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1. 发明申请

WO2006040559A1 A PARTICLE BEAM GENERATING DEVICE 审中-公开
标题翻译：颗粒光束发生装置
公开(公告)号：WO2006040559A1
公开(公告)日：2006-04-20
申请号：PCT/GB2005/003935
申请日：2005-10-13
申请人： EASTHAM, Derek, Anthony
发明人： EASTHAM, Derek, Anthony
IPC分类号： H01J37/065 , H01J3/02 , H01J37/26 , H01J37/317
CPC分类号： H01J37/28 , B82Y10/00 , H01J37/065 , H01J2237/06341 , H01J2237/3175
摘要： A particle beam generating device formed from a substrate having a planar surface. The planar surface having an etched rebate portion (2), with a base surface and at least one wall surface, which defines a raised peripheral region. The device further comprising a particle extractor comprising a conductive layer, disposed on the wall surface, and an extracting aperture extending therethrough, to extract particles from a particle source. The particle extractor also having electrical contact means for providing a voltage thereto. The device further comprising a particle accelerator (4) comprising an accelerating passageway, in communication and extending concentrically with the extracting aperture, and extending from the wall surface and through the opposite surface of the raised peripheral region to provide a particle accelerator for particles extracted from a suitable particle source disposed on said base surface of said rebate. The device may further comprise focussing means (5, 6).
摘要翻译：一种由具有平面的基板形成的粒子束产生装置。平面表面具有蚀刻的折边部分（2），其具有限定凸起周边区域的基面和至少一个壁表面。所述装置还包括粒子提取器，其包括布置在所述壁表面上的导电层和延伸穿过其中的提取孔，以从颗粒源提取颗粒。颗粒提取器还具有用于向其提供电压的电接触装置。所述装置还包括颗粒加速器（4），所述颗粒加速器（4）包括加速通道，所述加速通道与所述提取孔同心地延伸并且从所述壁表面延伸并且穿过所述凸起周边区域的相对表面，以提供用于从设置在所述回扣的所述基面上的合适的颗粒源。该装置还可以包括聚焦装置（5,6）。

2. 发明申请

WO2003107375A2 A PARTICLE BEAM GENERATOR 审中-公开
标题翻译：颗粒光束发生器
公开(公告)号：WO2003107375A2
公开(公告)日：2003-12-24
申请号：PCT/GB2003/002560
申请日：2003-06-16
申请人： EASTHAM, Derek, Anthony
发明人： EASTHAM, Derek, Anthony
IPC分类号： H01J
CPC分类号： H01J37/063 , B82Y10/00 , B82Y40/00 , H01J37/26 , H01J37/3174 , H01J2237/06375
摘要： The source of electrons is a nanotip in a vacuum as used in near field microscopy. The source of ions is a similar nanotip in vacuum supplied with liquid metal (gallium) as in a liquid-metal ion source. Electrons or ions from this nanometre-sized tip are extracted by centralising the tip over an aperture plate and applying a suitable voltage to the tip. The electrons (ions) pass through this plate and are accelerated up to several keV using a nanoscale/microscale accelerating column before being focussed using further microscale (or nanoscale) cylindrical lenses. The final element is an aberration corrected miniature (or sub-miniature) einzel lens which can focus the beam at several millimetres from the end of the instrument.
摘要翻译：电子源是在近场显微镜中使用的真空中的纳米尖端。离子源是与液态金属离子源一样的液态金属（镓）提供的真空中的类似的纳米尖端。通过将尖端集中在孔板上并向尖端施加适当的电压来提取来自该纳米尺寸尖端的电子或离子。电子（离子）通过该平板，并使用纳米尺度/微尺度加速柱加速至几keV，然后使用进一步的微米（或纳米级）柱面透镜聚焦。最后一个元件是像差校正的微型（或亚微型）einzel透镜，可以将光束聚焦在离仪器末端几毫米处。

3. 发明申请

WO2008090380A1 IMPROVED PARTICLE BEAM GENERATOR 审中-公开
标题翻译：改进颗粒光束发生器
公开(公告)号：WO2008090380A1
公开(公告)日：2008-07-31
申请号：PCT/GB2008/050050
申请日：2008-01-24
申请人： NFAB Limited , EASTHAM, Derek Anthony
发明人： EASTHAM, Derek Anthony
IPC分类号： H01J37/12
CPC分类号： H01J37/073 , B82Y15/00 , H01J37/065 , H01J37/12 , H01J37/28 , H01J2237/03 , H01J2237/0492 , H01J2237/062 , H01J2237/06341 , H01J2237/1205 , H01J2237/1207
摘要： A particle beam generator comprising particle extraction means disposed adjacent a particle source and operable to extract particles from such a source into an extraction aperture of the extraction means to form a particle beam, particle accelerating means operable to accelerate the extracted particles to increase the energy of the beam, and focussing means operable to focus the particle beam, each of said extraction means, accelerating means and focussing means being arranged in sequence and having apertures therethrough and in alignment to define a passageway through which the particles are constrained to move, characterised in that the extraction means comprises a lens structure comprising at least a pair of electrodes separated by a layer of insulating material allowing the application of different potentials to each of the lens structure electrodes, one of said electrodes comprising an extraction plate having an extraction aperture formed therein, by means of which extraction plate particles may be drawn from the particle source and through the extraction aperture by means of a potential difference between the source and said extraction plate.
摘要翻译：一种粒子束发生器，其包括与颗粒源相邻设置的颗粒提取装置，可操作以将颗粒从这种源提取到提取装置的提取孔中以形成粒子束，粒子加速装置可操作以加速提取的颗粒以增加能量所述光束和聚焦装置可操作以聚焦所述粒子束，所述提取装置，加速装置和聚焦装置中的每一个按顺序布置并且具有穿过其中的孔并且对齐以限定颗粒被约束以移动的通道，其特征在于所述提取装置包括透镜结构，所述透镜结构包括至少一对电极，所述至少一对电极由绝缘材料层隔开，允许对每个所述透镜结构电极施加不同的电位，所述电极中的一个包括在其中形成有提取孔的提取板，通过其提取平台 e颗粒可以通过源和所述提取板之间的电位差从颗粒源和抽出孔中抽出。

4. 发明申请

WO2003107375A3 CHARGED PARTICLE BEAM GENERATOR 审中-公开
公开(公告)号：WO2003107375A3
公开(公告)日：2003-12-24
申请号：PCT/GB2003/002560
申请日：2003-06-16
申请人： EASTHAM, Derek, Anthony
发明人： EASTHAM, Derek, Anthony
IPC分类号： H01J37/26
摘要： The source of electrons is a nanotip in a vacuum as used in near field microscopy. The source of ions is a similar nanotip in vacuum supplied with liquid metal (gallium) as in a liquid-metal ion source. Electrons or ions from this nanometre-sized tip are extracted by centralising the tip over an aperture plate and applying a suitable voltage to the tip. The electrons (ions) pass through this plate and are accelerated up to several keV using a nanoscale/microscale accelerating column before being focussed using further microscale (or nanoscale) cylindrical lenses. The final element is an aberration corrected miniature (or sub-miniature) einzel lens which can focus the beam at several millimetres from the end of the instrument.

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