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    • 1. 发明申请
    • COLD CATHODE AND METHODS FOR PRODUCING THE SAME
    • 冷阴极及其制造方法
    • WO9859355A3
    • 1999-06-10
    • PCT/RU9800200
    • 1998-06-23
    • DZBANOVSKY NIKOLAI NIKOLAEVICHPILEVSKY ANDREI ALEXANDROVICHSUETIN NIKOLAI VLADISLAVOVICHRAKHIMOV ALEXANDR TURSUNOVICHTIMOFEYEV MIKHAIL ARKADIEVICH
    • DZBANOVSKY NIKOLAI NIKOLAEVICHPILEVSKY ANDREI ALEXANDROVICHSUETIN NIKOLAI VLADISLAVOVICHRAKHIMOV ALEXANDR TURSUNOVICHTIMOFEYEV MIKHAIL ARKADIEVICH
    • H01J9/02H01J1/30
    • H01J9/027H01J9/025
    • The present invention relates to the production of highly efficient films for field-effect electron emitters, wherein said films may be used in the production of flat displays in electronic microscopes, in microwave electronics, in light sources, etc. This invention more precisely relates to a cold cathode that comprises a substrate having a carbon film applied thereto. The carbon film has an irregular structure consisting of carbon micro-ridges and/or micro-threads which are perpendicular to the surface of the substrate, have a size ranging typically from 0.01 to 1 micron and a distribution density of between 0.1 and 10 mu m . This invention also relates to method for producing a cold electrode, wherein said method comprises generating a DC current discharge with a current density of between 0.15 and 0.5 A/cm in a mixture comprising hydrogen and a carbon-containing additive, and further depositing the carbon phase on the substrate located at the anode. The deposition process is carried out in a mixture containing hydrogen and vapours of ethylic alcohol or methane, under an overall pressure of between 50 and 300 Torrs and at a substrate temperature of between 600 and 900 DEG C. The concentration of ethylic alcohol vapours ranges from 5 to 10 % while that of methane vapours ranges from 15 to 30 %. A method for producing a cold cathode comprises generating a microwave discharge at an absorbed power of between 100 and 1000 W. This discharge is generated in a mixture containing gaseous carbon oxide as well as methane in a 0.8-1.2 concentration and under a pressure of between 10 and 200 Torrs, and the carbon phase is further deposited on the substrate at a temperature on the substrate surface that ranges from 500 to 700 DEG C.
    • 本发明涉及制备用于场效应电子发射体的高效膜,其中所述膜可用于生产电子显微镜中的平板显示器,微波电子学,光源等。本发明更精确地涉及 冷阴极,其包括具有施加到其上的碳膜的基板。 碳膜具有由碳微脊和/或微线组成的不规则结构,其垂直于衬底的表面,其尺寸通常为0.01至1微米,分布密度为0.1至10微米 <-2>。 本发明还涉及冷电极的制造方法,其中所述方法包括在包含氢和含碳添加剂的混合物中产生电流密度在0.15和0.5A / cm 2之间的直流电流放电 将碳相沉积在位于阳极的基底上。 沉积过程在含有氢气和乙醇或甲烷蒸气的混合物中进行,其总压力为50-300托,底物温度为600-900℃。乙醇蒸气的浓度范围为 5〜10%,甲烷蒸气的浓度为15〜30%。 制造冷阴极的方法包括以100至1000W的吸收功率产生微波放电。该放电是在含有气态碳氧化物的混合物以及0.8-1.2浓度的甲烷和在 10和200托,并且在基材表面上的温度下在碳衬底上进一步沉积碳相,其温度为500-700℃。
    • 4. 发明申请
    • METHOD FOR PRODUCING AN ADDRESSABLE FIELD-EMISSION CATHODE AND AN ASSOCIATED DISPLAY STRUCTURE
    • 用于生产可寻址场致发射阴极的方法和相关的显示结构
    • WO0163637A2
    • 2001-08-30
    • PCT/RU0100073
    • 2001-02-22
    • OOO VYSOKIE TBLYABLIN ALEXANDR ALEXANDROVICRAKHIMOV ALEXANDR TURSUNOVICHSAMORODOV VLADIMIR ANATOLIEVICSUETIN NIKOLAI VLADISLAVOVICH
    • BLYABLIN ALEXANDR ALEXANDROVICRAKHIMOV ALEXANDR TURSUNOVICHSAMORODOV VLADIMIR ANATOLIEVICSUETIN NIKOLAI VLADISLAVOVICH
    • C23C16/26H01J1/30H01J9/02H01J17/06H01J
    • H01J9/025
    • The inventive method relates to microelectronic and consists in the application of an emission layer to elements of an addressable field-emission electrode with the aid of a gas-phase synthesis method in a hydrogen flow accompanied by a supply of a carbonaceous gas. A dielectric backing is made of a high-temperature resistant material and discrete elements of the addressable field-emission electrode are made of a high-temperature resistant metal. the growth rate of the emission layer on the dielectric backing is smaller than the growth rate of the emission layer on the metallic discrete elements as a result of a selected process of depositing the carbonaceous emission layer, namely the backing temperature, the temperature of the reactor threads, the pumping speed of a gas mixture through the reactor, a selected distance between the reactor threads and the backing and a settling time. The cathode metallic discrete elements can be made of two metallic layers. The upper metallic layer is removed before the formation of required configurations from the remaining layer. The layer materials are selected in such a way that the emission characteristics thereof can ensure a required current from the upper metallic layer. For producing a display structure, a control grid is obtained from the metal layer having an emission threshold higher than a field density at which the cathode emits the required current. The inventive method enables to avoid operations of removing the emission layer making it possible to produce flat displays having high characteristics in addition to high performance and low cost.
    • 本发明的方法涉及微电子,并且在于借助于伴随着碳质气体供应的氢气流中的气相合成方法将发射层应用于可寻址场致发射电极的元件。 电介质背衬由耐高温材料制成,可寻址场致发射电极的分立元件由耐高温金属制成。 电介质背衬上的发射层的生长速率小于金属离散元件上的发射层的生长速率,这是由于选择的沉积碳质发射层的过程的结果,即背衬温度,反应器的温度 螺纹,通过反应器的气体混合物的泵送速度,反应器螺纹和背衬之间的选定距离和沉降时间。 阴极金属分立元件可以由两个金属层制成。 在从剩余的层形成所需的构造之前去除上部金属层。 以这样的方式选择层材料,即其发射特性可确保来自上金属层的所需电流。 为了制造显示结构,从具有高于阴极发射所需电流的场密度的发光阈值的金属层获得控制栅。 本发明的方法能够避免除去发射层的操作,使得除了高性能和低成本之外,还可以生产具有高特性的平板显示器。
    • 7. 发明申请
    • HIGH-LUMINOSITY LIGHT SOURCE
    • 高亮度光源
    • WO1998005054A2
    • 1998-02-05
    • PCT/RU1997000238
    • 1997-07-25
    • RAKHIMOV, Alexandr TursunovichSUETIN, Nikolai VladislavovichMURATOV, Evgeny Anatolievich
    • H01J00/00
    • H01J63/06
    • The present invention relates to a high-luminosity light source which comprises a body with a transparent screen having an electro-conductive layer applied thereon for supporting a luminophore. A planar cathode is mounted within the body, while a grid-type anode is placed between the screen and the cathode at a predetermined distance from the latter. The body is filled with a working gas consisting of an inert gas or a mixture of inert gases, while the anode and the cathode may be made of spray-resistant materials. The cathode may be made in the shape of a grid, while an additional screen having an electro-conductive layer applied thereon for supporting a luminophore is placed on the side of said cathode. A highly efficient photoluminophore may be used as the luminophore, while the working-gas pressure and the excitation parameters are optimally selected for excitation of the ultraviolet radiation of the working gas. Unlike light sources used in prior art, the luminophore is excited by electrons originating from a secondary emission, thus producing strong currents of electron beams and a high luminosity. This construction may also be used to provide sources with a large surface area. The light source of the present invention is an efficient one with a high intensity.
    • 本发明涉及一种高亮度光源,其包括具有透明屏幕的主体,该透明屏幕具有用于支撑发光体的导电层。 平面阴极安装在体内,而格栅型阳极以与之相隔预定的距离放置在屏幕和阴极之间。 主体装有由惰性气体或惰性气体混合物组成的工作气体,而阳极和阴极可以由防喷涂材料制成。 阴极可以制成网格形状,而在其上施加有用于支撑发光体的导电层的附加屏幕被放置在所述阴极侧。 可以使用高效的光引发剂作为发光体,而工作气体压力和激发参数被最佳选择用于激发工作气体的紫外线辐射。 与现有技术中使用的光源不同,发光体被来自二次发射的电子激发,从而产生强大的电子束电流和高亮度。 这种结构也可用于为源提供大的表面积。 本发明的光源是高强度的光源。