriately be used as a dry film resist material and used in direct lithography by blue-violet laser beams. There are further provided, using the negative blue-violet laser photosensitive composition, an image forming material, image former and method of image formation. In particular, there is provided a negative blue-violet laser photosensitive composition wherein the minimum exposure intensity at which the exposure by blue-violet laser beams causes the residual film ratio to be 90% or higher is 40 mJ/cm or less and wherein with respect to a residual film ratio - exposure intensity curve obtained by plotting the residual film ratio at exposed part [t(%)] against the logarithm of exposure intensity by blue-violet laser beams [logE(mJ/cm )], the gamma value of straight line binding point at a residual film ratio of 15% with point at a residual film ratio of 80%, t = gammalogE + delta, is 4.0x10 or more. There are further provided, using the negative blue-violet laser photosensitive composition, an image forming material, image former and method of image formation.
    • 对蓝紫色区域的激光束高度敏感的负蓝紫色激光感光组合物,不仅在黄光下具有安全的光特性,而且还具有所得图像的分辨率和矩形性,该负蓝紫激光感光组合物 特别可以适当地用作干膜抗蚀剂材料,并用于通过蓝紫色激光束的直接光刻。 进一步提供使用负蓝紫激光感光组合物的图像形成材料,成像剂和图像形成方法。 特别地,提供了一种负蓝紫激光感光组合物,其中蓝紫激光束曝光的最小曝光强度使得残留膜比率为90%或更高,为40mJ / cm 2以下 并且其中相对于通过将曝光部分[t(%)]上的残留膜比与通过蓝紫色激光束的曝光强度的对数绘制而获得的残留膜比 - 曝光强度曲线[logE(mJ / cm 2) )],残留膜比为15%,残留膜比为80%,t = gammalogE +δ时的直线结合点的γ值为4.0×10 2以上。 进一步提供使用负蓝紫激光感光组合物的图像形成材料,成像剂和图像形成方法。