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    • 1. 发明申请
    • PLASMA OSCILLATION SWITCHING DEVICE
    • 等离子体振荡开关装置
    • WO2004034475A8
    • 2004-05-13
    • PCT/JP0312469
    • 2003-09-30
    • MATSUSHITA ELECTRIC IND CO LTDYOSHII SHIGEOOTSUKA NOBUYUKIMIZUNO KOICHISUZUKI ASAMIRAYOKOGAWA TOSHIYA
    • YOSHII SHIGEOOTSUKA NOBUYUKIMIZUNO KOICHISUZUKI ASAMIRAYOKOGAWA TOSHIYA
    • H01L29/812H01L21/338H01L29/20H01L29/778H01L29/80H01L21/336H01L29/66H01L29/78
    • H01L29/1029H01L29/2003H01L29/7785
    • A plasma oscillation switching device comprises a semiconductor substrate (101), a first barrier layer (103) formed on the substrate and made of a group III-V compound semiconductor, a channel layer (104) formed on the first barrier layer and made of a group III-V compound semiconductor, a second barrier layer (105) formed on the channel layer and made of a group III-V compound semiconductor, a source electrode (107), a gate electrode (109) and a drain electrode (108), these three electrodes being formed on the second barrier layer. The first barrier layer has an n-type diffusion layer (103a) and the second barrier layer has a p-type diffusion layer (105a). The band gap of the cannel layer is smaller than those of the first and second barrier layers. Two-dimensional electron gas (EG) accumulates in a conduction band on the boundary between the first barrier layer and the channel layer, while two-dimensional hole gas (HG) accumulates in a valence band of the boundary between the second barrier layer and the channel layer. The electrodes are formed on the second barrier layer via an insulating layer (106).
    • 等离子体振荡切换装置包括半导体衬底(101),形成在衬底上并由III-V族化合物半导体制成的第一阻挡层(103),形成在第一阻挡层上的沟道层(104) III-V族化合物半导体,形成在沟道层上并由III-V族化合物半导体构成的第二阻挡层(105),源电极(107),栅电极(109)和漏电极(108) ),这三个电极形成在第二阻挡层上。 第一阻挡层具有n型扩散层(103a),第二阻挡层具有p型扩散层(105a)。 该沟槽层的带隙比第一和第二阻挡层的带隙小。 二维电子气(EG)在第一阻挡层和沟道层之间的边界上的导带中积聚,而二维空穴气体(HG)积聚在第二阻挡层和第二阻挡层之间的边界的价带中 通道层。 电极经由绝缘层(106)形成在第二阻挡层上。