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1. 发明申请

WO2010089601A1 CONTROL SYSTEM FOR A SCANNING PROBE MICROSCOPE 审中-公开
标题翻译：用于扫描探针显微镜的控制系统
公开(公告)号：WO2010089601A1
公开(公告)日：2010-08-12
申请号：PCT/GB2010/050181
申请日：2010-02-04
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew , CATTO, David
发明人： HUMPHRIS, Andrew , CATTO, David
IPC分类号： G01Q10/06 , G01Q30/04
CPC分类号： G01Q10/065 , G01Q30/04
摘要： A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
摘要翻译：控制系统（32,75）用于扫描探针显微镜，其中测量数据在被描述为探针和样品相对于彼此移动的扫描图案内的位置被收集。控制系统与位置检测系统（34）一起使用，该位置检测系统（34）测量探针和样本中的至少一个的位置，使得它们的相对空间位置（x，y）被确定。然后，测量数据可以在构建图像时与经验确定的空间位置相关联。使用经验位置数据意味着图像质量不受显微镜扫描系统机械控制探针和样品的相对位置的能力的限制。

2. 发明申请

WO2008053217A1 PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE 审中-公开
标题翻译：用于扫描探针显微镜的探头组件
公开(公告)号：WO2008053217A1
公开(公告)日：2008-05-08
申请号：PCT/GB2007/004160
申请日：2007-10-31
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew , CATTO, David
发明人： HUMPHRIS, Andrew , CATTO, David
IPC分类号： G12B21/22 , G01N13/10
CPC分类号： G01Q70/06 , B82Y35/00
摘要： A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.
摘要翻译：探头组件用于扫描探针显微镜。探针组件包括具有多个至少三个基本上相同的探针的载体，每个探针具有位于多个探针尖端共同的平面上且可从该平面移动的尖端。组件还包括寻址装置，其适于选择多个探针之一相对于探针的其余部分的大部分相对运动。这种组件具有促进快速（也许是自动化）使用的探针的更换的潜力，适用于高速扫描装置。

3. 发明申请

WO2010067129A1 DYNAMIC PROBE DETECTION SYSTEM 审中-公开
标题翻译：动态探测系统
公开(公告)号：WO2010067129A1
公开(公告)日：2010-06-17
申请号：PCT/GB2009/051701
申请日：2009-12-11
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew
发明人： HUMPHRIS, Andrew
IPC分类号： G01Q20/02 , G01Q60/34 , G01B9/02
CPC分类号： G01Q20/02 , G01Q10/065 , G01Q60/34 , G01Q60/38
摘要： A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering,that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.
摘要翻译：动态探针检测系统（29,32）用于扫描探针显微镜，该扫描探针显微镜包括反复朝向和远离样品表面移动的探针（18）。当扫描样品表面时，干涉仪（88）产生指示从探针（80a，80b，80c）反射的光与高度参考光束之间的路径差的输出高度信号。信号处理装置监视高度信号并导出指示探针高度的每个振荡周期的测量值。这样可以提取表示样品高度的测量值，而无需求助于平均或过滤，可用于形成样品图像。检测系统还可以包括反馈机制，其可操作以将反馈参数的平均值保持在设定水平。

4. 发明申请

WO2009147452A1 METHOD OF PROBE ALIGNMENT 审中-公开
标题翻译：探索对齐方法
公开(公告)号：WO2009147452A1
公开(公告)日：2009-12-10
申请号：PCT/GB2009/050639
申请日：2009-06-08
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew
发明人： HUMPHRIS, Andrew
IPC分类号： G12B21/20 , G01N13/16 , G01B9/02
CPC分类号： G01Q20/02 , G01B11/0608 , G01B2290/45 , G01Q10/065
摘要： A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and / or if scanning at high scanning speeds that may excite transient motion of the probe.
摘要翻译：描述了探针对准的方法，其中询问光束与扫描探针显微镜的探针对准。所描述的方法确保光束尽可能靠近探针尖端正上方的位置。这可以通过去除在扫描过程中允许悬臂偏转变化和/或如果以可以激发探针的瞬态运动的高扫描速度进行扫描时可能出现的变化来提高图像质量。

5. 发明申请

WO2011121348A1 PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE 审中-公开
标题翻译：用于扫描探针显微镜的探头组件
公开(公告)号：WO2011121348A1
公开(公告)日：2011-10-06
申请号：PCT/GB2011/050646
申请日：2011-03-29
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew
发明人： HUMPHRIS, Andrew
IPC分类号： G01Q70/06
CPC分类号： G01Q70/06 , B82Y35/00 , G01Q10/02 , G01Q70/02
摘要： A probe assembly (74, 16) for use with a scanning probe microscope includes a carrier (74) supporting at least two probes (78a) mounted on a tilt stage (16) arranged to tilt the carrier about an axis (23). The probes (78a) may be distributed on one or more (76a, 76b) surfaces. In use, the tilt stage (16) operates either as a selection device, orienting a selected probe or surface (76a) towards a sample (20), and / or as an alignment tool, adjusting a planar array (78) of probes such that they are better aligned with the sample (20). This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.
摘要翻译：用于扫描探针显微镜的探针组件（74,16）包括支撑件（74），其支撑安装在倾斜台（16）上的至少两个探针（78a），所述探针布置成围绕轴线（23）倾斜托架。探针（78a）可以分布在一个或多个（76a，76b）表面上。在使用中，倾斜台（16）作为选择装置操作，将选定的探针或表面（76a）朝向样品（20）定向，和/或作为对准工具，调整探针的平面阵列（78），如它们与样品（20）更好地对齐。这在显微镜操作期间提供了自动交换探针的潜力，增加了速度和精度。

6. 发明申请

WO2009147450A1 PROBE DETECTION SYSTEM 审中-公开
标题翻译：探测系统
公开(公告)号：WO2009147450A1
公开(公告)日：2009-12-10
申请号：PCT/GB2009/050637
申请日：2009-06-08
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew
发明人： HUMPHRIS, Andrew
IPC分类号： G12B21/20 , G01N13/16 , G01B9/02
CPC分类号： G01Q20/02 , G01B11/0608 , G01B2290/45 , G01Q10/065
摘要： A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscopeprobe (16) is separated into two components. Afirstcomponent (84) is analysed by thedeflection detection system (28) and is used in a feedback systemthatmaintainsthe average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the heightof the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which thefeedback systemis unableto respond at the raterequired to adjust probe height betweenpixel positions.
摘要翻译：与扫描探针显微镜一起使用的探针检测系统（74）包括高度检测系统（88）和偏转检测系统（28）。当扫描样品表面时，从微型探针（16）反射的光被分成两部分。通过偏移检测系统（28）分析最初组件（84），并将其用于在扫描期间平均探针偏转基本恒定的反馈系统中。通过高度检测系统（88）分析第二部件（86），从而可以获得在固定参考点之上的探头高度的指示，从而获得样品表面的图像。这种双重检测系统特别适用于快速扫描应用，其中反馈系统不能以所需的速率响应以调整像素位置之间的探针高度。

7. 发明申请

WO2009019513A1 VIBRATION COMPENSATION IN PROBE MICROSCOPY 审中-公开
标题翻译：探针显微镜中的振动补偿
公开(公告)号：WO2009019513A1
公开(公告)日：2009-02-12
申请号：PCT/GB2008/050660
申请日：2008-08-04
申请人： INFINITESIMA LTD , HUMPHRIS, Andrew
发明人： HUMPHRIS, Andrew
IPC分类号： G01N13/10 , G12B21/24
CPC分类号： G01Q70/04 , G01Q20/02
摘要： A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.
摘要翻译： A本地探针显微镜装置（1）包括具有平移台（5a，5b）的探针（3），用于控制探针（3）相对于样品表面的位置。探针（3）具有用于保持探头的偏转的反馈机构（6,7）和包括用于补偿环境噪声的装置的高度测量系统（9）。局部探针显微镜装置特别适合用作晶片制造厂中的晶片检查工具，其中检查工具容易暴露于显着的机械振动。

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