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1. 发明申请

WO2008054476A2 ELECTROSTATIC NANOLITHOGRAPHY PROBE ACTUATION DEVICE AND METHOD 审中-公开
标题翻译：静电纳米图像探针驱动装置和方法
公开(公告)号：WO2008054476A2
公开(公告)日：2008-05-08
申请号：PCT/US2007006374
申请日：2007-03-14
申请人： UNIV ILLINOIS , LIU CHANG , BULLEN DAVID ANDREW
发明人： LIU CHANG , BULLEN DAVID ANDREW
IPC分类号： G01Q70/16 , G01Q80/00
CPC分类号： G01Q70/06 , G01Q70/16 , G01Q80/00 , G03F7/0002
摘要： Method and apparatus for selectively actuating a cantilevered probe for applying a compound to a substrate in nanolithography. A probe having a probe electrode and a substrate having a counter electrode are provided. Voltage applied to the probe electrode and/or counter electrode provides electrostatic attraction between them, moving a probe tip into sufficient proximity to the substrate to apply the patterning compound. Alternatively, a flexible cantilevered probe anchored to a holder includes a layer of conductive material forming a probe electrode. A counter electrode on the holder faces the probe electrode. The holder and probe are positioned so that a probe tip applies the compound to the substrate. The probe is disposed between the substrate and the counter electrode. An electrostatic attractive force generated between the probe electrode and the counter electrode flexes the probe and lifts the tip away from the substrate to suspend writing.
摘要翻译：用于选择性致动悬臂式探针的方法和设备，用于在纳米光刻术中将化合物施加到衬底。提供具有探针电极和具有对电极的基板的探针。施加到探针电极和/或对电极的电压提供它们之间的静电引力，将探针尖端移动到足够靠近基底以施加图案化合物。或者，固定在支架上的柔性悬臂探针包括形成探针电极的导电材料层。支架上的反电极面向探针电极。固定器和探针的位置应使探针尖将化合物涂覆到基材上。探针设置在基板和反电极之间。在探针电极和反电极之间产生的静电吸引力使探针弯曲并将末端抬离基底以暂停书写。

2. 发明申请

WO2008054476A3 ELECTROSTATIC NANOLITHOGRAPHY PROBE ACTUATION DEVICE AND METHOD 审中-公开
公开(公告)号：WO2008054476A3
公开(公告)日：2008-05-08
申请号：PCT/US2007/006374
申请日：2007-03-14
申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS , LIU, Chang , BULLEN, David, Andrew
发明人： LIU, Chang , BULLEN, David, Andrew
IPC分类号： G12B21/00
摘要： Method and apparatus for selectively actuating a cantilevered probe for applying a compound to a substrate in nanolithography. A probe having a probe electrode and a substrate having a counter electrode are provided. Voltage applied to the probe electrode and/or counter electrode provides electrostatic attraction between them, moving a probe tip into sufficient proximity to the substrate to apply the patterning compound. Alternatively, a flexible cantilevered probe anchored to a holder includes a layer of conductive material forming a probe electrode. A counter electrode on the holder faces the probe electrode. The holder and probe are positioned so that a probe tip applies the compound to the substrate. The probe is disposed between the substrate and the counter electrode. An electrostatic attractive force generated between the probe electrode and the counter electrode flexes the probe and lifts the tip away from the substrate to suspend writing.

3. 发明申请

WO2004103886A2 MICROFABRICATED MICRO FLUID CHANNELS 审中-公开
标题翻译：微流化微流体通道
公开(公告)号：WO2004103886A2
公开(公告)日：2004-12-02
申请号：PCT/US2004/013974
申请日：2004-05-05
申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS , LIU, Chang , RYU, Kee , BULLEN, David
发明人： LIU, Chang , RYU, Kee , BULLEN, David
IPC分类号： B67D
CPC分类号： B01L3/0241 , B01J2219/00369 , B01L2200/12 , B01L2300/0819 , B01L2300/0838 , B01L2300/0887 , B01L2400/0406 , B01L2400/0487 , C40B60/14 , Y10T137/0318
摘要： A fluid delivery system including a first substrate having a micro-channel and a well both formed through the first substrate. The fluid delivery system also includes a second substrate and a delivery channel - The second substrate is on the first substrate and he delivery channel is formed between the first and second substrates. The delivery channel provides fluid communication between the micro-channel and the well.
摘要翻译：一种流体输送系统，包括具有微通道的第一基底和通过第一基底形成的孔。流体输送系统还包括第二基底和输送通道。第二基底位于第一基底上，并且输送通道形成在第一和第二基底之间。输送通道提供微通道和井之间的流体连通。

4. 发明申请

WO2004103886A3 MICROFABRICATED MICRO FLUID CHANNELS 审中-公开
标题翻译：微流化微流体通道
公开(公告)号：WO2004103886A3
公开(公告)日：2006-04-06
申请号：PCT/US2004013974
申请日：2004-05-05
申请人： UNIV ILLINOIS , LIU CHANG , RYU KEE , BULLEN DAVID
发明人： LIU CHANG , RYU KEE , BULLEN DAVID
IPC分类号： B01L3/02 , C40B60/14 , B01L3/00
CPC分类号： B01L3/0241 , B01J2219/00369 , B01L2200/12 , B01L2300/0819 , B01L2300/0838 , B01L2300/0887 , B01L2400/0406 , B01L2400/0487 , C40B60/14 , Y10T137/0318
摘要： A first substrate (28) contains micorchannels (34) connected to wells (44) by delivery channels formed between the first substrate (28) and a second substrate (54).
摘要翻译：第一衬底（28）包含通过形成在第一衬底（28）和第二衬底（54）之间的输送通道连接到阱（44）的微通道（34）。

5. 发明申请

WO2004105046A3 SCANNING PROBE MICROSCOPY PROBE AND METHOD FOR SCANNING PROBE CONTACT PRINTING 审中-公开
公开(公告)号：WO2004105046A3
公开(公告)日：2004-12-02
申请号：PCT/US2004/015161
申请日：2004-05-14
申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS , NORTHWESTERN UNIVERSITY , LIU, Chang , ZOU, Jun , WANG, Xuefeng , BULLEN, David , MIRKIN, Chad , ZHANG, Hua
发明人： LIU, Chang , ZOU, Jun , WANG, Xuefeng , BULLEN, David , MIRKIN, Chad , ZHANG, Hua
IPC分类号： G12B21/02
摘要： A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.

6. 发明申请

WO2004105046A2 SCANNING PROBE MICROSCOPY PROBE AND METHOD FOR SCANNING PROBE CONTACT PRINTING 审中-公开
标题翻译：扫描探针显微镜探针和扫描探针接触印刷的方法
公开(公告)号：WO2004105046A2
公开(公告)日：2004-12-02
申请号：PCT/US2004015161
申请日：2004-05-14
申请人： UNIV ILLINOIS , UNIV NORTHWESTERN , LIU CHANG , ZOU JUN , WANG XUEFENG , BULLEN DAVID , MIRKIN CHAD , ZHANG HUA
发明人： LIU CHANG , ZOU JUN , WANG XUEFENG , BULLEN DAVID , MIRKIN CHAD , ZHANG HUA
IPC分类号： B81B1/00 , B81B3/00 , B82B3/00 , G01Q60/00 , G01Q70/16 , G01Q80/00 , G03F7/00 , G12B21/02 , G03F7/20
CPC分类号： G01Q70/16 , G01Q70/06 , G01Q80/00 , G03F7/0002 , Y10S977/857 , Y10S977/86 , Y10S977/875 , Y10S977/877
摘要： A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.
摘要翻译：公开了一种制造扫描探针显微镜（SPM）探针的方法。通过在衬底上形成结构层来制造探针，其中衬底形成空腔。牺牲层位于基底和结构层之间。在形成结构层时，选择性地去除牺牲层，然后从衬底释放探针。然后可以再次使用底物以形成另外的探针。此外，还公开了使用扫描探针显微镜探针的接触印刷法。

7. 发明申请

WO2004048063A1 PROCESS AND APPARATUS FOR HEATING POLYMER MATERIAL WITH INFRARED RADIATION 审中-公开
标题翻译：用红外辐射加热聚合物材料的方法和装置
公开(公告)号：WO2004048063A1
公开(公告)日：2004-06-10
申请号：PCT/CH2003/000713
申请日：2003-10-31
申请人： MAILLEFER SA , DESARZENS, Philippe , BULLEN, David , KARLING, Raul, Bertel , SCHLÄFLI, Daniel
发明人： DESARZENS, Philippe , BULLEN, David , KARLING, Raul, Bertel , SCHLÄFLI, Daniel
IPC分类号： B29C35/06
CPC分类号： B29C35/06 , B29C44/28 , B29C47/0021 , B29C47/88 , B29C47/8805
摘要： Process and apparatus for heating a product (3) made up of a polymer material (2) having predetermined infrared absorption characteristics, the said product comprising an external surface (30), the process comprising at least a first step of irradiating the external surface (30) of the product (3) with an infrared heater (6) in order to accomplish one of the two reactions that are cross-linking reaction and a forming reaction in the polymer material (2), wherein at least one first step of irradiating the external surface (30) of the product (3) with infrared irradiation is followed by a second step consisting in removing heat from the external surface (30) of the product (3) with a cooling device (7).
摘要翻译：用于加热由具有预定红外吸收特性的聚合物材料（2）制成的产品（3）的方法和装置，所述产品包括外表面（30），该方法包括至少第一步骤，照射外表面 30）与红外加热器（6）进行反应，以实现在聚合物材料（2）中交联反应和形成反应的两个反应之一，其中至少一个照射第一步骤用红外线照射的产品（3）的外表面（30）之后是第二步骤，其中包括用冷却装置（7）从产品（3）的外表面（30）去除热量。

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