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1. 发明申请

WO2007135514A3 LIQUID RING PUMPING AND RECLAMATION SYSTEMS IN A PROCESSING ENVIRONMENT 审中-公开
标题翻译：液体环流泵和循环系统在加工环境中的应用
公开(公告)号：WO2007135514A3
公开(公告)日：2008-02-14
申请号：PCT/IB2007001267
申请日：2007-05-15
申请人： AIR LIQUIDE , URQUHART KARL J , GUARNERI GEORGE , MARC JEAN-LOUIS , FANJAT NORBERT , LANGELLIER LAURENT , COLIN CHRISTOPHE
发明人： URQUHART KARL J , GUARNERI GEORGE , MARC JEAN-LOUIS , FANJAT NORBERT , LANGELLIER LAURENT , COLIN CHRISTOPHE
IPC分类号： B01F15/04 , H01L21/00
CPC分类号： G05D11/138 , B24B57/00 , F04C19/001 , H01L21/67017
摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.
摘要翻译：化学品管理方法和系统在一个实施例中，将混合器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。混合器提供的解决方案然后从系统中回收并随后重新引入再利用。在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。引入到系统中的一些化学品可以是温度控制的。后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

2. 发明申请

WO2007135502A1 SYSTEMS AND METHODS FOR RECLAIMING PROCESS FLUIDS IN A PROCESSING ENVIRONMENT 审中-公开
标题翻译：在处理环境中回收过程流体的系统和方法
公开(公告)号：WO2007135502A1
公开(公告)日：2007-11-29
申请号：PCT/IB2007/001245
申请日：2007-05-14
申请人： L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , URQUHART, Karl, J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
发明人： URQUHART, Karl, J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
IPC分类号： B01F15/04 , H01L21/00
CPC分类号： G05D11/138 , F04C2220/10 , F04C2220/30 , H01L21/6715 , H01L21/67253
摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.
摘要翻译：化学品管理方法和系统在一个实施例中，将混合器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。混合器提供的解决方案然后从系统中回收并随后重新引入再利用。在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。引入到系统中的一些化学品可以是温度控制的。后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

3. 发明申请

WO2006109144B1 METHOD AND APPARATUS FOR ASYNCHRONOUS BLENDING AND SUPPLY OF CHEMICAL SOLUTIONS 审中-公开
标题翻译：用于异步混合和化学溶液供应的方法和装置
公开(公告)号：WO2006109144B1
公开(公告)日：2007-03-15
申请号：PCT/IB2006000852
申请日：2006-04-12
申请人： AIR LIQUIDE , URQUHART KARL J
发明人： URQUHART KARL J
IPC分类号： G05D11/13 , B01F15/04
CPC分类号： B01F15/00194 , B01F15/0408 , B01F2215/0032 , B01F2215/0096 , G05D11/138 , Y10T137/0335 , Y10T137/034 , Y10T137/2506 , Y10T137/2509
摘要： Methods and apparatuses for blending and supply of chemical solutions. The method of the present invention includes a continuous blending system. This continuous blending system (100) monitors the output and continuously adjusts the blending system to achieve a predetermined formulation of at least a first solution (114) . A centralized monitoring system (124) continuously evaluates the solutions and adjusts the output of the blender (113) as needed to maintain the predetermined formulation of the solution. The system includes at least a first tank system (117) . Any solutions (120) that are delivered from this tank system are also continuously monitored, evaluated, and adjusted as needed by the centralized monitoring system.
摘要翻译：混合和供应化学溶液的方法和装置。本发明的方法包括连续混合系统。该连续混合系统（100）监测输出并连续地调节混合系统以实现至少第一溶液（114）的预定配方。集中监控系统（124）根据需要连续地评估解决方案并调整搅拌器（113）的输出以维持解决方案的预定配方。该系统至少包括第一罐系统（117）。从这个坦克系统提供的任何解决方案（120）也可以根据集中监控系统的需要进行不断的监控，评估和调整。

4. 发明申请

WO2009069090A2 IMPROVED RECLAIM FUNCTION FOR SEMICONDUCTOR PROCESSING SYSTEMS 审中-公开
标题翻译：改进的半导体处理系统的恢复功能
公开(公告)号：WO2009069090A2
公开(公告)日：2009-06-04
申请号：PCT/IB2008/054975
申请日：2008-11-26
申请人： L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , FANJAT, Norbert , URQUHART, Karl J. , SOULET, Axel , LANGELLIER, Laurent
发明人： FANJAT, Norbert , URQUHART, Karl J. , SOULET, Axel , LANGELLIER, Laurent
IPC分类号： G05D11/13
CPC分类号： G05D11/133 , F04C2220/10 , F04C2220/30 , G05D11/138 , H01L21/67017 , H01L21/6715 , H01L21/67253
摘要： In one embodiment, a method of controlling fluids in a semiconductor processing system includes mixing two or more chemical compounds in a blender to produce a solution and supplying the solution to a reclaim tank, where the solution is dispense to a process station. The solution can be monitored at a location between the tank and the process station to determine whether at least one of the chemical compounds is at a predetermined concentration. Upon determining that the at least one chemical compound in the solution is at the predetermined concentration the solution is flowed to the process station. The method further includes removing at least a portion of the solution from the process station and returning the removed portion of the solution to the reclaim tank. The removed portion of the solution is monitored at a location between the process station and the reclaim tank to determine whether at least one of the chemical compounds in the removed portion of the solution is at a predetermined concentration. Upon determining that the at least one chemical compound in the removed portion of the solution is at the predetermined concentration, the removed portion of solution is flowed to the process station.
摘要翻译：在一个实施例中，控制半导体处理系统中的流体的方法包括在搅拌器中混合两种或更多种化合物以产生溶液并将溶液供应到回收罐，其中溶液分配到处理站。可以在罐和处理站之间的位置处监测溶液，以确定至少一种化合物是否处于预定浓度。当确定溶液中的至少一种化合物处于预定浓度时，溶液流到处理站。该方法还包括从处理站中移除溶液的至少一部分并将溶液的去除部分返回到回收罐。在处理站和回收罐之间的位置处监测溶液的去除部分，以确定溶液的去除部分中的至少一种化合物是否处于预定浓度。当确定溶液的去除部分中的至少一种化合物处于预定浓度时，溶液的去除部分流到处理站。

5. 发明申请

WO2007135504A1 SYSTEMS AND METHODS FOR MANAGING FLUIDS USING A LIQUID RING PUMP 审中-公开
标题翻译：使用液体泵管理流体的系统和方法
公开(公告)号：WO2007135504A1
公开(公告)日：2007-11-29
申请号：PCT/IB2007/001250
申请日：2007-05-15
申请人： L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , URQUHART, Karl J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
发明人： URQUHART, Karl J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
IPC分类号： F04C19/00
CPC分类号： F04C19/001 , H01L21/67017
摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.
摘要翻译：化学品管理方法和系统在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。然后将混合器提供的解决方案从系统中回收并随后重新引入再利用。在将溶液重新引入系统以便重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。引入到系统中的一些化学品可以是温度控制的。后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

6. 发明申请

WO2007135514A2 LIQUID RING PUMPING AND RECLAMATION SYSTEMS IN A PROCESSING ENVIRONMENT 审中-公开
标题翻译：液体循环泵和循环系统在加工环境中的应用
公开(公告)号：WO2007135514A2
公开(公告)日：2007-11-29
申请号：PCT/IB2007/001267
申请日：2007-05-15
申请人： L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , URQUHART, Karl J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
发明人： URQUHART, Karl J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
IPC分类号： B01F15/04 , H01L21/00
CPC分类号： G05D11/138 , B24B57/00 , F04C19/001 , H01L21/67017
摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.
摘要翻译：化学品管理方法和系统在一个实施例中，将混合器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。混合器提供的解决方案然后从系统中回收并随后重新引入再利用。在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。引入到系统中的一些化学品可以是温度控制的。后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

7. 发明申请

WO2007135513A1 SYSTEMS AND METHODS FOR MANAGING FLUIDS IN A PROCESSING ENVIRONMENT USING A LIQUID RING PUMP AND RECLAMATION SYSTEM 审中-公开
标题翻译：使用液体泵和回收系统在处理环境中管理流体的系统和方法
公开(公告)号：WO2007135513A1
公开(公告)日：2007-11-29
申请号：PCT/IB2007/001262
申请日：2007-05-15
申请人： L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , URQUHART, Karl J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
发明人： URQUHART, Karl J. , GUARNERI, George , MARC, Jean-Louis , FANJAT, Norbert , LANGELLIER, Laurent , COLIN, Christophe
IPC分类号： F04C19/00 , H01L21/00
CPC分类号： F17D1/08 , B24B37/00 , B24B57/02 , F04C19/001 , Y10T137/0318
摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.
摘要翻译：化学品管理方法和系统在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。然后将混合器提供的解决方案从系统中回收并随后重新引入再利用。在将溶液重新引入系统以便重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。引入到系统中的一些化学品可以是温度控制的。后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

8. 发明申请

WO2007034304A1 POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS 审中-公开
标题翻译：使用要点控制搅拌机系统及其对应方法
公开(公告)号：WO2007034304A1
公开(公告)日：2007-03-29
申请号：PCT/IB2006/002618
申请日：2006-09-21
申请人： L'AIR LIQUIDE-SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , URQUHART, Karl, J.
发明人： URQUHART, Karl, J.
IPC分类号： G05D11/13 , G05D21/02 , H01L21/306
CPC分类号： G05D11/138 , G05D21/02
摘要： A blender system is provided that maintains a chemical solution bath at desired concentrations. The blender system includes a blender unit (100) configured to receive and blend at least two chemical compounds (e.g., ammonia and hydrogen peroxide) and deliver a solution including a mixture of compounds at selected concentrations to a tank (2) that retains a selected volume of a chemical solution bath. The blender system further includes a controller (110) configured to maintain at least one compound within a selected concentration range in the chemical solution bath. The controller controls at least one of operation of the blender unit to maintain the concentration of the compound within a selected concentration range within the solution delivered to the tank, and a change in flow rate of solution into and out of the tank when a concentration of the compound within the chemical solution bath falls outside of a target range.
摘要翻译：提供了一种将所需浓度的化学溶液浴保持在一起的混合器系统。搅拌器系统包括配置成接收和混合至少两种化学化合物（例如氨和过氧化氢）并且将包含选定浓度的化合物混合物的溶液输送到储存器（2）的搅拌器单元（100）化学溶液浴的体积。混合器系统还包括控制器（110），其被配置为将化学溶液浴中的至少一种化合物保持在选定的浓度范围内。控制器控制搅拌器单元的操作中的至少一个，以将化合物的浓度保持在输送到罐中的溶液中的选定浓度范围内，以及溶液进出槽的流速的变化，当浓度化学溶液浴中的化合物落在目标范围之外。

9. 发明申请

WO2006109144A1 METHOD AND APPARATUS FOR ASYNCHRONOUS BLENDING AND SUPPLY OF CHEMICAL SOLUTIONS 审中-公开
标题翻译：用于异步混合和化学溶液供应的方法和装置
公开(公告)号：WO2006109144A1
公开(公告)日：2006-10-19
申请号：PCT/IB2006/000852
申请日：2006-04-12
申请人： L'AIR LIQUIDE-SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE , URQUHART, Karl J.
发明人： URQUHART, Karl J.
IPC分类号： G05D11/13
CPC分类号： B01F15/00194 , B01F15/0408 , B01F2215/0032 , B01F2215/0096 , G05D11/138 , Y10T137/0335 , Y10T137/034 , Y10T137/2506 , Y10T137/2509
摘要： Methods and apparatuses for blending and supply of chemical solutions. The method of the present invention includes a continuous blending system. This continuous blending system (100) monitors the output and continuously adjusts the blending system to achieve a predetermined formulation of at least a first solution (114) . A centralized monitoring system (124) continuously evaluates the solutions and adjusts the output of the blender (113) as needed to maintain the predetermined formulation of the solution. The system includes at least a first tank system (117) . Any solutions (120) that are delivered from this tank system are also continuously monitored, evaluated, and adjusted as needed by the centralized monitoring system.
摘要翻译：混合和供应化学溶液的方法和装置。本发明的方法包括连续混合系统。该连续混合系统（100）监测输出并连续地调节混合系统以实现至少第一溶液（114）的预定配方。集中监控系统（124）根据需要连续地评估解决方案并调整搅拌器（113）的输出以维持解决方案的预定配方。该系统至少包括第一罐系统（117）。从这个坦克系统提供的任何解决方案（120）也可以根据集中监控系统的需要进行不断的监控，评估和调整。

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