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1. 发明申请

WO2012005983A2 PRECISE TEMPERATURE CONTROL FOR TEOS APPLICATION BY HEAT TRANSFER FLUID 审中-公开
标题翻译：用传热介质精确控制TEOS的温度控制
公开(公告)号：WO2012005983A2
公开(公告)日：2012-01-12
申请号：PCT/US2011041826
申请日：2011-06-24
申请人： APPLIED MATERIALS INC , LEE DONGSUH , WANG WEIJIE , STERLING WILLIAM N , KIM SAM H , CHOI SOO YOUNG , PARK BEOM SOO , KIM BEOM SOO , WANG QUNHUA
发明人： LEE DONGSUH , WANG WEIJIE , STERLING WILLIAM N , KIM SAM H , CHOI SOO YOUNG , PARK BEOM SOO , KIM BEOM SOO , WANG QUNHUA
IPC分类号： H01L21/316 , C23C16/448 , H01L21/205
CPC分类号： B01F5/0077 , B01F5/0688 , B01F15/065 , B01F2015/061 , C23C16/45512
摘要： Embodiments of the invention generally provide a mixing block for mixing precursors and/or cleaning agent which has the advantage of maintaining the temperature and improving the mixing effect of the precursors, cleaning agent or the mixture thereof to eliminate the substrate-to-substrate variation, thereby providing improved process uniformity.
摘要翻译：本发明的实施方案通常提供用于混合前体和/或清洁剂的混合块，其具有维持温度并改善前体，清洁剂或其混合物的混合效果以消除基材与基材变化的优点，从而提供改进的工艺均匀性

2. 发明申请

WO2009086534A1 METHOD OF FABRICATING A PROBE DEVICE FOR A METROLOGY INSTRUMENT AND PROBE DEVICE PRODUCED THEREBY 审中-公开
标题翻译：制作计量仪器的探针装置和生产的探针装置的方法
公开(公告)号：WO2009086534A1
公开(公告)日：2009-07-09
申请号：PCT/US2008/088479
申请日：2008-12-29
申请人： VEECO INSTRUMENTS INC. , WANG, Weijie , NAGLE, Steven
发明人： WANG, Weijie , NAGLE, Steven
IPC分类号： G12B21/08
CPC分类号： G01Q60/38 , G01Q70/10
摘要： A method of producing a probe device 50 for a metrology instrument such as an AFM includes providing a substrate and forming a stock extending upwardly from the substrate. The stock 60 is preferably FIB milled to form a tip 76 of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end 68 that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.
摘要翻译：制造用于诸如AFM的计量仪器的探针装置50的方法包括提供基底并形成从基底向上延伸的原料。坯料60优选地被研磨以形成探针装置的尖端76。尖端优选具有高纵横比，高度为至少约1微米，用于执行临界尺寸（例如，深沟槽）原子力显微镜。坯料优选地是基座形的，其具有大致平面的远端68，其可以在至少小于约2分钟内被加工成尖端。利用优选实施例，可以以比已知技术更少且更简单的步骤完成FIB研磨步骤，以在小于约一分钟内产生适用于DT-AFM的高纵横比尖端。

3. 发明申请

WO2012005983A3 PRECISE TEMPERATURE CONTROL FOR TEOS APPLICATION BY HEAT TRANSFER FLUID 审中-公开
公开(公告)号：WO2012005983A3
公开(公告)日：2012-01-12
申请号：PCT/US2011/041826
申请日：2011-06-24
申请人： APPLIED MATERIALS, INC. , LEE, Dongsuh , WANG, Weijie , STERLING, William N. , KIM, Sam H. , CHOI, Soo Young , PARK, Beom Soo , KIM, Beom Soo , WANG, Qunhua
发明人： LEE, Dongsuh , WANG, Weijie , STERLING, William N. , KIM, Sam H. , CHOI, Soo Young , PARK, Beom Soo , KIM, Beom Soo , WANG, Qunhua
IPC分类号： H01L21/316 , H01L21/205 , C23C16/448
摘要： Embodiments of the invention generally provide a mixing block for mixing precursors and/or cleaning agent which has the advantage of maintaining the temperature and improving the mixing effect of the precursors, cleaning agent or the mixture thereof to eliminate the substrate-to-substrate variation, thereby providing improved process uniformity.

4. 发明申请

WO2009040676A2 ENZYMATIC MODIFICATION OF OIL 审中-公开
标题翻译：油的酶改性
公开(公告)号：WO2009040676A2
公开(公告)日：2009-04-02
申请号：PCT/IB2008/003336
申请日：2008-07-11
申请人： OCEAN NUTRITION CANADA LTD. , KRALOVEC, Jaroslav A. , WANG, Weijie , BARROW, James, Colin
发明人： KRALOVEC, Jaroslav A. , WANG, Weijie , BARROW, James, Colin
CPC分类号： C12P7/6409 , C11C1/045 , C12P7/6418 , C12P7/6445 , C12P7/6472 , C12P7/649 , Y02E50/13
摘要： The disclosed subject matter relates generally to a method for modifying oil, and specifically to a process for increasing the concentration of polyunsaturated fatty acid in an oil composition.
摘要翻译：所公开的主题一般涉及油的改性方法，具体涉及提高油组合物中多不饱和脂肪酸浓度的方法。

5. 发明申请

WO2008106542B1 APPARATUS AND METHOD FOR DEPOSITION OVER LARGE AREA SUBSTRATES 审中-公开
标题翻译：大面积沉积物沉积的装置和方法
公开(公告)号：WO2008106542B1
公开(公告)日：2008-10-16
申请号：PCT/US2008055174
申请日：2008-02-27
申请人： APPLIED MATERIALS INC , WHITE JOHN M , YADAV SANJAY , WANG QUNHUA , CHOI SOO YOUNG , WANG WEIJIE
发明人： WHITE JOHN M , YADAV SANJAY , WANG QUNHUA , CHOI SOO YOUNG , WANG WEIJIE
IPC分类号： H05H1/00 , C23C16/44
CPC分类号： C23C16/4485 , C23C16/509 , H01J37/321 , H01J37/32449
摘要： The present invention generally relates to an inductively coupled plasma apparatus. When depositing utilizing a plasma generated from a showerhead, the plasma may not be evenly distributed to the edge of the substrate. By inductively coupling plasma to the chamber in an area corresponding to the chamber walls, the plasma distribution within the chamber may be evenly distributed and deposition upon the substrate may be substantially even. By vaporizing the processing gas prior to entry into the processing chamber, the plasma may also be even and thus contribute to an even deposition on the substrate.
摘要翻译：本发明一般涉及电感耦合等离子体装置。当利用从喷头产生的等离子体进行沉积时，等离子体可能不均匀地分布到基板的边缘。通过在对应于室壁的区域中将等离子体电感耦合到腔室，室内的等离子体分布可以均匀分布，并且在衬底上的沉积可以基本上均匀。通过在进入处理室之前汽化处理气体，等离子体也可以是均匀的并且因此有助于在衬底上的均匀沉积。

6. 发明申请

WO2008106542A1 APPARATUS AND METHOD FOR DEPOSITION OVER LARGE AREA SUBSTRATES 审中-公开
标题翻译：用于在大面积基板上沉积的装置和方法
公开(公告)号：WO2008106542A1
公开(公告)日：2008-09-04
申请号：PCT/US2008/055174
申请日：2008-02-27
申请人： APPLIED MATERIALS, INC. , WHITE, John M. , YADAV, Sanjay , WANG, Qunhua , CHOI, Soo Young , WANG, Weijie
发明人： WHITE, John M. , YADAV, Sanjay , WANG, Qunhua , CHOI, Soo Young , WANG, Weijie
IPC分类号： H05H1/00 , C23C16/44
CPC分类号： C23C16/4485 , C23C16/509 , H01J37/321 , H01J37/32449
摘要： The present invention generally relates to an inductively coupled plasma apparatus. When depositing utilizing a plasma generated from a showerhead, the plasma may not be evenly distributed to the edge of the substrate. By inductively coupling plasma to the chamber in an area corresponding to the chamber walls, the plasma distribution within the chamber may be evenly distributed and deposition upon the substrate may be substantially even. By vaporizing the processing gas prior to entry into the processing chamber, the plasma may also be even and thus contribute to an even deposition on the substrate.
摘要翻译：本发明一般涉及电感耦合等离子体装置。当利用从喷头产生的等离子体进行沉积时，等离子体可能不会均匀分布到基板的边缘。通过在对应于室壁的区域中将等离子体感应耦合到室，室内的等离子体分布可以均匀分布，并且在衬底上的沉积可以基本上均匀。通过在进入处理室之前蒸发处理气体，等离子体也可以是均匀的并且因此有助于在衬底上的均匀沉积。

7. 发明申请

WO2007088421A3 A PROCESS FOR THE REMOVAL OF STEROLS AND OTHER COMPOUNDS FROM GLYCEROL OILS 审中-公开
公开(公告)号：WO2007088421A3
公开(公告)日：2007-08-09
申请号：PCT/IB2006/004059
申请日：2006-08-25
申请人： OCEAN NUTRITION CANADA LTD. , WANG, Weijie
发明人： WANG, Weijie
IPC分类号： C11B3/10 , A23D9/00 , A23D9/02 , A23L1/30 , A61K31/202 , A61P3/02 , B01D15/08
摘要： A process for the removal of sterols, specifically cholesterol, from a triglyceride oil, preferably a marine triglyceride oil, said process comprising contacting an oil with an adsorbent, specifically TRIS YL™, clay or a mixture thereof, heating the mixture to 100°C to 210°C, preferably 150°C to 170°C, preferably for a time period of greater than one mmute and optionally at a pressure less than 133 Pa, preferably less than 1.33 Pa.

8. 发明申请

WO2013052298A1 METHODS FOR DEPOSITING A SILICON CONTAINING LAYER WITH ARGON GAS DILUTION 审中-公开
标题翻译：用含有气体稀释剂的含硅层的方法
公开(公告)号：WO2013052298A1
公开(公告)日：2013-04-11
申请号：PCT/US2012/056928
申请日：2012-09-24
申请人： APPLIED MATERIALS, INC. , WANG, Qunhua , WANG, Weijie , CHOI, Young Jin , CHO, Seon-Mee , CUI, Yi , PARK, Beom Soo , CHOI, Soo Young
发明人： WANG, Qunhua , WANG, Weijie , CHOI, Young Jin , CHO, Seon-Mee , CUI, Yi , PARK, Beom Soo , CHOI, Soo Young
IPC分类号： H01L29/786 , H01L21/205 , H01L21/31
CPC分类号： H01L21/31 , C23C16/24 , C23C16/345 , C23C16/401 , C23C16/505 , C23C16/56 , H01L21/02422 , H01L21/02425 , H01L21/02488 , H01L21/02532 , H01L21/02595 , H01L21/0262 , H01L21/02664 , H01L21/02675 , H01L29/66757 , H01L29/786 , H01L29/7869 , H01L2021/775
摘要： Embodiments of the disclosure generally provide methods of forming a silicon containing layers in TFT devices. The silicon can be used to form the active channel in a LTPS TFT or be utilized as an element in a gate dielectric layer, a passivation layer or even an etch stop layer. The silicon containing layer is deposited by a vapor deposition process whereby an inert gas, such as argon, is introduced along with the silicon precursor. The inert gas functions to drive out weak, dangling silicon-hydrogen bonds or silicon-silicon bonds so that strong silicon-silicon or silicon-oxygen bonds remain to form a substantially hydrogen free silicon containing layer.
摘要翻译：本公开的实施例通常提供在TFT器件中形成含硅层的方法。硅可用于在LTPS TFT中形成有源沟道，或者用作栅极介电层，钝化层或甚至蚀刻停止层中的元素。通过气相沉积工艺沉积含硅层，由此惰性气体如氩气与硅前体一起引入。惰性气体起到驱除弱的，悬挂的硅 - 氢键或硅 - 硅键的作用，使得强硅硅或硅氧键保留以形成基本上无氢的含硅层。

9. 发明申请

WO2009040676A3 ENZYMATIC MODIFICATION OF OIL 审中-公开
标题翻译：油的酶改性
公开(公告)号：WO2009040676A3
公开(公告)日：2011-04-28
申请号：PCT/IB2008003336
申请日：2008-07-11
申请人： OCEAN NUTRITION CANADA LTD , KRALOVEC JAROSLAV A , WANG WEIJIE , BARROW JAMES COLIN
发明人： KRALOVEC JAROSLAV A , WANG WEIJIE , BARROW JAMES COLIN
IPC分类号： C12P7/64 , A23D9/00 , C12N9/20
CPC分类号： C12P7/6409 , C11C1/045 , C12P7/6418 , C12P7/6445 , C12P7/6472 , C12P7/649 , Y02E50/13
摘要： The disclosed subject matter relates generally to a method for modifying oil, and specifically to a process for increasing the concentration of polyunsaturated fatty acid in an oil composition. The process comprises a) hydrolysis of the glyceride by Thermomyces lanuginosus lipase, b) separation of the free saturated fatty acids from the glycerides and c) enzymatic esterification of the hydrolyzed glyceride by Candida antarctica lipase B with a polyunsaturated fatty acid.
摘要翻译：所公开的主题一般涉及油的改性方法，具体涉及提高油组合物中多不饱和脂肪酸浓度的方法。该方法包括a）通过Thermomyces lanuginosus脂肪酶水解甘油酯，b）从甘油酯中分离游离饱和脂肪酸，和c）用多不饱和脂肪酸对南极假丝酵母脂肪酶B进行水解甘油酯的酯化。

10. 发明申请

WO2007102050A3 IMMOBILIZED ENZYMES AND USES THEREOF IN ESTER SYNTHESIS 审中-公开
公开(公告)号：WO2007102050A3
公开(公告)日：2007-09-13
申请号：PCT/IB2006/003999
申请日：2006-06-13
申请人： OCEAN NUTRITION CANADA LTD. , KRALOVEC, Jaroslav, A. , WANG, Weijie
发明人： KRALOVEC, Jaroslav, A. , WANG, Weijie
IPC分类号： C12N9/20 , C12P7/40 , C12P7/62 , C12P7/64
摘要： Immobilized enzymes comprising an esterification, transesterification or interesterification/intraesterification enzyme immobilized to a food grade matrix and methods of use thereof in ester synthesis.

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