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    • 10. 发明申请
    • PRINTING HEAD FOR NANO PATTERNING
    • NANO PATTERNING印刷头
    • WO2005044568A1
    • 2005-05-19
    • PCT/KR2004/000687
    • 2004-03-26
    • KOREA INSTITUTE OF MACHINERY & MATERIALSKIM, Dong-SooLEE, Won-HeeLEE, Taek-MinCHOI, Doo-SunCHOI, Byung-Oh
    • KIM, Dong-SooLEE, Won-HeeLEE, Taek-MinCHOI, Doo-SunCHOI, Byung-Oh
    • B41J2/07
    • C23C16/00B01L3/0268B01L2400/027B01L2400/0439B33Y30/00B41J2/14B82Y30/00
    • The present invention provides a printing head for nano patterning including a manifold for accommodating a liquid printing material, a cartridge with an injection chamber communicating with the manifold, and a sample holder for patterning installed outside the injection chamber of the cartridge. The printing head comprises a shadow mask which is installed outside the injection chamber to be finely moved in an X-Y direction and has a single injection hole with a relatively very small size; an actuator for finely moving the shadow mask; an injection-inducing unit including a high voltage generator, a power supply electrode that is installed within the injection chamber and receives power from the high voltage generator to generate positive charges, and an opposite electrode for generating negative charges on the sample holder in a state where the shadow mask is interposed between the power supply electrode and the opposite electrode, thereby generating induced discharge from the injection chamber toward the sample holder; and a control unit for controlling the driving of the actuator so that the injection hole of the shadow mask can be moved to patterning positions corresponding to patterning data input in advance. According to the present invention, patterning accuracy can be improved, ultra-fine patterning and patterning of arbitrary shapes can be achieved, and a configuration for injecting the printing material can be simplified.
    • 本发明提供了一种用于纳米图案化的打印头,包括用于容纳液体印刷材料的歧管,具有与歧管连通的注射室的药筒,以及安装在药筒的注射室外部的图案样品保持器。 打印头包括荫罩,该荫罩安装在注射室的外部,以沿X-Y方向微细移动,并具有相对非常小的单个注射孔; 用于使荫罩微调的致动器; 注射诱导单元,包括高压发生器,安装在注射室内并接收来自高压发生器的电力以产生正电荷的电源电极,以及在状态下在样品架上产生负电荷的相对电极 其中荫罩插入在电源电极和相对电极之间,从而从注射室向样品保持器产生感应放电; 以及控制单元,用于控制致动器的驱动,使得荫罩的喷射孔可以移动到与预先输入的图案化数据相对应的图形位置。 根据本发明,可以提高图形精度,可以实现任意形状的超精细图案化和图案化,并且可以简化用于注入打印材料的构造。