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1. 发明申请

WO2007076172A3 ANTI-STICTION GAS-PHASE LUBRICANT FOR MICROMECHANICAL SYSTEMS 审中-公开
标题翻译：用于微生物系统的反相气相润滑剂
公开(公告)号：WO2007076172A3
公开(公告)日：2008-05-08
申请号：PCT/US2006060543
申请日：2006-11-03
申请人： MIRADIA INC , CHEN DONGMIN , XIONG FULIN
发明人： CHEN DONGMIN , XIONG FULIN
IPC分类号： C10M171/00
CPC分类号： G02B26/0841 , B81B3/0005 , B81B2201/042 , B81C1/0096 , B82Y30/00 , H02N1/006
摘要： One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.
摘要翻译：微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件，其中第二接触表面在器件操作期间与第一接触表面相互作用，以及设置在第一接触表面和第二接触表面之间的气相润滑剂第二接触表面，其中气相润滑剂适于减小第一接触表面和第二接触表面之间的静摩擦力。所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域该设备在运行期间。因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。

2. 发明申请

WO2007053527A2 PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：投影显示系统，包括一个高填充比率硅光空间光调制器
公开(公告)号：WO2007053527A2
公开(公告)日：2007-05-10
申请号：PCT/US2006/042243
申请日：2006-10-26
申请人： MIRADIA INC. , YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
发明人： YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译：显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。显示系统还包括位于照明路径中的空间光调制器。空间光调制器包括具有多个电极器件的半导体衬底以及耦合到半导体衬底的铰链结构。铰链结构包括硅材料。空间光调制器还包括耦合到铰链结构并延伸到距半导体衬底预定距离的镜柱和耦合到镜柱且覆盖多个电极装置的镜板。显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

3. 发明申请

WO2007041262A3 METHOD OF FABRICATING REFLECTIVE SPATIAL LIGHT MODULATOR HAVING HIGH CONTRAST RATIO 审中-公开
公开(公告)号：WO2007041262A3
公开(公告)日：2007-04-12
申请号：PCT/US2006/037970
申请日：2006-09-27
申请人： MIRADIA INC. , HUANG, Kegang , YANG, Xiao , CHEN, Dongmin
发明人： HUANG, Kegang , YANG, Xiao , CHEN, Dongmin
IPC分类号： B81C1/00
摘要： The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is suspended over and underlying hinge-containing layer by integral ribs of the reflecting material defined by gaps in a sacrificial layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, walls separating adjacent pixel regions may be recessed beneath the reflecting surface to further reduce unwanted scattering of incident light and thereby enhance contrast.

4. 发明申请

WO2006074175A3 METHOD AND STRUCTURE FOR FORMING AN INTEGRATED SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：形成集成空间光调制器的方法和结构
公开(公告)号：WO2006074175A3
公开(公告)日：2006-12-07
申请号：PCT/US2006000100
申请日：2006-01-03
申请人： MIRADIA INC , YANG XIAO , CHEN DONGMIN , HUANG KEGANG
发明人： YANG XIAO , CHEN DONGMIN , HUANG KEGANG
IPC分类号： H01L27/14 , G02B26/00 , H01L31/09
CPC分类号： G02B26/0841
摘要： A method of fabricating an integrated spatial light modulator. The method includes providing a first substrate including a bonding surface, processing a device substrate to form at least an electrode layer, the electrode layer including a plurality of electrodes, and depositing a standoff layer on the electrode layer. The method further includes forming standoff structures from the standoff layer and joining the bonding surface of the first substrate to the standoff structures on the device substrate. In a particular embodiment, the method further includes, after the step of depositing a standoff layer, performing chemical mechanical polishing of the standoff layer to planarize an upper surface of the standoff layer.
摘要翻译：一种制造集成空间光调制器的方法。该方法包括：提供包括结合表面的第一衬底;处理器件衬底以形成至少一个电极层，该电极层包括多个电极;以及在电极层上沉积支座层。该方法还包括从支撑层形成支座结构并将第一衬底的结合表面结合到器件衬底上的支座结构。在特定实施例中，该方法还包括在沉积支座层的步骤之后，对支座层进行化学机械抛光以平坦化支座层的上表面。

5. 发明申请

WO2008070669A3 METHOD AND APPARATUS FOR MEMS OSCILLATOR 审中-公开
公开(公告)号：WO2008070669A3
公开(公告)日：2008-06-12
申请号：PCT/US2007/086389
申请日：2007-12-04
申请人： MIRADIA INC. , YANG, Xiao , CHEN, Dongmin , WANG, Ye , PAYNE, Justin , WANG, Yuxiang , JI, Wook
发明人： YANG, Xiao , CHEN, Dongmin , WANG, Ye , PAYNE, Justin , WANG, Yuxiang , JI, Wook
IPC分类号： H03H9/24
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.

6. 发明申请

WO2007053527A3 PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：投影显示系统，包括高比例硅太阳能调光器
公开(公告)号：WO2007053527A3
公开(公告)日：2007-12-27
申请号：PCT/US2006042243
申请日：2006-10-26
申请人： MIRADIA INC , YANG XIAO , WANG YUXIANG , JI WOOK , PAYNE JUSTIN ALLEN , WANG YE , WORLEY III WILLIAM SPENCER , CHEN DONGMIN , WOO HOWARD
发明人： YANG XIAO , WANG YUXIANG , JI WOOK , PAYNE JUSTIN ALLEN , WANG YE , WORLEY III WILLIAM SPENCER , CHEN DONGMIN , WOO HOWARD
IPC分类号： G02B26/00 , B81B7/04 , H01L21/66 , H04N5/00
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译：显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。显示系统还包括位于照明路径中的空间光调制器。空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。铰链结构包括硅材料。空间光调制器还包括耦合到铰链结构并延伸到距离半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极装置的镜板。显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

7. 发明申请

WO2007053453A3 HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
公开(公告)号：WO2007053453A3
公开(公告)日：2007-05-10
申请号：PCT/US2006/042045
申请日：2006-10-26
申请人： MIRADIA INC. , YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
发明人： YANG, Xiao , WANG, Yuxiang , JI, Wook , PAYNE, Justin, Allen , WANG, Ye , WORLEY III, William, Spencer , CHEN, Dongmin , WOO, Howard
IPC分类号： G02B26/00
摘要： An optical deflection device for a display application The optical deflection device includes a semiconductor substrate (105) including an upper surface region and one or more electrode devices (112) provided overlying the upper surface region The optical deflection device also includes a hinge device (214) including a silicon material and coupled to the upper surface region The optical deflection device further includes a spacing defined between the upper surface region and the hinge device (214) and a mirror structure including a post portion (208) coupled to the hinge device (214) and a mirror plate portion (212) coupled to the post portion (208) and overlying the hinge device (214).

8. 发明申请

WO2007041262A2 METHOD OF FABRICATING REFLECTIVE SPATIAL LIGHT MODULATOR HAVING HIGH CONTRAST RATIO 审中-公开
标题翻译：制造具有高对比比率的反射式空间光调制器的方法
公开(公告)号：WO2007041262A2
公开(公告)日：2007-04-12
申请号：PCT/US2006037970
申请日：2006-09-27
申请人： MIRADIA INC , HUANG KEGANG , YANG XIAO , CHEN DONGMIN
发明人： HUANG KEGANG , YANG XIAO , CHEN DONGMIN
IPC分类号： H01L21/00
CPC分类号： G02B26/0841
摘要： The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is suspended over and underlying hinge-containing layer by integral ribs of the reflecting material defined by gaps in a sacrificial layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, walls separating adjacent pixel regions may be recessed beneath the reflecting surface to further reduce unwanted scattering of incident light and thereby enhance contrast.
摘要翻译：由空间光调制器装置提供的对比度可以通过将诸如支撑柱和可移动铰链之类的非反射元件设置在像素的反射表面后面来增强。根据一个实施例，反射表面通过由牺牲层中的间隙限定的反射材料的整体肋悬挂在铰接含有层之上并位于下方。根据一个替代实施例，反射表面通过在诸如氧化物的中间层中形成的间隙与下面的铰链分离。在任一实施例中，分隔相邻像素区域的壁可以在反射表面下方凹陷，以进一步减少入射光的不希望的散射，从而增强对比度。

9. 发明申请

WO2011020122A1 HETEROJUNCTION OXIDE NON-VOLATILE MEMORY DEVICE 审中-公开
标题翻译：异位氧化物非易失性存储器件
公开(公告)号：WO2011020122A1
公开(公告)日：2011-02-17
申请号：PCT/US2010/045667
申请日：2010-08-16
申请人： 4D-S PTY LTD. , CHEN, Dongmin
发明人： CHEN, Dongmin
IPC分类号： H01L29/12 , H01L21/28
CPC分类号： H01L45/1233 , G11C11/5685 , G11C13/0002 , G11C13/0007 , G11C13/0023 , G11C13/004 , G11C13/0069 , G11C13/0097 , G11C2213/31 , G11C2213/32 , G11C2213/77 , H01L27/2463 , H01L45/08 , H01L45/146 , H01L45/147 , H01L45/1608 , H01L45/1625 , H01L45/1633
摘要： A memory device is disclosed. The memory device comprises a first metal layer and a first metal oxide layer coupled to the first metal layer. The memory device includes a second metal oxide layer coupled to the first metal oxide layer and a second metal layer coupled to the second metal oxide layer. The formation of the first metal oxide layer has a Gibbs free energy that is lower than the Gibbs free energy for the formation of the second metal oxide layer.
摘要翻译：公开了一种存储器件。存储器件包括第一金属层和耦合到第一金属层的第一金属氧化物层。存储器件包括耦合到第一金属氧化物层的第二金属氧化物层和耦合到第二金属氧化物层的第二金属层。第一金属氧化物层的形成具有比用于形成第二金属氧化物层的吉布斯自由能低的吉布斯自由能。

10. 发明申请

WO2007131170A3 REFLECTIVE SPATIAL LIGHT MODULATOR WITH HIGH STIFFNESS TORSION SPRING HINGE 审中-公开
标题翻译：具有高刚度扭力弹簧铰链的反射空间光调制器
公开(公告)号：WO2007131170A3
公开(公告)日：2008-11-27
申请号：PCT/US2007068243
申请日：2007-05-04
申请人： MIRADIA INC , CHEN DONGMIN , NAUTA TORE
发明人： CHEN DONGMIN , NAUTA TORE
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B3/0008 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/058 , H04N5/7458
摘要： A spatial light modulator for use in display applications. The spatial light modulator includes a support substrate and a flexible member coupled to the support substrate. The spatial light modulator also includes a mirror plate coupled to the flexible member and characterized by an activated position. The mirror plate is adapted to rotate in relation to the flexible member from the activated position to a second activated position in a time less than 6.0 µs.
摘要翻译：用于显示应用的空间光调制器。空间光调制器包括支撑衬底和耦合到支撑衬底的柔性构件。空间光调制器还包括耦合到柔性构件的反射镜板，其特征在于激活位置。镜板适于相对于柔性构件在小于6.0μs的时间内从启动位置旋转到第二激活位置。

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