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    • 2. 发明申请
    • ULTRASONIC MEMS TRANSMITTER AND RECEIVER WITH A POLYMER MEMBRANE
    • 超声波MEMS发射器和接收器与聚合物膜
    • WO2012145257A1
    • 2012-10-26
    • PCT/US2012/033723
    • 2012-04-16
    • EASTMAN KODAK COMPANYHUFFMAN, James, D.KNEEZEL, Gary, A.
    • HUFFMAN, James, D.KNEEZEL, Gary, A.
    • B06B1/02B06B1/06G01N29/24
    • G01N29/2437B06B1/0292G01H11/06G01N2291/0427
    • An ultrasonic transmitter and receiver includes a MEMS composite transducer (100). The MEMS composite transducer includes a substrate (110). Portions of the substrate define an outer boundary (114) of a cavity (115). A first MEMS transducing member (120) includes a first size. A first portion (121) of the first MEMS transducing member is anchored to the substrate. A second portion (122) of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane (130) is positioned in contact with the first and second MEMS transducing members. A first portion (131) of the compliant membrane covers the first and second MEMS transducing members. A second portion (132) of the compliant membrane is anchored to the substrate. The ultrasonic transmitter and receiver comprises as well separate circuitry (40-45) for transmitting and receiving the ultrasonic signals.
    • 超声波发射器和接收器包括MEMS复合传感器(100)。 MEMS复合传感器包括衬底(110)。 衬底的一部分限定空腔(115)的外边界(114)。 第一MEMS转换构件(120)包括第一尺寸。 第一MEMS转换构件的第一部分(121)被锚固到衬底上。 第一MEMS转换构件的第二部分(122)在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚定到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜(130)被定位成与第一和第二MEMS转换构件接触。 柔性膜的第一部分(131)覆盖第一和第二MEMS换能构件。 柔性膜的第二部分(132)锚定到基底。 超声波发射器和接收器还包括用于发送和接收超声波信号的单独的电路(40-45)。