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    • 4. 发明申请
    • SCANNING PROBE
    • 扫描探头
    • WO2013163538A1
    • 2013-10-31
    • PCT/US2013/038401
    • 2013-04-26
    • RHK TECHNOLOGY, INC.
    • MURDICK, Ryan
    • G01Q70/00
    • G01Q70/16
    • An SPM probe, and a method of producing an SPM probe including annealing an electrically conductive wire under ultra-high vacuum, and immersing the wire in an etching solution contained in a first chamber of a container, which includes a second chamber that surrounds the first chamber, also contains the etching solution, and houses an electrically conductive ring surrounding the first chamber. The method also includes applying voltage across the wire and the ring, and retracting the wire in a direction out of the first chamber.
    • 一种SPM探针,以及一种生产SPM探针的方法,包括在超高真空下退火导电丝,并将该线浸入包含在容器的第一腔室中的蚀刻溶液中,所述蚀刻溶液包括第二腔室, 室,也包含蚀刻溶液,并且容纳围绕第一室的导电环。 该方法还包括在电线和环上施加电压,并且将电线沿着离开第一室的方向回缩。