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    • 1. 发明申请
    • ION GETTER PUMP
    • 离子吸
    • WO0143162A2
    • 2001-06-14
    • PCT/EP0012176
    • 2000-12-04
    • MAX PLANCK GESELLSCHAFTLAUCHE HANS
    • LAUCHE HANS
    • H01J41/16H01J41/12
    • H01J41/16
    • The invention relates to an Ionengetterpumpe (10) comprising an electrode arrangement consisting of an anode device (20) and a cathode device (30) which are configured for producing a discharge in gas in a vacuum. The anode device (20) is formed by a cylinder-shaped anode ring (21) and the cathode device (30) comprises two cathode plates (31, 32) having a getter material that can be thermally activated. Said plates are vertically intersected by the cylinder axis of the anode ring (21) that is provided with an inordinate solid body structure on the edges (22) thereof. Said structure is produced by means of thermal treatment. The ion getter pump is characterised by high reliability and can be operated without maintenance for many years.
    • 我们将描述具有阳极(20)和阴极(30),其被设计成产生在真空气体放电的电极组件的离子吸气泵(10),所述(21)上形成阳极装置(20)由圆筒形阳极环 和阴极的装置(30)具有两个阴极板(31,32)配有一个热活化吸气材料,垂直地从阳极环(21)的圆柱形轴切割,并且其中在其边缘(22)通过热处理所述阳极环(21) 形成的,无序的固体结构具有。 多年来离子泵的特征在于高的可靠性和免维护运行。
    • 2. 发明申请
    • DEVICE AND METHOD FOR DETECTION OF PARTICLES
    • 用于检测颗粒的装置和方法
    • WO1997039473A1
    • 1997-10-23
    • PCT/SE1997000643
    • 1997-04-16
    • LUNDIN, RichardLAUCHE, Hans
    • H01J43/04
    • H01J43/04H01J43/24
    • The present invention relates to a particle and photon detector and to a method for application in such detection. The detector includes a body having a beam-incident surface (8) capable of releasing secondary electrons in numbers proportional to the number of particles incident on said surface, and a plurality of secondary electron multiplier channels whose inlet openings are disposed in the beam-incident surface, therewith to amplify the number of secondary electrons. A centre channel (2) extends from the beam-incident surface (8) through the detector body and enables a beam of particles or photons to pass through the body. The inlet openings of the secondary electron multipliers (4) are conveniently disposed in the beam-incident surface in a ring around the centre channel (2) for receiving secondary electrons. The inventive method applied in the detection of charged particles, such as ions and electrons, in a beam that contains charged and charge-free particles comprises the steps of subjecting the charged particles to the effect of an electric field so as to collect the charged particles in an outer tubular layer which surrounds the residual beam of charge-free particles, such as to form two mutually coaxial beams, wherein the outer tubular particle beam is captured by a plurality of secondary electron multipliers and wherein signals delivered by the electron multiplier are read-off.
    • 本发明涉及一种粒子和光子检测器及其应用于这种检测的方法。 检测器包括具有能够释放与入射在所述表面上的粒子数目成比例的数量的二次电子的光束入射表面(8)的主体,以及多个二次电子倍增器通道,其入口开口设置在光束入射 表面,从而放大二次电子的数量。 中心通道(2)从光束入射表面(8)延伸穿过检测器主体并且使得一束粒子或光子能够穿过身体。 二次电子倍增器(4)的入口开口方便地设置在围绕中心通道(2)的环中的束入射表面中,用于接收二次电子。 在包含带电和无电荷粒子的光束中用于检测带电粒子(例如离子和电子)的本发明的方法包括以下步骤:使带电粒子受到电场的影响,以便收集带电粒子 在外部管状层中,其围绕剩余的无电荷粒子束,例如形成两个相互同轴的光束,其中外部管状粒子束被多个二次电子倍增器捕获,并且其中读取由电子倍增器传递的信号 -off。