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    • 2. 发明申请
    • FLUID EJECTION DEVICES AND METHODS OF FABRICATION
    • 流体喷射装置和制造方法
    • WO2008013748A1
    • 2008-01-31
    • PCT/US2007/016468
    • 2007-07-20
    • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.DONALDSON, Jeremy, HarlanHAGER, MichaelCHUNG, Bradley, D.STRAND, Thomas, R.
    • DONALDSON, Jeremy, HarlanHAGER, MichaelCHUNG, Bradley, D.STRAND, Thomas, R.
    • B41J2/21B41J2/16
    • B41J2/1631B41J2/1603B41J2/1628B41J2/1629B41J2/1634B41J2002/14475
    • A fluid ejection device (12) includes a fluidic layer assembly (24) mounted to a substrate (20), the fluidic layer assembly (24) having a raised portion (38) formed on a side (36) that faces away from the substrate (20). A first nozzle (16a) is formed through a portion of the fluidic layer assembly (24) other than the raised portion (38), and a second, larger nozzle is formed through the raised portion (38). A method of fabricating a fluid ejection device (12) includes applying a first layer (54) of a photoresist material to a substrate (20) and a second layer (60) of a photoresist material to the first layer (54). A sequence of exposures defines a first region (58a) of soluble material in the first layer (54) that becomes the first nozzle (16a) and second and third regions (58b, 58c) of soluble material in the first and second layers (54, 60), respectively, that jointly become the second nozzle (16b). A region of insoluble material (64) in the second layer (60) becomes the raised portion (38).
    • 流体喷射装置(12)包括安装到基板(20)的流体层组件(24),流体层组件(24)具有形成在远离基板的侧面(36)上的凸起部分(38) (20)。 第一喷嘴(16a)通过除了凸起部分(38)之外的流体层组件(24)的一部分形成,并且通过凸起部分(38)形成第二较大的喷嘴。 一种制造流体喷射装置(12)的方法包括将光致抗蚀剂材料的第一层(54)施加到第一层(54)的基底(20)和光刻胶材料的第二层(60)上。 曝光序列限定了第一层(54)中可变材料的第一区域(58a),其成为第一和第二层(54)中的可溶材料的第一喷嘴(16a)和第二和第三区域(58b,58c) ,60),共同地成为第二喷嘴(16b)。 第二层(60)中的不溶物(64)的区域成为隆起部(38)。