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    • 2. 发明申请
    • METHOD OF FORMING GATE ELECTRODE STRUCTURES
    • 形成门电极结构的方法
    • WO2007021808A1
    • 2007-02-22
    • PCT/US2006/031156
    • 2006-08-10
    • SPANSION LLCWANG, ZhigangYANG, NianFANG, Shenqing
    • WANG, ZhigangYANG, NianFANG, Shenqing
    • H01L21/3213
    • H01L21/32139H01L21/28123
    • In one example, the method includes forming a patterned hard mask feature (20A) above a layer of gate electrode material (14), the hard mask feature (20A) having a photoresist feature (16) formed thereabove and the hard mask feature (20A) having a critical dimension (21). The method further includes performing an etching process on the patterned hard mask feature (20A) to produce a reduced hard mask feature (20B) having a critical dimension (21A) that is less than the critical dimension (21) of the patterned hard mask feature (20A) and performing an anisotropic etching process on the layer of gate electrode material (14) using the reduced hard mask feature (20B) as a mask to define a gate electrode (14B).
    • 在一个示例中,该方法包括在栅极材料层(14)的上方形成图案化的硬掩模特征(20A),硬掩模特征(20A)具有形成在其上的光致抗蚀剂特征(16)和硬掩模特征(20A )具有临界尺寸(21)。 该方法还包括对图案化的硬掩模特征(20A)进行蚀刻处理以产生具有小于图案化硬掩模特征(211)的临界尺寸(21)的临界尺寸(21A)的减小的硬掩模特征(20B) (20A),并且使用所述还原硬掩模特征(20B)作为掩模对所述栅电极材料层(14)进行各向异性蚀刻处理以限定栅电极(14B)。
    • 5. 发明申请
    • COMPENSATION METHOD TO ACHIEVE UNIFORM PROGRAMMING SPEED OF FLASH MEMORY DEVICES
    • 用于实现闪存存储器件的均匀编程速度的补偿方法
    • WO2009002619A1
    • 2008-12-31
    • PCT/US2008/063188
    • 2008-05-09
    • SPANSION LLCYANG, NianLAI, Fan WanLEE, Aaron
    • YANG, NianLAI, Fan WanLEE, Aaron
    • G06F12/00
    • G11C16/30G11C16/10
    • Systems and methodologies are provided for increasing operation speed uniformity in a flash memory device Due to the characteristics of a typical flash memory array, memory cells in a memory array may experience distributed substrate resistance that increases as the distance of the memory cell from an edge of the memory array increases This difference in distributed substrate resistance can vary voltages supplied to different memory cells In the memory array depending on their location, which can in turn cause non-uniformity In the speed of high voltage operations on the memory array such as programming The systems and methodologies provided herein reduce this non-uniformity in operation speed by providing compensated voltage levels to memory cells in a memory array based at least in part on the location of each respective memory cell
    • 提供了用于提高闪速存储器件中的操作速度均匀性的系统和方法由于典型的闪速存储器阵列的特性,存储器阵列中的存储器单元可能经历分布式衬底电阻,其随着存储器单元的距离从 存储器阵列增加这种分布式衬底电阻的差异可以改变提供给不同存储单元的电压在存储器阵列中取决于它们的位置,这反过来会导致不均匀性在存储器阵列上的高电压操作的速度,例如编程 本文提供的系统和方法通过至少部分地基于每个相应的存储器单元的位置向存储器阵列中的存储器单元提供补偿的电压电平来降低操作速度的不均匀性